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Semiconductor Fused Quartz Boat
Iyo Semiconductor Fused Quartz Boat ndeye chaiyo-injiniya inotakura inoshandiswa kubata uye kutsigira silicon wafers panguva yekuparadzira, oxidation, LPCVD, uye annealing maitiro. Yakagadzirwa neSemixlab, ichi chikepe chequartz chinogadzirwa kubva kune yakakwira-kuchena fused silica. Chikepe chega chega chakagadzirwa zvine hungwaru uye kukwenenzverwa kuti chiwane yakaderera pamusoro roughness uye dimensional kurongeka, kuderedza kugadzirwa kwechikamu uye njodzi yekusvibiswa panguva yekugadziriswa kwewafer. Semixlab's fused quartz mabhoti akagadzirirwa ese ari maviri akatwasuka uye akatwasuka echoto masisitimu, achipa yakagadzika wafer kurodha uye yunifomu yekupisa kugovera pane yese batch.
Applications
Zvishandiso muSemiconductor Wafer Processing
Mabhoti e quartz akafukidzwa anoita basa rakakosha mukugadzirisa semiconductor wafer, kushanda sematakura chaiwo anotsigira mawafer panguva yekupisa kwekushisa kwakanyanya senge oxidation, diffusion, LPCVD, uye annealing. Kuchena kwavo kwakasarudzika, kusagadzikana kwemakemikari, uye kugadzikana kwekupisa kunoita kuti zvikoshese kuchengetedza maitiro akafanana uye kuderedza njodzi dzekusvibiswa mumitsetse yekugadzira semiconductor.
1. Oxidation uye Diffusion Maitiro
Mumafuta ekupisa oxidation uye diffusion mabhoti equartz anoshandiswa kubata zvakachengeteka masilicon wafers mune yakatwasuka kana yakachinjika stack gadziriro. Aya mabhoti anofanirwa kutsungirira kudzokororwa kuratidzwa kune tembiricha inodarika 1000 ° C uku achichengetedza kugadzikana kwedimensional uye kutendeka kwemuchina.
Semixlab's fused quartz mabhoti anoratidza kupikisa kwakasimba kuvhunduka kwekupisa uye deformation, kuve nechokwadi chakafanana chewafer spacing uye yakagadziridzwa gasi kuyerera kuyerera mukati mechoto chubhu. Izvi zvinotungamira kune yunifomu oxide layer kukura uye chaiyo dopant diffusion.
2. LPCVD (Low Pressure Chemical Vapor Deposition)
Munguva yeLPCVD maitiro, mabhoti equartz akasanganiswa anoshandiswa sezvimiro zvekutakura uye kutsigira mawafer mukati memakamuri ekutsvaira. Iyo yakanyanya kuderera coefficient yekuwedzera kwekupisa (CTE) yeSemixlab's high-purity fused quartz inobatsira kudzivirira kuteurwa kwechikamu uye kushushikana kwemagetsi, izvo zvinogona kutungamira mukuputsika kwewafer kana kukanganisa kwemafirimu.
Pamusoro pezvo, iyo yakatsetseka uye yakakwenenzverwa yemukati mabhoti eSemixlab equartz inoderedza kusvibiswa nekudzivirira kuunganidzwa kusingadiwe, nekudaro kuchengetedza yakachena kamuri mamiriro epamusoro-goho rakatetepa firimu deposition.
3. Annealing uye Thermal Kudzikamisa
Mumashure ekudyara annealing uye kutora matanho, mabhoti equartz anofanirwa kushivirira nekukurumidza kuchinja kwekushisa uku achichengetedza chaiyo wafer kurongeka. Semixlab's advanced quartz yekugadzira tekinoroji inova nechokwadi chekuti chikepe chega chega chinochengetedza kushivirira kwakasimba (<0.1 mm), kudzivirira kutsvedza kwewafesi uye kuvimbisa kuenderana kwekushisa kwakafanana mubatch.
Kukwikwidza Kunobatsira
Semixlab Technical Advantages
● High mechanical simba uye kupisa kugadzikana
●Kuramba kwakanaka kuHF,HCl, uye oxidizing atmospheres
●Ultra-clean surface inoderedza kusvibiswa uye micro-particle kusunungurwa
●Optimized dhizaini inovimbisa kunyangwe wafer spacing uye tembiricha kutonga
● Hupenyu hwesevhisi hwakawedzerwa pasi pemabhasikoro anodzokororwa
Semixlab's fused quartz mabhoti anovimbwa nemasemiconductor machira pasi rese nekuda kwekuita kwavo kwakanyanya kupisa, kuchena, uye kusimba, kuve nechokwadi chekushanda kwakagadzikana uye goho repamusoro-soro mukupisa kwakanyanya. Tinotarisira nemoyo wese kuenderera mberi nekubatana newe.
FAQ
Matambudziko Anowanikwa uye Mhinduro
Q1: Semixlab inoita sei kuti irambe yakasimba uye kugadzikana kwemabhoti ayo akasanganiswa equartz?
A1: Semixlab inoshandisa ultra-high kuchena yakasanganiswa silica ine zvishoma OH zvemukati uye yakanyatsodzorwa microstructure. Chikepe chega chega chequartz chinopinda machining epamberi eCNC uye kudziya kwepamusoro-kupisa kuti abvise kushushikana kwemukati, kuve nechokwadi chekugara kwenguva refu kugadzikana kunyangwe pasi pekupisa kwakanyanya.
Q2: Ko Semixlab inogona kugadzirisa mabhoti equartz kune akasiyana masizi ewafer kana magadzirirwo emagetsi?
A2: Ndizvozvo. Semixlab inopa akazara ekugadzirisa masevhisi, anosanganisira magadzirirwo e6-inch, 8-inch, uye 12-inch wafer processing system. Isu tinokwanisa kugadzirisa iyo slot geometry, ukobvu hwemadziro, uye kupisa kwekuwedzera kushivirira zvichibva pane yakatarwa diffusion kana LPCVD reactor zvinodiwa.
Q3: Semixlab inotsigira sei vatengi mukugadzirisa nyaya dzekuenderana?
A3: Chikwata chedu cheinjiniya chinopa pre-kutengesa tekinoroji kubvunzana uye yekupisa simulation ongororo yekuona zvingangoitika zvakaita sezvisina kuenderana ekuwedzera coefficients kana kusaenzana kudziyisa nzvimbo. Isu tinoshanda pamwe chete nemainjiniya ekugadzira dhizaini yakagadziridzwa yequartz bhoti inosimudzira goho rewafer uye maitiro ekudzokorora.
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