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SiC Coated Graphite Barrel Susceptor
Semixlab's SiC Coated Graphite Barrel Susceptor ndeyepamusoro-inoshanda yekudzora kupisa uye wafer-rutsigiro chikamu chakagadzirirwa yakanangana neSiC epitaxy maitiro. Yakagadzirwa kubva kune yakakwirira-kuchena graphite uye yakachengetedzwa neyakajeka-engineered SiC coating, iyo susceptor inovimbisa kugadzikana kwepamusoro-tembiricha kushanda, inoderedza kusvibiswa kwengozi, uye inochengetedza yakanakisa kupisa kufanana kune akawanda-wafer epitaxial reactors. Yayo yakagadziridzwa barrel geometry inotsigira yakadzikama gasi kuyerera, ichigonesa yepamusoro firimu-ukobvu uye doping kufanana kwakakosha kune yakakwirira-yakavimbika SiC magetsi emagetsi.
tsananguro
Mukugadzirwa kwemazuva ano-semiconductor-kunyanya SiC neGaN epitaxy-mhando yemamiriro ekupisa mukati me reactor inotaridza zvakananga kufanana, defect density, uye kudzokorora kwemafirimu epitaxial. Semixlab's SiC Coated Graphite Barrel Susceptor yakagadzirirwa kusangana nekuwedzera kuomarara kwepamusoro-tembiricha CVD reactors anoshandiswa muhupamhi-bandgap magetsi mudziyo kugadzirwa. Nekubatanidza yakakwirira-kuchena graphite ine yakanyatso kugadzirwa SiC coating, iyo susceptor inopa yakasarudzika yekupisa kufanana, kugadzikana kwemakemikari, uye kuvimbika kwemuchina mukati menguva refu, yakakwirira-tembiricha epitaxial maitiro.
Papakati pekuita kwayo ndeye Semixlab's proprietary coating architecture, iyo inokwidziridza emissivity uye yekudziya kupindura kwakakosha kune yakagadzikana wafer-level tembiricha. Iyo SiC coating inoshanda senge chemakemikari inert chipingamupinyi kurwisa corrosive chlorinated chemistries inowanzoshandiswa muSiC epitaxy, kudzivirira kuparara kwegraphite uye kubvisa hombe sosi yekugadzira particle. Dziviriro iyi inovimbisa yakaderera kusvibiswa mazinga uye inobatsira kuchengetedza yakachena kuita nharaunda kunyangwe pasi pehukasha maitiro emamiriro anodarika 1500 ° C. Iyo barrel geometry inogadziridzwa kuti igadzire yakagadzikana uye yakaenzana gasi-kuyerera munda kune akawanda wafers, kuderedza muganho-layer kusiyanisa uye kugonesa yakanakisa firimu-ukobvu uye doping kufanana mune akawanda-wafer epitaxial reactor.
Kubva pamichina yekuvimbika maonero, Semixlab's SiC yakavharwa susceptor inochengeta kutendeseka kwechimiro pane inodzokororwa yekupisa kutenderera uye yakakwirira-yakawanda wafer kurodha. Iyo yakagadziridzwa yekututira ukobvu, micro-crystalline SiC chimiro, uye yekupisa-yekuwedzera inoenderana neiyo graphite substrate inoshanda pamwe chete kudzikisa kupfeka kwepamusoro uye kudzivirira kudonha kwediki-diki pamusoro pehupenyu hwesevhisi hwakawedzerwa. Izvi zvinopa zvakananga kune yakakwira goho uye yakaderera kugadzirisa frequency ye epitaxy maturusi.
Kune machira anokwidza SiC magetsi ekugadzira mudziyo, iyo susceptor inoshanda seyakakosha inogonesa yeinofanana epi mhando. Iyo inodzikamisa kugovera tembiricha yewafer, inochengetedza inodzorwa kupisa kwekubatanidza, inodzivirira substrates kubva pakusvibiswa kusingatarisirwe, uye inotsigira inodzokororwa, yakakwira-uniformity reaction nharaunda. Kuburikidza neiyi musanganiswa wekusimba, kuchena, uye kunyatsopisa kwekupisa, Semixlab's Barrel Susceptor inobatsira vagadziri kuti vakwanise kudzora maitiro, kuvandudzwa kwemagetsi epitaxial layers, uye kuvimbika kwepamusoro kweSiC MOSFETs, diode, uye mamodule emagetsi.
Yakagadzirirwa kufambirana nemapuratifomu makuru akatwasuka uye akachinjika SiC epitaxy, iyo Semixlab SiC Coated Graphite Barrel Susceptor yakanakira mitsara yekugadzira yakakwira-vhoriyamu ichitsvaga zvinhu zvehupenyu hurefu uye kuita zvinofanofungidzira. Yese yuniti inogadzirwa pasi pekuomesera kwezvinhu-kukodzera uye dimensional-kurongeka zviyero, kuve nechokwadi chekushanda kunoenderana pamabhechi. Nehunyanzvi hweSemixlab muzvigadzirwa zvemhando yepamusoro uye semiconductor process engineering, chigadzirwa chinopa machira ane akavimbika, maitiro-anopupurirwa mhinduro inotsigira inoyerwa kuvandudzwa mukufambisa, wafer kufanana, uye chishandiso uptime-kugadzirisa zvese zviri zviviri mashandiro eindasitiri uye yenguva refu-ye-muridzi kufunga.
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