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CVD SiC Coating Nozzle
CVD SiC Coating Nozzle inogadzirwa uchishandisa substrate ye graphite ine density yakakura pamwe chete ne CVD silicon carbide (SiC) coating yakakora. Mumaitiro ekukura kwe epitaxial akadai seSi epitaxy, SiC epitaxy, uye MOCVD deposition, nozzle inoita basa rakakosha mukuunza nekutungamira magasi e process mu reaction chamber. Nekugonesa kuyerera kwegasi kwakasimba uye kugoverwa kwakarurama, inobatsira kuchengetedza kukura kwakafanana kwe epitaxial layer uye mhando ye wafer yakafanana. Semixlab CVD SiC Coating Nozzle inoshandiswa zvakanyanya mu epitaxy reactors, MOCVD systems, uye CVD michina inodziya zvakanyanya. Ndiri kutarisira kubvunza kwako.
tsananguro
CVD SiC Coating Nozzle chinhu chakakosha pakuendesa gasi muma semiconductor epitaxial reactors. Yakagadzirwa kuti ikwanise kutsungirira tembiricha yakakwira uye nharaunda dzinopisa nemakemikari dzinowanzo sangana nadzo panguva yekukura kwe epitaxial.
Iyi SiC Coated Nozzle inoshandisa high-purity isostatic graphite substrate yakasanganiswa ne dense chemical vapor deposition (CVD) silicon carbide (SiC) coating. Iyo graphite substrate inopa machinability akanaka uye kugadzikana kwekupisa, nepo SiC coating ichiumba high-purity, ine makemikari asina kudzivirira, ichivimbisa kushanda kwenguva refu munzvimbo dzinoda kugadzirwa kwe semiconductor.
CVD SiC Coating Nozzle inoshandiswa zvakanyanya musilicon epitaxy, silicon carbide epitaxy, gallium nitride MOCVD, nedzimwe nzira dzepamusoro dzekuisa gasi uko kugoverwa kwemagasi kwakanyatsojeka uye kudzora kusvibiswa kwakakosha kuchengetedza kugadzikana kwemaitiro uye kugona kwewafer.
Mabasa eMabhuru muSemiconductor Epitaxial Processes
Mukati me epitaxial reactors, magasi e process anofanirwa kuendeswa mukamuri re reaction nemazvo kuti awane kukura kwakafanana kwekristaro. Ma nozzles anoita basa rakakosha mukuunza nekutungamira magasi ekutanga kunzvimbo ye wafer.
Magasi anowanzo shandiswa kuburikidza nema nozzles anosanganisira:
● Silane (SiH₄)
● Trichlorosilane (TCS, SiHCl₃)
● Gasi rinotakura Hydrogen (H₂)
● Amoniya (NH₃)
● Zvinhu zvinoumba metalorganic muMOCVD systems
Nekudzora mafambiro egasi, kumhanya, uye kupararira kwaro, ma nozzles anoita kuti magasi anopinda asvike pamusoro pe wafer pasi pemamiriro ekuyerera kwakasimba uye kwakadzikama. Izvi zvinokanganisa zvakananga parameters dzinokosha:
● Kufanana kweukobvu hweEpitaxial layer
● Kushanda zvakanaka kwedoping
● Kuwanda kwakakwana kwewafer
● Kugona kudzokorora maitiro ese
Saka, ma nozzles anoonekwa sezvinhu zvakakosha pakupinza gasi uye kudzora kuyerera kwemvura mukati memakamuri epitaxial.
Magadzirirwo
| Basic zvemuviri zvimiro zveCVD SiC coating | |
| pfuma | Kukosha kwechimiro |
| Chigadzirwa cheCrystal | FCC β phase polycrystalline, kunyanya (111) yakatarisana |
| Density | 3.21 g / cm³ |
| neukukutu | 2500 Vickers kuoma (500g mutoro) |
| Kukura kweGrain | 2 ~ 10μm |
| Kemikari Kuchena | 99.99995% |
| Kupisa Unyanzvi | 640 J·kg-1·K-1 |
| Sublimation Temperature | 2700 ° C |
| Flexural Simba | 415 MPa RT 4-poindi |
| Young's Modulus | 430 Gpa 4pt bend, 1300 ℃ |
| Thermal Kuitisa | 300W·m-1·K-1 |
| Kuwedzera kweThermal (CTE) | 4.5 × 10-6K-1 |
Applications
Mabhenefiti muEpitaxial Growth Applications
● Kudzivirira ngura zvakanyanya
Maitiro ekukura kweEpitaxial anowanzo shandisa magasi anochinja-chinja akadai sehydrogen, chlorine-containing compounds, uye ammonia. CVD SiC coatings inoratidza kusimba kukuru kune nharaunda idzi dzinoparadza, ichidzivirira kuora kwezvinhu uye ichichengetedza kushanda kwakasimba kwenguva yakareba.
● Kushanda Kwekupisa Kwakanyanya
Maitiro ekukura kweEpitaxial anowanzo shanda patembiricha inodarika 1000°C kusvika 1500°C. Mapendi eSiC anochengetedza chimiro chakasimba uye kugadzikana kwemakemikari pasi pemamiriro ezvinhu akaipisisa aya, zvichiita kuti pave nekushanda kwakasimba uye kwakavimbika.
● Kugadzirwa Kwezvikamu Zvishoma
Kusvibiswa kwezvikamu zvesimbi chinhu chinonyanya kukonzera dambudziko mukugadzirwa kwema semiconductor. Mapendi eSiC akasimba, akachena zvakanyanya anoderedza kukurwa kwevhu uye kupararira kwemvura pamusoro, zvichibatsira kuchengetedza nzvimbo dzakachena kwazvo dzereactor uye kuchengetedza mhando yewafer.
● Nguva Yenguva Yekushandisa Midziyo Yakawedzerwa
Zvichienzaniswa nezvikamu zvegraphite zvisina kuputirwa, SiC coatings inoshanda sechidziviriro, ichiwedzera zvakanyanya hupenyu hwebasa remumuromo. Izvi zvinoderedza nguva yekugadzirisa, zvinoderedza mari yekutsiva, uye zvinowedzera nguva yekushanda kwemidziyo yese.
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