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Semiconductor quartz bath
Tsva Yekukurumidza:
1.Mamwe mazita: Semiconductor quartz tank, quartz bath ye semiconductor, quartz tank ye semiconductor.
2.Application: The Semiconductor Quartz Bath inzvimbo yakakwirira-yakachena, inodzivirira corrosion yakanyatsogadzirirwa kunyatsochenesa uye kushandiswa kwemakemikari mukugadzira semiconductor. Yakagadzirirwa kuenderana neWS-620C/ WS-820C/ WS-820L system, iyi yekugezera yequartz inoshanda pasi pemamiriro ekunze ekupisa (kusvika 175 ° C) uye yakagadziridzwa kuti ishandiswe ne phosphoric acid (H₃PO₄) mhinduro, kuve nechokwadi chekuita kwakasiyana-siyana mukupisa kwakakomba maitiro.
3. Core parameters:
Yakasanganiswa quartz (> 99.99% SiO₂).
Yakasarudzika kemikari inertness kune H₃PO₄ (phosphoric acid) pane yakakwirira tembiricha, kudzivirira kudzikira kana chidimbu chizvarwa.
Inoshingirira kuenderera mberi kwekushanda pa160 ° C uye tembiricha yepamusoro ye175 ° C, ichichengetedza kutendeseka kwechimiro uye kugadzikana kwedimensional.
tsananguro
Iyo Semiconductor Quartz Bath ndeye yakakwirira-kuchena, inodzivirira corrosion chikamu chakanyatsogadzirirwa kunyatso kuchenesa uye kugadzirisa kemikari mukugadzira semiconductor. Yakagadzirirwa kuenderana neWS-620C/ WS-820C/ WS-820L system, iyi yekugezera yequartz inoshanda pasi pemamiriro ekunze ekupisa (kusvika 175 ° C) uye yakagadziridzwa kuti ishandiswe ne phosphoric acid (H₃PO₄) mhinduro, kuve nechokwadi chekuita kwakasiyana-siyana mukupisa kwakakomba maitiro.
Key Features
Hunhu Hwepamusoro
Yakakwirira-Kuchena Quartz: Yakagadzirwa kubva ku synthetic fused quartz (> 99.99% SiO₂), kuve nechokwadi chekusvibiswa kushoma uye kuramba kuvhunduka kwekupisa.
Acid Resistance
Yakasarudzika kemikari inertness kune H₃PO₄ (phosphoric acid) pane yakakwirira tembiricha, kudzivirira kudzikira kana chidimbu chizvarwa.
Thermal Kugadzikana
Inoshingirira kuenderera mberi kwekushanda pa160 ° C uye tembiricha yepamusoro ye180 ° C, ichichengetedza kuvimbika kwechimiro uye kugadzikana kwedimensional.
Performance Benefits
Kusvibisa Kudzora: Ultra-yakatsetseka pamusoro pekupedzisira inoderedza chidimbu chekunamatira, yakakosha kune sub-micron semiconductor node maitiro.
Hupenyu hurefu: Kupokana kweQuartz kune acid corrosion uye kuneta kwekupisa kunowedzera hupenyu hwesevhisi, kuderedza nguva yekudzikira uye mari yekugadzirisa.
Process Consistency: Yakagadzika thermal conductivity inovimbisa yunifomu tembiricha kugovera, kuwedzera kuchenesa kuchenesa uye kudzokorora.
Sei uchisarudza Semixlab's Semiconductor Quartz Bath?
Semiconductor-Giredhi Hunhu: Yakagadzirwa munzvimbo yakachena yekamuri yekusangana neSEMI zviyero.
Tailored Solutions: Tsika madhizaini anowanikwa kuti aenderane chaiwo maitiro ezvinodiwa.
Kuvimbika: Kuomarara kwemhando yekuyedza kunovimbisa kutevedzera semiconductor indasitiri inoda.
Magadzirirwo
| Mechanical property | Density (g/cm3) | 2.2 |
| Mohs kuomarara | 6-7 | |
| Compressive simba (MPa) | 1100 | |
| Kusimba kwesimba (N/mm2) | 50 | |
| Flexural simba (N/mm2) | 65 | |
| Torsional simba (N/mm2) | 30 | |
| Young's modulus (MPa) | 7.2x104 | |
| Chiyero chaPoisson | 0.16 | |
| Anopisa zvivakwa | Coefficient yekuwedzera kwekupisa (20~320℃,k-1) | 5.5x10-7 |
| Thermal conductivity (20 ℃,W·m-1k-1) | 1.4 | |
| Kupisa chaiko (20 ℃, J·kg-1k-1) | 670 | |
| Kupfava nzvimbo (℃) | 1700 | |
| Nzvimbo yekupinda (℃) | 1180 | |
| Strain point (℃) | 1080 | |
| Zvinhu zvemagetsi | Kuramba kwemagetsi (Ω·m) | 1x1016(20 ℃) |
| Dielectric nguva dzose (10GHz) | 3.74 | |
| Dielectric kurasikirwa (10GHz) | 0.0002 | |
| Dielectric simba (V · m-1) | 3.7x107 |
Applications
Wafer Kuchenesa: Kubviswa kwe photoresist, zvisaririra, uye zvinosvibisa muH₃PO₄-based solutions post-etching kana lithography.
High-Temperature Matanho: Inokodzera advanced semiconductor ekugadzira matanho anoda hukasha chemistries pane yakakwirira tembiricha.
Kugarisana: Yakanakira WS-620C/ WS-820C/ WS-820L sisitimu mumachira anoburitsa pfungwa, ndangariro, kana masimba emagetsi.
