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TaC Coated LED epi susceptor
| Nzvimbo Yokutanga: | China |
| Brand Name: | Semixlab |
| Model Number: | TaC yakavharwa ne LED epi susceptor-01 |
| advertising: | ISO9001 |
| Minimum Order Yakawanda: | Zvichienderana nenhaurirano |
| Price: | Bata kune Customized quote |
| Packaging Details: | Chiyero chekunze chinotakurirwa kunze |
| Nguva Yokutora: | 30-45 Mazuva Mushure meOrder Kusimbiswa |
| Mitemo Yekubhadhara: | T / T |
| Kupa Mikana: | 100 zvikamu / Mwedzi |
tsananguro
TaC yakavharwa ne LED epi susceptor inotora yakakwira kuchena tantalum carbide (TaC) yekubikira tekinoroji, iyo yakanyatso gadzirirwa MOCVD (simbi organic makemikari vapor deposition) midziyo uye inokodzera yakanyanya tembiricha deposition process ye LED epitaxial wafers. Chigadzirwa chacho chine yakanakisa tembiricha yekudzivirira, corrosion kuramba uye kugadzikana kwemafuta, izvo zvinogona kuderedza zvakanyanya kusvibiswa uye kudonhedzwa kwechikamu, uye kuwedzera hupenyu hwebasa. Iyo isarudzo yakanaka yekuvandudza LED epitaxial wafer goho uye kugona kwekugadzira.
Application:
TaC yakavharwa ne LED epi susceptor yakanyatsogadzirirwa MOCVD michina uye inonyanya kushandiswa mu LED epitaxial wafer kugadzirwa, kunyanya epitaxial kukura kwe gallium nitride (GaN) -based blue uye ultraviolet LEDs. Inogonawo kuzadzisa zvinodiwa zvekugadzira zveSiC/GaN simba semiconductor zvishandiso uye inokodzera kudziya kwepamusoro-tembiricha CVD, MBE uye zvimwe zviedzo zvekuisa zvinhu mumasaenzi ekutsvagisa.
Masevhisi anogona kupihwa:
Mutengi application mamiriro ekuongorora, kuenzanisa zvinhu, tekinoroji kugadzirisa dambudziko.
Chikamu chekambani:
Semixlab ine 2 marabhoritari, timu yenyanzvi ine makore makumi maviri eruzivo rwezvinhu, iine R&D uye kugadzira, kuyedza uye ongororo kugona.
Magadzirirwo
Technical Parameters
| purojekiti | parameter |
| Substrate zvinhu | High kuchena isostatic graphite (kuchena ≥99.99%) |
| Bemhapemha zvinhu | Tantalum Carbide (TaC) |
| Inoshanda tembiricha | ≤1350 ° C (inoramba ichishanda tembiricha 1200 ° C) |
| Bemhapemha ukobvu | 50-200μm (customizable) |
| miganhu | Tsigira 2/4/6 inch epitaxial wafer kurodha (tsigiro OEM customization) |
Applications
Main application fields
| Maitiro ekushandisa | Mamiriro ezvinhu chaiwo |
| LED epitaxial wafer kugadzirwa | Inokodzera GaN-yakavakirwa epitaxial kukura kwebhuruu mwenje, ultraviolet LEDs, nezvimwe. |
| Simba Zvishandiso | SiC uye GaN simba semiconductor MOCVD maitiro. |
| Nzvimbo Yokutsvakurudza | High tembiricha CVD, MBE uye zvimwe zvinhu deposition kuedza. |
Ecological chain verification endorsement
Semixlab TaC yakavharwa ne LED epi susceptor's ecological chain verification inovhara zvigadzirwa kusvika pakugadzirwa, yakapfuura certification yepasirese, uye ine akati wandei matekinoroji epatent kuti ive nechokwadi chekuvimbika kwayo uye kusimba mune semiconductor uye simba idzva minda.
