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0200-10243 Mhete yemumvuri 150mm
Iyo AMAT 0200-10243 Shadow Ring 150mm yakagadzirirwa masisitimu e semiconductor etch uye deposition. Yakaiswa pamucheto wewafer, inoita basa rakakosha mukudzora kupararira kweplasma, kunatsiridza kufanana kwemucheto, uye kuderedza kusvibiswa. Yakagadzirwa kubva kuquartz yakasanganiswa yakachena kwazvo, iyi shadow ring inoderedza zvinobudirira zvikanganiso zvemucheto, inowedzera kusimba kwefirimu, uye inotsigira mhedzisiro yemaitiro inodzokororwa. KuSemixlab Technology, mhinduro dzedu dzemumvuri dzakagadziriswa kuti dzive dzakarurama, kuchena kwezvinhu, uye hupenyu hurefu hwebasa - zvichibatsira vagadziri ve semiconductor kuvandudza goho, kuderedza frequency yekuchengetedza, uye kuchengetedza kugadzikana kwemaitiro. Tinotarisira kubvunza kwako.
tsananguro
1. Chigadzirwa Pfupiso
Iyo AMAT 0200-10243 Shadow Ring 150mm chinhu chinodyiwa nequartz chakanyatsogadzirwa kuti chishandiswe mu 150mm semiconductor processing systems, kunyanya mu etching ne CVD chambers.
Yakagadzirwa nequartz yakasanganiswa yakachena kwazvo, mhete iyi yemumvuri yakagadzirwa kuti igare munzvimbo dzakaoma dzeplasma uku ichichengetedza kugadzikana kwehukuru uye huwandu hwakaderera hwekusvibiswa. Yakagadzirirwa zvakananga kuti ikwane mapuratifomu eApplied Materials, ichivimbisa kuti inoenderana uye kubatanidzwa kwemaitiro kwakavimbika.
KuSemixlab Technology, tinopa mhete dzemumvuri dzinotsiva dzemhando yepamusoro dzine hutongi hwakasimba pamusoro pekuchena kwezvinhu, kururama kwekugadzira, uye kupedzisa pamusoro kuti zvizadzise zvinodiwa zvakanyanya zvekugadzirwa kwema semiconductor epamusoro.
2. Chinzvimbo muMidziyo & Basa reKushanda
Mhete yemumvuri yakaiswa yakatenderedza muganhu wekunze wewafer mukati mekamuri rekugadzirisa, ichigadzira chinongedzo chakakosha pakati pemucheto wewafer nenzvimbo yeplasma yakapoteredza.
Kuiswa kwakajairika:
● Kukomberedza wafer pa electrostatic chuck (ESC) kana susceptor
● Iri munzvimbo ine plasma
● Yakaiswa pakati pemucheto wewafer nemadziro ekamuri
Basa rekushanda muhurongwa:
● Inoshanda sechikamu chemuviri uye chemuganho wemaitiro
● Inokanganisa kupararira kweplasma uye maitiro emagetsi emumucheto
● Inoshanda sechikamu chekudzivirira kubva pakusangana zvakananga neplasma
Mumichina yepamusoro ye semiconductor, kunyangwe shanduko diki mumamiriro ekunze dzinogona kukanganisa zvakanyanya mashandiro ehurongwa hwese, zvichiita kuti mumvuri weringi uve chinhu chakakosha mukugadzirwa kwekudzora mashandiro.
3. Mabasa Ekutanga & Mhedzisiro Yemaitiro
Mhete yemumvuri yeAMAT 0200-10243 inoita basa rakakosha mukuona kuti maitiro acho akafanana, kugadzikana kwemugumisiro, uye kudzora kusvibiswa.
Edge Protection
● Inodzivirira mipendero yewafer kubva pakuputirwa zvakananga neplasma
● Inoderedza kukuvara kwemucheto, kuchekwa, uye mapurofayiri asina kujairika e etch
Kugadzirisa Kupararira kwePlasma
● Inogadzirisa huwandu hweplasma yemunzvimbo iri pedyo nemucheto wewafer
● Inodzivirira kuchekwa kwemucheto zvakanyanya kana kuiswa zvakanyanya
Kuvandudza Kufanana
● Inovandudza mwero we etch uye kusimba kwefirimu mukati me wafer
● Inoderedza nzvimbo dzisingabatanidzwi pamucheto
Contamination Control
● Inotora zvinhu zvinobva mumaitiro uye zvidimbu
● Inoderedza njodzi yekusvibiswa kusvika panzvimbo dzewafer dzinoshanda
Process Kugadzikana
● Inochengetedza mamiriro ezvinhu anodzokororwa mumatanho akasiyana-siyana
● Inotsigira kudzora kwakasimba pamusoro peCD (critical dimension) uye firimu
4. Maitiro Akajairika Ekukundikana & Kufunga Nezvekutsiva
Nekuda kwekugara uchisangana neplasma, tembiricha yakakwira, uye magasi anochinja-chinja, mhete dzemumvuri dzinogona kuora zvishoma nezvishoma. Kunzwisisa nzira dzekukundikana kwakakosha kuti maitiro arambe akasimba.
Maitiro Akajairika Ekukundikana:
① Kukukurwa kwePlasma
Kurasikirwa kwezvinhu pamusoro kunokonzerwa nekuputika kwemaion
Zvinotungamira kukuchinja kwehukuru uye kuchinja maitiro eplasma
② Kuora kwemakemikari
Kuita nemagasi ane hukasha (semuenzaniso, makemikari akavakirwa pafluorine)
Zvinoguma nekuoma kwenzvimbo uye kushaya simba kwechimiro
③ Kugadzirwa kwezvikamu
Kutsemuka kudiki kana kuputsika kwepamusoro kunogona kuburitsa zvidimbu
Inowedzera njodzi yekusvibiswa uye inoderedza goho
④ Kuunganidzwa kwenzvimbo
Kuunganidzwa kwezvigadzirwa zve process by-products (semuenzaniso, polymer residues)
Inochinja mamiriro enzvimbo uye kugoverwa kweplasma
⑤ Kushushikana Kwekupisa & Kutsemuka
Kugara uchidziya nguva nenguva kunogona kukonzera kutsemuka kweganda
Inokanganisa kuvimbika kwemakanika nekufamba kwenguva
Mhedzisiro Yekukundikana:
● Kuwedzera kwetsvina yezvikamu
● Kusiyana kweCD yeEdge uye kusafanana
● Kugohorera kwewafer kwakaderera
● Kufamba-famba kwemaitiro uye kudzokororwa kushoma
● Kuwedzera kwehuwandu hwekugadzirisa kamuri
Kukwikwidza Kunobatsira
KuSemixlab Technology, tinosangana nematambudziko aya kuburikidza ne:
● Kusarudzwa kwezvinhu zve quartz zvine hutsanana hwakanyanya kuti zvisasvibise zvakanyanya
● Kugadzira nemazvo kuti pave nekushivirira kwakasimba
● Kurapwa kwepamusoro kwakagadziriswa kuti kuwedzere kuramba kweplasma
● Mhinduro dzepamusoro dzekudzivirira (semuenzaniso, SiC coating) dzehupenyu hwese uye kuderedzwa kwekugadzirwa kwezvikamu
Uri kutsvaga imwe nzira yakavimbika kana kusimudzira mashandiro?
Semixlab Technology inopa mhinduro dzemumvuri dzakagadzirwa neunyanzvi uye sarudzo dzepamusoro dzekuputira dzakagadzirirwa zvaunoda. Bata nesu nhasi kuti uvandudze mashandiro e semiconductor process yako.
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