Vhuku rinopisa rinopisa reSiC crystal seed bonding

Kubatanidza kristalo yembeu ndeimwe yenzira dzakakosha dzinokanganisa kukura kwekristaro. Zvichienderana nehunhu hwekubatanidza kristalo yembeu, Semixlab yakagadzira michina yakasarudzika ye vacuum hot-press yekubatanidza kristalo yembeu. Midziyo iyi inoderedza zvikanganiso zvakasiyana-siyana zvinobuda panguva yekubatanidza, nokudaro ichivandudza goho rekubatanidza kristalo yembeu uye mhando yekupedzisira yemakristaro.

Ⅰ. Nhanganyaya yeMbeu yeCrystal Bonding Vacuum Hot Press Equipment

1. Inoshandiswa pakusunga kristalo yembeu isati yakura SiC crystal;

2. Mbeu dzakasungirirwa dzinoramba dzakanamira pa2300°C pasina kupatsanurwa, zvichiita kuti dzibatane 100% dzisina maburi, dzakati sandara uye nzvimbo dzakachena dzewafer dzisina kusviba;

3. Tireyi yekupisa inoshandisa kudziyisa kwemhando yedhisiki, ichivimbisa kupararira kwetembiricha kwakafanana, kushanda kwakachengeteka, uye kubata kuri nyore kushandisa;

4. Masensa ekumanikidza akaiswa pasi petireyi anoratidza chaizvo kumanikidzwa kwakaitwa pabasa.

II. Ongororo yeMashandiro eSeed Crystal Vacuum Hot Press Equipment

Semixlab Seed Crystal Vacuum Hot Press Furnace yakagadzirirwa kudzvanywa kwesilicon carbide seed crystals ne vacuum-assisted hot pressing.

1. Kamuri resimbi rakatonhodzwa nemvura rakaiswa mativi maviri rinoderedza kupisa pamusoro pechoto zvinobudirira, rinoderedza njodzi dzekupisa kwakanyanya, uye rinoderedza kukanganisa kwezvakatipoteredza;

2. Inokwanisa kushandisa otomatiki kudzvanya uye kubata, kurodha zvishoma nezvishoma, uye kutama ne automated control;

3. Magadzirirwo akasiyana-siyana evacuum system anobvumira kusarudzwa kwemazinga akasiyana evacuum zvichienderana nezvinodiwa nemaitiro;

4. Kugoverwa kwekumanikidzwa kwakafanana uye kunyatsogadzirisa tembiricha yepamusoro;

5. Kushandiswa kwepressure kunoshandisa nzira dzakanyatsojeka dzekuti pressure isvike zvakanaka uye yakagadzikana, zvichiita kuti ishande zvakanaka uye ienderane nemamiriro ekunze;

6. Kubatana kwese pakati pemusoro wepamusoro wekudzvanya netsvimbo yekupinza kunovimbisa kufanana kwekuchinja pakati pemusoro wepamusoro netireyi yepasi panguva yekudzvanya, zvichiita kuti kupararira kwepressure kuenderane;

7. Musoro wepamusoro wekudhinda unosanganisira kushandiswa kwekumanikidza kwecushioning kuti utumirwe zvakanaka, zvine simba pasina kukuvara, zvichidzivirira kutyoka kweworkpiece;

8. Masensa ekupisa akabatanidzwa muchikamu cheplate yekupisa ine chinodzora tembiricha, zvichiita kuti tembiricha yekupisa ive chaiyo uye idzore purogiramu yacho;

9. Zvese zviri zviviri pallet nemusoro wepamusoro zvinoshandisa zvishandiso zvekudzivirira kupisa kuti zvideredze kurasikirwa nekupisa.

Ⅲ. Semixlab Seed Crystal Vacuum Hot Pressing Equipment Mashandiro uye Magadzirirwo

1. Kubvisa vacuum zvishoma nezvishoma nedanho rekupomba rinodzorwa;

2. Kamuri hombe yekukwanisa kusimudzira zvinhu zvakawanda;

3. Musoro wekudhinda wakagadzikana une mashandiro ega;

4. Kudzora kudzvanywa nekurerutsa kudzvanywa nekutsvedza kwemhepo otomatiki uye mutemo wekubika;

5. Kudzora tembiricha nemazvo netembiricha inorongwa uye kumanikidzwa;

6. Zviyero zve vacuum, kumanikidzwa, uye tembiricha zvinogadziriswa kuti zvikwanise kushandiswa zvakasiyana-siyana pakusunga;

7. Kubatana kwakasimba kusina mabubbles;

8. Mwero wekutyoka wakaderera zvikuru—hapana kutyoka kunokonzerwa nemudziyo;

9. Kuenderana: Inotsigira mawafer ane 6-12 inch;

10. Kudzvanywa kwakanyanya pasi: 1.6 T;

11. Muchina wekubvisa mvura wakanyanya: 5 Pa (inotonhora);

12. Kufanana kwekupisa kwepuratifomu: <±3℃, σ<4 (pa200℃);

13. Kuchinja-chinja kwedzvinyiriro: <0.5%.

Zviyero zvechoto chinodzvanya chinopisa chekubatanidza mbeu