Yakajairika application process
Kugadzirira Kwezvinhu zvakasvibirira (Yakakwirira-kuchena girafu yekuongorora) → Kugadzirwa kweSubstrate (Isostatic kudzvanya) → TaC Coating process (CVD deposition) → Post-Processing (Kukwenenzvera chaiko) → Kuongorora Hunhu → Kurongedza & Kuendesa
Sezvo tekinoroji ye LED ichikura ichienda kumadiki madiki uye nemazvo epamusoro senge Mini LED uye Micro LED, kugadzikana uye maitiro ekudzora zvinodiwa zveMOCVD michina iri kuramba ichikwira. Kusimudzirwa kweTaC yakavharwa ne LED epi susceptor haingogone kuvandudza mashandiro eiyo iripo LED kugadzirwa, asi zvakare inopa yakawedzera yakavimbika kugadzira hwaro hwechizvarwa chinotevera chekuratidzira tekinoroji.
Kuti uwane ruzivo rwakadzama rwehunyanzvi hwekuita, mapepa machena, kana sampuli yekuyedza gadziriro, ndapota taura neTechnical Support Team kuti uongorore kuti Semixlab inogona sei kusimudzira maitiro ako.
Kukwikwidza Kunobatsira
Semixlab TaC yakavharwa LED epi susceptor musimboti zvakanakira
Super yakakwirira tembiricha kuramba
TaC-yakavharidzirwa LED epitaxial susceptors yakagadzirwa nepamusoro-kuchena tantalum carbide material, iyo inogona kushanda zvakasimba kwenguva yakareba munzvimbo dzepamusoro-soro pamusoro pe1200 ° C. Kunyangwe pasi pemamiriro ekushisa akanyanya eMOCVD maitiro, kupfekedza hakuzotsemuka kana kusvuura, kuve nechokwadi chekufanana uye kusimba kweiyo epitaxial yekukura maitiro uye zvinobudirira kuvandudza chigadzirwa goho.
Kwakanaka ngura kuramba
Munguva yekugadzira ma LED epitaxial wafers, iyo susceptor inoda kuratidzwa kune inoora gasi nharaunda senge H2 uye NH3 kwenguva yakareba. TaC coating ine kusimba kwemakemikari inertness uye inogona kunyatso ramba kukukurwa kwegasi uye kudzivirira kusvibiswa kunokonzerwa neoxidation kana kuita, nekudaro kuve nechokwadi chekuchena uye optoelectronic kuita kweiyo epitaxial wafer.
Low thermal deformation
Iyo yekupisa yekuwedzera coefficient yeTaC coating inofananidzwa zvakanyanya neiyo yegraphite substrate, uye iyo susceptor inogona kuchengetedza yakanyanya kuderera yekushisa deformation mwero kunyangwe munguva yekukurumidza kukwira nekudonha. Ichi chiitiko chinogona kuderedza zvakanyanya njodzi ye epitaxial wafer warping, kuve nechokwadi chekukura kwakafanana kweiyo epitaxial layer, uye kuvandudza kuenderana kwechigadzirwa.
Kupera kwepamusoro kwepamusoro
Iyo susceptor surface yakanyatsokwenenzverwa, nekukasharara kunodzorwa pazasi 0.5μm, zvinobudirira kudzikisa chirema panguva yekukura epitaxial. Iyo yakatsetseka yepamusoro inogona zvakare kuderedza kunamatira pakati peepitaxial wafer uye susceptor, zvichiita kuti zvive nyore kubvisa wafer uye kuderedza njodzi yekuputsika kwewafa.
Hupenyu hwakareba dhizaini
Kuenzaniswa neyechinyakare graphite susceptors, TaC coating ine zvirinani kupfeka kuramba uye kusaita ngura, uye hupenyu hwayo hwesevhisi hunogona kuwedzerwa nekanopfuura katatu. Izvi hazvingodzikisi chete kuwanda kwekugadziriswa kunogadziriswa, asi zvakare kunoderedza kushanduka kwemaitiro kunokonzerwa nekuchembera kwe susceptor, izvo zvinogona kuderedza zvakanyanya mutengo wekugadzira mukufamba kwenguva.
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