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TaC Yakaputirwa Porous Graphite Plate
Semiconductor yekugadzira inoda zvinhu zvinokwanisa kumirisana nemamiriro akanyanya uku uchichengetedza kuchena kusingachinjiki uye kuita. Iyo Semixlab TaC yakavharwa porous graphite plate inogadzirwa chaizvo kune ino nharaunda. Iyo inosanganisa yakasarudzika mabhenefiti epamusoro-kuchena porous graphite ine yekupedzisira-yakasimba, inodzivirira Tantalum Carbide (TaC) yekuputira, ichipa mhinduro yepamusoro yezvinonyanya kudiwa maapplication mucompound semiconductor yekugadzira.
tsananguro
Yedu TaC yakavharwa porous graphite plate ndeyepamusoro-inoita composite zvinhu zvakagadzirirwa kukurira zvisingakwanisi zvechinyakare magirafu zvikamu mukupisa kwepamusoro-soro, reactive atmospheres. Nheyo ndeye porous graphite substrate, isingaremi, yakanyatsogadzikana fomu yegraphite ine network yeakabatana pores. Ichi chimiro chakasiyana chinopa nzvimbo yakakwirira yepamusoro uye yakanakisa yekupisa zvinhu.
Uchishandisa chaiyo Chemical Vapor Deposition (CVD) maitiro, dense, nhete yeTantalum Carbide (TaC) inoiswa pamusoro. Iyi refractory ceramic coating inoshanda sechivharo chakasimba chekudzivirira, kuvhara iyo porous graphite uye inosimudzira zvinoshamisa kuita kwayo mechanic, kemikari, uye yekupisa.
Magadzirirwo
| Zvenyama zvimiro zveTaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emssivity | 0.3 |
| Thermal kuwedzera kuwedzera | 6.3*10-6/K |
| Kuoma (HK) | 2000 HK |
| musimbwa | 1 × 10-5 Om*cm |
| Thermal kudzikama | <2500 ℃ |
| Graphite saizi inoshanduka | -10 ~ -20um |
| Bemhapemha ukobvu | ≥20um yakajairika kukosha (35um±10um) |
Applications
Zvishandiso muAdvanced Semiconductor Manufacturing
Iyo synergy yeporous graphite uye TaC coating inoita kuti chinhu ichi chive chinhu chakakosha mune akati wandei makiyi semiconductor maitiro, kunyanya ayo anosanganisira kupisa kwakanyanya uye gasi rinoparadza. Zvishandiso zvayo zvekutanga zvinosanganisira:
● Silicon Carbide (SiC) Kukura kweCrystal: Iwo TaC-akavharwa mahwendefa akakosha kune Physical Vapor Transport (PVT) makristasi ekukura mavira. Iwo anoshandiswa semacrucibles, insulation boards, flow guides, uye mbeu dzekubatisa. Iyo yekupfekedza inodzivirira kusvibiswa kwekabhoni yeSiC crystal, inotungamira kune yepamusoro-mhando, isina hurema-isina makristasi ane yakagadziridzwa goho.
●Metal-Organic Chemical Vapor Deposition (MOCVD): MuMOCVD mareactor ekugadzira zvigadzirwa zvepamberi seGaN neGaAs, mahwendefa edu anoshanda seanobatisa uye anotakura wafer. Iyo TaC coating inopa yakasarudzika kuramba magasi anoshanda zvakanyanya senge hydrogen (H2) uye ammonia (NH3), kuwedzera chikamu chehupenyu uye kuchengetedza maitiro akachena.
● High-Temperature Annealing & Epitaxy: The material's thermal stability and chemical inertness inoita kuti ive yakanakira midziyo yemuchoto inoshandiswa muhigh-temperature annealing uye epitaxial growth process, kuve nechokwadi chekudziya kweyunifomu nekudzivirira kusvibiswa.
Kukwikwidza Kunobatsira
Zvinhu Zvinokosha Zvemuviri uye Zvakanakira
Iyo TaC-yakavharwa porous graphite plate inotsanangurwa neseti yezvivakwa zvepamusoro zvinoshandura zvakananga mukuita zvakakosha mabhenefiti emutsetse wako wekugadzira.
1. Kunyanya Kupisa uye Mechanical Kugadzikana
Imba: Inochengetedza kutendeseka kwechimiro kusvika ku2200 ° C (mumhepo isiri-oxidizing).
mukana: Uku kugadzikana kwemafuta kwakasarudzika kunobvumira kukurumidza kutenderera nguva uye kushandiswa mune yakanyanya kunyanyisa-tembiricha maitiro pasina kushatiswa kwezvinhu kana kuumbwa kwechimiro. Iyo TaC coating inowedzerawo zvakanyanya simba remakanika uye abrasion kuramba kweiyo porous graphite, ichiita kuti igare yakasimba uye isingaite chipping uye kupfeka.
2. Superior Chemical Inertness & Kuchena
Imba: Iyo TaC coating inoshingirira zvakanyanya kumhando dzakasiyana dzemagasi anoparadza, anosanganisira H2, HCl, uye NH3. Izvo zvinhu zvine chiyero chekupedzisira-chakaderera chetsvina, kazhinji <5ppm.
mukana: Izvi zvinopa gasi-rakasimba chipingamupinyi chinodzivirira kubuda kwetsvina kubva kune graphite substrate. Izvi zvinoderedza zvakanyanya kusvibiswa uye kudururwa kwechikamu, zvinova zvinokonzeresa kukanganisa uye goho rakaderera mukugadzira semiconductor.
3. Optimized Thermal Management
Imba: Izvo zvinhu zvine high thermal conductivity (120−160W/m⋅K yeporous graphite) uye chaiyo emissivity inosvika 0.3.
mukana: Iko kusanganiswa kwezvivakwa izvi kunovimbisa yakanakisa uye yakafanana kupisa kugovera padenga replate. Izvi zvakakosha kune maitiro akaita sekristaro kukura uye epitaxy, uko tembiricha gradient inofanirwa kudzikiswa kuti iwane yepamusoro-mhando, mayunifomu mafirimu uye makristasi.
Nemakumi emakore ehunyanzvi mune advanced ceramic coatings uye graphite mhinduro dze semiconductor application, Semixlab inopa zvigadzirwa zvakagadziridzwa kuita zvakanyanya, kunyatsoita, uye kusimba.Our TaC coated porous graphite plate ndiyo inosarudzika yevagadziri vesemiconductor vanotsvaga yakavimbika, yakakwirira-kuchena, uye inogara kwenguva refu mhinduro. Tinotambira mimwe kubvunza kwenyu.
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