SiC Plate yeICP Etching

Zvinodiwa Zvinodiwa: Yakagadzirirwa Kuda Nzvimbo dzePlasma

Kuti isangane nezvinoda kuomesesa zveICP etching nharaunda, iyo SiC plate inofanirwa kuve neanotevera akakosha maitiro:

● Yakanakisa Thermal Conductivity

SiC ine yakanyanya kupisa yekupisa conductivity, inopfuura nekure iyo yezvinhu zvechinyakare zvakaita sequartz kana alumina. Izvi zvinoreva kuti inogona kunyatso kuitisa kupisa kunogadzirwa panguva ye etching process kure newafer, zvichinyatso kudzivirira kupisa kwenzvimbo.

Benefits: Ita shuwa tembiricha yeyunifomu padenga rewafer, zvichikonzera kudzika kwakasimba kwe etch uye yakakosha dimension (CD) kutonga, kuvandudza zvakanyanya goho uye kuderedza zvimedu zvimedu.

● Superior Plasma Shock Resistance

Munzvimbo yeplasma yeICP etching, izvo zvinhu zvichatarisana ne-high-energy ion bombardment uye kemikari kuora kweanoshanda emahara radicals. SiC ine yakanakisa plasma kuramba, kunyanya mufluorine- kana chlorine-ine etching magasi.

Benefits: Kuwedzera hupenyu hwesevhisi yewafer carrier, kuderedza kutsiva frequency uye downtime, nekudaro kuderedza mari yekushandisa uye nekuvandudza mashandisirwo emidziyo. Panguva imwecheteyo, yakagadzikana zvinhu zvinhu zvakare inoderedza njodzi yekusvibiswa kwechidimbu.

● Kusawirirana Kwetembiricha

Yakasanganiswa neiyo yakanyanya kupisa conductivity uye yakaderera coefficient yekuwedzera kwemafuta, vatakuri veSiC vanokwanisa kuchengetedza yakanakisa tembiricha yakafanana pane yese wafer pamusoro. Izvi zvakakosha kune chaiyo etching, kunyanya kune inodzika zvinhu seGaN.

Benefits: Ita shuwa kuchinjika kuchinjika kwechishandiso chega chega, kuderedza mashandiro echishandiso, uye kupa mhando yepamusoro uye kuvimbika kwezvigadzirwa zvako zveLED.

Aya maficha ekuita akakosha kuti uwane inodzokororwa uye chaiyo etching mu LED wafer kugadzirwa.

Sei Sarudza Semixlab: Yakagadzirirwa Solutions. Kuvimbwa Hunhu

Kusarudza Semixlab zvinoreva kuti unosarudza kuita, kuvimbika uye masevhisi akagadziridzwa:

1. Zvakasiyana-siyana zvinotsanangurwa zviripo, uye masevhisi akagadziridzwa anopihwa:

Isu tinonyatsoziva kuti akasiyana ICP etching midziyo uye maitiro ane akasiyana zvinodiwa zvewafer carrier saizi, gomba chinzvimbo, uye clamping nzira. Semixlab inopa akasiyana siyana akajairwa eSiC wafer vatakuri kuti asangane neyakajairwa musika zvinodiwa.

Zvinotonyanya kukosha, isu tinopa nyanzvi dzekugadzirisa mabasa. Kunyangwe iwe uchida saizi yakakosha, yakaoma zvimiro dhizaini, kana optimization kune chaiwo maitiro, timu yedu yeinjiniya inogona kushanda padhuze newe kuti ipe mhinduro dzakagadzirwa. Izvi zvinoreva kuti iwe unogona kuwana mutakuri anonyatsoenderana nemidziyo yako uye maitiro, achiwedzera kugadzirwa kwakanaka uye goho.

2. Hunhu Hwakagadzikana & Kukurumidza Kuendeswa

Yedu yakaomesesa yemhando yekudzora sisitimu inovimbisa kuenderana mumabhechi, nepo kugadzira kwedu kwakanaka uye zvinhu zvinovimbisa kukurumidza kutungamirira nguva, zvichikubatsira kusangana neakaomesesa ekugadzira mashedhi.

Vimba Semixlab - Yako SiC Material Partner muAdvanced Plasma Etching

Nemakore echiitiko chekushandira semiconductor coating indasitiri, Semixlab inosanganisa yakadzika hunyanzvi hwezvinhu, mamiriro-e-iyo-anyanzvi kugadzirisa, uye yakatarisana nevatengi sevhisi kuendesa zvikamu zvinosimudzira kugadzikana kwemaitiro uye mhando yechigadzirwa.

Chikumbiro: Yakagadzirirwa ICP Etching muIndasitiri ye LED

Mune yepamusoro yekugadzira LED maitiro, ICP (Inductively Coupled Plasma) etching inhanho yakakosha yekuwana chaiyo micro-patterning pane semiconductor wafers. Semixlab's SiC plate inoshanda seyakavimbika wafer mutakuri kana inobata panguva yeICP etching process. Yayo yakasimba zvinhu zvinhu inovimbisa kugadzikana kwemaitiro kunyangwe pasi peyakanyanya plasma mamiriro, zvichiita kuti ive chinhu chakakosha kune yakakwira-goho, yakakwirira-yakafanana mitsara yekugadzira LED.