TaC yakavharwa negraphite cover plate

Iyo TaC (Tantalum Carbide) yakavharwa graphite yekuvhara ndiro yakagadzirirwa kuda semiconductor yekugadzira maitiro, anosanganisira MOCVD (Metal-Organic Chemical Vapor Deposition) uye plasma etching. Ichi chikamu chakakosha chakagadzirwa kuti chishande sechivharo chinodzivirira mukati memakamuri ekugadzirisa. Basa rayo rekutanga kuchengetedza zvakakosha zvemukati kubva kune hasha, gasi rinoparadza uye yakakwira-simba plasma, uku ichibatsirawo kubata kuyerera kwemagasi anoshanda. Nekuona nzvimbo yakagadzikana uye yakachena, mahwendefa edu ekuvhara akakosha mukuwedzera hupenyu hwemidziyo uye kugadzirisa goho.

Ⅰ. Core Materials uye Superior Properties

Mahwendefa edu ekuvhara akagadzirwa nehunyanzvi achishandisa yakakwirira-kuchena graphite substrate, yakasimbiswa nedense layer yeTantalum Carbide (TaC).

High-Purity Graphite: Iyo graphite core inopa kutendeseka kwechimiro uye kusimba kwekupisa kunodiwa kune yakanyanyisa kushanda mamiriro. Kugadzikana kwayo kwakanakisa kwekushisa uye kuderera kwekuwedzera kwekuwedzera kwemafuta kunodzivirira warping uye deformation pakupisa kwakanyanya. Sechinhu chakareruka asi chakasimba, chinoderedza kupisa kwemafuta, zvichibvumira kudziya kwakanaka uye kutonhora kutenderera.

Tantalum Carbide (TaC) Coating: Iyo TaC coating ndiyo kiyi yekuita kwepamusoro kwechikamu. Tantalum Carbide irefractory ceramic inozivikanwa nekuomarara kwayo kwakanyanya uye kusaenzana kwemakemikari inertness. Uku kupfekedzwa kunoshanda senhoo yakasimba, ichipa kusarudzika kupikisa plasma ine hukasha uye inoparadza kemikari. Izvo zvakakosha pakudzivirira kugadzirwa kwezvikamu uye kusvibiswa, zvinova zvinhu zvakajairika munzvimbo dzakachena dzemakamuri.

Ⅱ. Akakosha Mabasa muSemiconductor Maitiro

Yedu TaC yakavharwa graphite yekuvhara mahwendefa anoita akati wandei akakosha mabasa akakosha pakubudirira semiconductor kugadzirwa.

● Contamination Control: Iyo isiri-porous uye kemikari inert TaC pamusoro inogadzira chipingamupinyi chakakwana, ichidzivirira iri pasi pegirafu kubva pakuita nemagasi ekugadzirisa uye kubuda. Izvi zvinodzikisira zvakanyanya njodzi yekusvibiswa kwechikamu uye hurema hwewaferi, izvo zvakakosha kuti uwane goho repamusoro.

● Dziviriro Yemidziyo: Iyo yekuvhara ndiro inoshanda sechibairo chibairo chinotora kukanganiswa kwehasha process chemistries uye plasma. Izvi zvinodzivirira zvakanyanya kusimba uye zvinodhura zvikamu mukati meiyo reactor kamuri - senge madziro ekamuri uye zvinhu zvekudziya - kubva mukukukurwa uye kukuvara, nekudaro kuwedzera hupenyu hwese hwemidziyo.

●Kugadzirisa Gasi: Dhizaini nekuiswa kwendiro yekuvharira inogadzirwa kuti ibatsire kuve nekutungamira kuyerera kwemagasi anoshanda. Iyi inodzorwa kuyerera kwegasi yakakosha pakuona yunifomu yekuiswa kwefirimu kana kunyatso kutsetseka kwese kwese wafer pamusoro, zvichibatsira kugadzirisa kudzokorora uye kuenderana.

● Thermal Management: Iko kuumbwa kwezvinhu kunobatsira kuchengetedza yakagadzikana yekupisa mbiri mukati mekamuri. Uku kuenderana kwekupisa chinhu chinodiwa chepamusoro-chaizvo maitiro, uko kunyangwe kudiki kuchinjika kwekushisa kunogona kukanganisa kunaka kwefirimu uye kuita kwechishandiso.

PaSemixlab, isu takazvipira kuendesa emhando yepamusoro zvikamu uye Tsika masevhisi kune semiconductor indasitiri. Chikwata chedu cheinjiniya chinogona kushanda newe zvakananga kugadzira TaC yakavharwa magirafu evhavha mahwendefa anonyatsoenderana nehukuru hwemidziyo yako, maratidziro echimiro, uye yakasarudzika maitiro ekuita.

Zvichakadaro, timu yedu yehunyanzvi nyanzvi ine ruzivo rwakadzama mune semiconductor maitiro. Isu takagadzirira kukubatsira nekusarudza chigadzirwa, kugadzirisa mashandiro, uye kugadzirisa matambudziko, kuve nechokwadi kuti iwe unowana zvakanakisa mhedzisiro kubva kune yedu zvikamu. Isu tinotarisira nemoyo wose kuve shamwari yako yenguva refu muChina.