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TaC yakavhara graphite mhete
TaC Coated Graphite Rings kubva kuSemixlab yakagadzirirwa kuita zvakanyanya mukugadzira semiconductor. Yedu yakakwirira-kuchena Tantalum Carbide (TaC) CVD yekubikira mhete yakakosha kune CVD, PVD, uye plasma etching maitiro, inoshanda senge gidhi mhete, mhete dzekutarisa, uye liner mhete. Deredza kusvibiswa kwechikamu uye simbisa goho rewafer nezvinhu zvedu zvinogara uye zvakavimbika.
tsananguro
Semixlab TaC Coated Graphite Ring chinhu chakakosha chinoshandiswa kunyanya mukati memichina yekugadzira semiconductor. Inoumbwa nepamusoro-kuchena graphite substrate yakanyatsoputirwa nejira reTantalum Carbide (TaC). Ichi chifukidziro chepamusoro chinopa nzvimbo yepamusoro inochengetedza girafu yepasi kubva kune hutsinye hwemakemikari mamiriro uye yakakwirira-yekushisa.
Yedu TaC Coated Graphite Rings inobatsira mukuita seChemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), uye plasma etching. Ivo vanoshanda sechidziviriro chinodzivirira, chindori chekutungamira, kana chikamu chakakosha chechimiro mukamuri yekupindura, kuve nechokwadi chekutendeseka uye kunaka kweyekupedzisira semiconductor wafer.
Magadzirirwo
| Zvenyama zvimiro zveTantalum Carbide (TaC) Coating | |
| Density | 14.3 (g/cm³) |
| Specific emssivity | 0.3 |
| Thermal kuwedzera kuwedzera | 6.3*10-6/K |
| Kuoma (HK) | 2000 HK |
| musimbwa | 1 × 10-5 Om*cm |
| Thermal kudzikama | <2500 ℃ |
| Graphite saizi inoshanduka | -10 ~ -20um |
| Bemhapemha ukobvu | ≥20um yakajairika kukosha (35um±10um) |
Applications
Zvikumbiro muSemiconductor Maitiro
Iwo akasimba zvivakwa zveTaC Coated Graphite Rings yedu yekugadzira Semiconductor inoita kuti ive yakakosha mukushandisa akati wandei.
1. Chemical Vapor Deposition (CVD)
Mune CVD maitiro, uko magasi anobatwa patembiricha yakakwira kuti aise mafirimu matete pawafers, iyo reaction chamber inzvimbo ine hukasha. Yedu CVD TaC yakavharwa zvindori zvinoshandiswa se susceptor mhete, gidhi mhete, uye liner mhete. Vanopa dziviriro yakasarudzika kubva kumagasi anoparadza uye kurwiswa kwemakemikari, kudzivirira kusvibiswa kwechikamu uye kuve nechokwadi chekukora firimu reyunifomu pane wafer. Iyo yakanyanya kugadzikana yekupisa kweTaC inobvumira kushanda kwakagadzikana kunyangwe pakupisa kwakanyanya.
2. Physical Vapor Deposition (PVD)
Kune PVD sputtering uye e-beam evaporation, zvindori zvedu zvinoshanda sezvinhu zvakakosha mukati mevacuum chamber. Dzinoshanda semhete dzekudzivirira kana mhete dzekutungamira dzinodzivirira dzimwe nhengo dzakasimba kubva kumarara ekuputira uye kubhomba kweplasma. Kuomarara kunoshamisa uye kuwanda kweTaC coating inoita kuti isanyanya kukukurwa nekukura, ichideredza zvakanyanya njodzi yekuparara kwechikamu uye kunotevera kukanganisa.
3. Plasma Etching
Munguva yePlasma etching, plasma inoshanda zvakanyanya inoshandiswa kusarudza kubvisa zvinhu kubva pachipfu. Iyi nzira inobata zvikamu
Kukwikwidza Kunobatsira
Zvakanakira zveSemixlab TaC Coated Graphite Rings
1. Superior Durability
● Dense CVD TaC coating inopikisa plasma, makemikari kurwisa, uye mechanical kupfeka zviri nani kudarika girafu isina chinhu.
2. Kuchena kwakakwirira kweSemiconductor Goho
● Yakagadzirwa ne-ultra-low tsvina graphite uye yakakwirira-kuchena TaC coating kuderedza ionic kusvibiswa.
3. Precision Machining & Coating Control
●Machini epamusoro ekushivirira kwakasimba; yunifomu coating ukobvu kuti anowirirana kuita.
4. Customization & Engineering Support
● Sarudzo dzemadhayamita akasiyana, maprofayiri emuchinjika, ukobvu hwekuputira, uye zvisimbiso.
● Kubvunzurudzwa kwehunyanzvi hwemagadzirirwo-chaiwo magadzirirwo.
5. Fast Prototyping & Global Supply
●Kukurumidza kugadzirwa kwemuenzaniso, zvinhu zvepasi rose, uye nguva dzekutungamira dzakavimbika.
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