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High kuchena quartz diffusion Tube
Semixlab inotungamira quartz chikamu mugadziri muChina, inyanzvi mukugadzira uye kugadzirwa kweyakanyanya kuchena quartz diffusion machubhu e semiconductor oxidation, diffusion, uye annealing maitiro. Yakagadzirwa kubva ku-ultra-pure fused silica (≥99.99% SiO₂) uye yakanatswa kuburikidza nekunyatso kuumba uye kuomarara kusvibiswa kwekudzora, chubhu yega yega inovimbisa kudzikama kwekupisa uye ultra-yakaderera simbi kusachena mazinga. Ndichitarisira kumwe kubvunzana kwako.
tsananguro
Semixlab Yakakwira Kuchena Quartz Diffusion Tube yakanyatso kugadzirirwa yemhando yepamusoro-yekupisa maitiro mukugadzira semiconductor, kusanganisira oxidation, dopant diffusion, uye annealing.
Yakagadzirwa kubva ku-ultra-high kuchena fused silica (≥99.99% SiO₂), imwe neimwe chubhu yakagadzirirwa kuendesa yakasarudzika kemikari kugadzikana, kusvibiswa kushoma, uye chaiyo yekupisa kufananidzwa-kuve nechokwadi chisingachinjiki chewafer kugadzirisa zvinoguma mukudiwa kwenzvimbo dzakachena.
Ingave yakabatanidzwa mumavira akatwasuka kana akachinjika, machubhu equartz eSemixlab akaumbwa uye akaedzwa zvakakwana kuti asangane nezvinoda kuomesesa zveIC, LED, MEMS, uye kugadzirwa kwemagetsi emagetsi.
Applications
Zvikumbiro muSemiconductor Maitiro
1. Thermal Oxidation
Mumavira ekupisa oxidation, quartz diffusion machubhu anoita seyakanyanya kuita kamuri umo silicon wafers anooneswa O₂ kana H₂O mhute patembiricha yakakwirira (900-1150 ° C).
● Inopa yakachena uye yakagadzikana nzvimbo yeokisijeni yeyunifomu yeSiO₂ kukura.
● Inobvisa kusvibiswa kwesimbi ion, kuve nechokwadi chepamusoro dielectric kutendeseka kune gedhi uye isolation oxides.
Yakakwira kuchena quartz Diffusion Tube yakanakira kugadzira wafer
2. Dopant Diffusion
Quartz diffusion machubhu anoshandiswa kuparadzira maatomu edopant (senge phosphorus kana boron) musilicon substrate kugadzira maprofiles anodiwa.
● Yakanakisa makemikari inertness inodzivirira kusvibiswa panguva yePOCl₃ kana BBr₃ maitiro.
● Inochengetedza kuchena kwepamusoro kunyange muhalogen-based atmospheres.
3. Annealing uye Drive-In Maitiro
Mushure mekuisirwa ion kana kuiswa, mawafer anopindwa nepamusoro-tembiricha annealing kuti avhure dopants uye kugadzirisa kukuvara kwelatisi.
● Quartz tubes inopa yunifomu ye thermally, yakaderera-yakasvibiswa kamuri yemigumisiro yakagadzikana uye inobereka.
● Inokodzera zvese N₂ uye kugadzira gasi anealing nharaunda.
4. LPCVD uye R&D Thermal Processing
Mune madiki-scale LPCVD kana mavira ekutsvagisa, quartz diffusion machubhu anogona kushanda sese ari maviri maitiro uye emukati mekamuri.
● Yakanakira kuisa polysilicon, silicon nitride, uye oxide mafirimu.
● Inovimbisa yakaderera particle kuumbwa uye yakakwirira repeatability kumativi ose anomhanya.
Kukwikwidza Kunobatsira
Semixlab Advantages
1. Material Kuchena & Traceability
Yese chubhu yequartz inogadzirwa kubva kune yekupedzisira-yakachena fused silica yakacheneswa kubva kune vane certified vatengesi. ICP-MS yekuongorora mishumo inowanikwa pakukumbira, ichivimbisa kuteedzera kwebatch yega yega.
2. Precision Manufacturing & Customization
Semixlab inopa magadzirirwo akajairwa kuti asangane neaya chaiwo zviyero zvechoto, mafaera ekupisa, uye gasi kuyerera mapatani anodiwa nevatengi.
Sarudzo dzinosanganisira:
● Vertical or horizontal tube configurations
● Madhayamita akagadzirirwa, ukobvu hwemadziro, uye mapendero ekupedzisira
● Mapeji epamusoro akakwenenzverwa kana kuti etched
● Special kubata magadzirirwo kune akawanda-wafer vatakuri
3. Kuedza Kwakasimba & Kuvimbiswa Kwehutano
Yega yega diffusion chubhu inotariswa dimensional, yekumusoro kutendeseka kuyedzwa, uye yekupisa yekushushikana yekunyepedzera isati yatumirwa. Izvi zvinogonesa kuenderana neindasitiri-inotungamira diffusion choto masisitimu akadai TEL, Kokusai, Centrotherm, uye ASM.
