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TaC yakavhara zvikamu zvehafu-mwedzi zveLPE
Tsva Yekukurumidza:
1. Mamwe mazita: TaC yakanamirwa graphite chikamu,CVD tantalum carbide coated susceptor yeSiC epitaxy.
2. Kushandisa: SiC epitaxy graphite spare part,SiC epitaxial kukura seMOCVD,LPE.
3. Zvimiro: Tantalum carbide (TaC) ine nzvimbo yekunyunguduka inosvika 3880°C. Inogona kushanda kwenguva yakareba pakupisa kwe2000 degrees Celsius.
tsananguro
Kuongororwa kwechigadzirwa
Tantalum carbide (TaC) yakavharwa halfmoon zvikamu chinhu chakakosha chakagadzirirwa silicon carbide (SiC) epitaxial midziyo, senge LPE midziyo, kuchengetedza mabatiro emakamuri uye kuvandudza kugadzikana kwemaitiro mukupisa kwakanyanya, nharaunda dzinoora. Kuenzaniswa neyakajairwa silicon carbide (SiC) machira, tantalum carbide coatings ave musimboti wekusimudzira mhinduro yechizvarwa chitsva che semiconductor epitaxial midziyo nekuda kwekunaka kwazvo kwekupisa kwekushisa, kusagadzikana kwemakemikari uye kugadzikana kwekupisa.
Magadzirirwo
| Zvenyama zvimiro zveTaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emssivity | 0.3 |
| Thermal kuwedzera kuwedzera | 6.3 10-6/K |
| Kuoma (HK) | 2000 HK |
| musimbwa | 1 × 10-5 Om*cm |
| Thermal kudzikama | <2500 ℃ |
| Graphite saizi inoshanduka | -10 ~ -20um |
| Bemhapemha ukobvu | ≥20um yakajairika kukosha (35um±10um) |
Applications
Mamiriro ekushandisa uye kukosha
Tantalum carbide yakavharwa hafu yemwedzi zvikamu zvinonyanya kushandiswa mune anotevera akakosha mamiriro:
SiC epitaxial kukura midziyo: muLPE (liquid phase epitaxial), CVD (chemical vapor deposition) uye mamwe maitiro, sechikamu chekudzivirira chekamuri yekuita, kuve nechokwadi chekufanana kwekushisa kwepamusoro uye kushandiswa kwekugadzirisa.
Chizvarwa chechitatu chekugadzira semiconductor: chakakodzera kugadzirwa kwehupamhi bhendi gap semiconductor epitaxial layers sesilicon carbide (SiC) uye gallium nitride (GaN), kuzadzisa zvinodiwa zvemhando yepamusoro epitaxial mapepa emotokari dzemagetsi, 5G kutaurirana, uye midziyo yemuchadenga.
Kuenzanisa neyekare silicon carbide coating
| Tantalum carbide (TaC) kupfeka | Traditional silicon carbide (SiC) coating |
| Kunyanya kushivirira tembiricha>2000°C | ~1600°C |
| Kwakanakisa kupisa kwemafuta | Yakaderera kemikari corrosion rate (inert nharaunda) yakakwira (nyore kuita neCl/H₂) |
| Kunyanya kushivirira tembiricha>2000°C | Hupenyu hwebasa hunowedzerwa ne2-3 nguva dzakajairwa |
Tekinoroji yekuziva uye process innovation
Iyo tantalum carbide coating inogadzirwa neyekutanga kemikari vapor deposition (CVD) kana yemuviri vapor deposition (PVD) maitiro, kuve nechokwadi cheyakaomeswa yakavhara isina hurema uye yunifomu uye inodzoreka ukobvu (kazhinji 50μm). Kune zvakakosha zvinodiwa zvesemiconductor michina, gradient doping tekinoroji inogona zvakare kushandiswa kukwenenzvera kunamatira pakati pejasi uye substrate, uye nekuwedzera kunatsiridza kupisa kuneta kuramba.
Kukwikwidza Kunobatsira
Zvakanakira zve tantalum carbide coating
Kugadzikana kwakanyanya pakupisa kwakanyanya:
Tantalum carbide (TaC) ine nzvimbo yekunyunguduka inosvika 3880°C (yakakwirira zvikuru kupfuura silicon carbide's 2700°C) uye inochengetedza hunhu hwakanaka patembiricha iri pamusoro pe1800°C. Hunhu uhwu hunoita kuti huve hwakanakisa mune ekupedzisira-yepamusoro tembiricha maitiro eSiC epitaxial kukura (senge MOCVD, LPE), kudzivirira kutadza kupfekedza nekuda kwekushushikana kwekupisa kana nhanho shanduko.
Yakanakisa makemikari inertness:
Mukuita kweSiC epitaxy, kazhinji kune magasi anoshanda ane silicon (Si), hydrogen (H₂) uye halogen (Cl) mukamuri yekupindura. Iyo corrosion resistance ye tantalum carbide coating kune magasi akadaro iri nani zvakanyanya kupfuura iyo yesilicon carbide, iyo inogona kunyatso kudzikisa maitiro epadivi pakati pekuvhara uye gasi rekuita, nekudaro kuderedza njodzi yekusvibiswa kwechikamu uye kuvandudza kunaka kweiyo epitaxial layer.
Yakaderera thermal yekuwedzera coefficient inoenderana:
Thermal yekuwedzera coefficient ye tantalum carbide (~ 6.3 × 10⁻⁶/K) iri pedyo neiyo ye graphite substrate (~ 4.2 × 10⁻⁶/K), iyo inogona kuderedza kushushikana kwechimiro kunokonzerwa nekupisa bhasikoro, kudzivirira kuputika kana kusvuura kwejasi, uye kuwedzera hupenyu hwebasa rechikamu.
Deredza mari yekugadzirisa uye kuwedzera chibereko:
Traditional SIC coatings zviri nyore kuita oxidize kana kuita nemagasi ekuita patembiricha yakakwira, inoda kugara ichidzika nguva yekugadzirisa. Kugara kweiyo tantalum carbide coating kunogona kuwedzera zvakanyanya kutenderera kwekugadzirisa, kuderedza kuderera kwemidziyo, uye kuderedza mutengo wakazara neinopfuura 30%.
