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High kuchena sintered sic furnace machubhu
Semugadziri anotungamira uye mutengesi wePamusoro Purity Sintered SiC Furnace Tubes muChina, Semixlab's Sintered SiC Furnace Tubes akagadzirirwa epamberi semiconductor maitiro, anosanganisira epitaxial kukura, thermal oxidation, uye diffusion doping. Inowanikwa muhukuru hwetsika uye kuchena mazinga, Semixlab machubhu anoongororwa kwakasimba uye anopisa bhasikoro bvunzo, ichipa yakavimbika mashandiro epamusoro-vhoriyamu semiconductor kugadzirwa.
tsananguro
Yakakwira kuchena sintered silicon carbide (SiC) choto machubhu zvinhu zvakakosha mukugadzirwa kwepamusoro semiconductor. Anozivikanwa nekudzikama kwekupisa kwekupisa, kusagadzikana kwemakemikari, uye kuderera kwehutsvina, machubhu aya anopa nharaunda-isina kusvibiswa kwepamusoro-tembiricha maitiro senge epitaxial kukura, thermal oxidation, uye diffusion doping.Nekuderedza kugadzirwa kwechikamu uye kusvibiswa kwesimbi ion, sintered SiC choto chemoto, machubhu ekugadzirwa kwechigadzirwa anosimbisa goho repamusoro uye kuvimbika kwechigadzirwa.
Magadzirirwo
| Zvenyama zvimiro zveSintered Silicon Carbide | |
| pfuma | Kukosha kwechimiro |
| Chimiro Chimiro | SiC>95%, Si<5% |
| Kuwanda kwehuwandu | >3.07 g/cm³ |
| Inooneka porosityInooneka porosity | |
| Modulus yekuputika pa20 ℃ | 270 MPa |
| Modulus yekuputika pa1200 ℃ | 290 MPa |
| Kuoma pa20 ℃ | 2400 Kg/mm² |
| Kuputsika kusimba pa20% | 3.3 MPa · m1/2 |
| Thermal Conductivity pa1200 ℃ | 45 w/m · K |
| Thermal kuwedzera pa20-1200 ℃ | 4.51 × 10-6/℃ |
| Max.kushanda tembiricha | 1400 ° C |
| Thermal shock resistance pa1200 ℃ | Kugona |
Applications
Zvikumbiro muSemiconductor Maitiro
1. Epitaxial Kukura
Basa: Sintered SiC furnace tubes inopa yakagadzikana inopisa-zone nharaunda yesilicon epitaxy uye yakasarudzwa SiC epitaxy maitiro.
Zvinetso muEpitaxy:
● Tembiricha isiri-uniformity inotungamira kune isina kuenzana layer ukobvu.
●Particle kusvibiswa kunowedzera defect density mumafirimu epitaxial.
●Kuora kubva kune chlorinated kana halogenated process magasi.
Mhinduro neSemixlab SiC Tubes:
● High thermal conductivity inovimbisa kugovera kupisa kwakafanana.
● Dense sintered chimiro chinoderedza kusunungurwa kwechidimbu.
●Kudzivirirwa kwakanaka kwecorrosion kunowedzera hupenyu hwesevhisi pasi pemakemikari ane hukasha.
2. Thermal Oxidation Process
Basa: Muvira reoxidation, machubhu eSiC akaiswa sintered anoita sekamuri rekuita umo mawafa esilicon anoiswa muokisijeni kana chiutsi kuti aumbe mayunifomu eSiO2 akaturikidzana.
Zvinetso muOxidation:
● Machubhu equartz anogona kukanganisa kana kuunza tsvina yesimbi mukufamba kwenguva.
●Uneven thermal gradients inokanganisa oxide ukobvu kufanana.
● Unyoro hwepamusoro-soro hunogona kukurumidza kuparara kwezvinhu.
Mhinduro neSemixlab SiC Tubes:
● Superior thermal shock resistance inodzivirira kutsemuka kwechubhu panguva yekupisa nekutonhodzwa.
●Kuchena kwepamusoro SiC kuumbwa kunoderedza kusvibiswa uye kunochengetedza oxide yehutano.
● Upenyu hurefu hwebasa hunoderedza kuderera uye kutsiva mutengo.
3. Diffusion Doping
Basa: Sintered SiC machubhu anoshanda semakamuri echoto ekuparadzira ekuunza madopants (B, P, As) mumachira esilicon.
Matambudziko Mukupararira:
● Kudyidzana pakati pemagasi edopant (POCls, BBr3, PHs) uye madziro echubhu zvichikonzera kusvibiswa.
● Particle kuunganidza inotungamirira kujunction leakage uye kurasikirwa kwegoho.
● Kugadziriswa kwemaitiro panguva yekushandiswa kwepamusoro-tembiricha.
Mhinduro neSemixlab SiC Tubes:
● Kemikari inert pamusoro inoramba kuita nemagasi edopant.
● Dense microstructure inoderedza kugadzirwa kwezvinhu.
● Kushanda kwakadzikama pasi pe800-1,200°C kugadziridza kunovimbisa kuenderana kwema profiles.
Kukwikwidza Kunobatsira
PaSemixlab, isu tinopa yakakwana mhinduro yakavakirwa pamatanho matatu epakati mbiru:
●Kugadzirisa uye Precision Injiniya: Isu tinonzwisisa kuti maitiro ese akasiyana. Chikwata chedu cheinjiniya chinoshanda chakananga newe kugadzira nekugadzira tsika SiC choto machubhu anonyatso enderana nemaitiro ako ekuita uye zvirevo zvemidziyo. Isu tinokwanisa kukwirisa zvimiro, ukobvu hwemadziro, uye kupera kwepasi kuti tiwedzere kuita uye kuwedzera hupenyu hwechubhu.
● Nyanzvi yeTechnical Consulting: Chikwata chedu cheyakaomeswa semiconductor zvinhu masayendisiti aripo kuti ape yakadzama yehunyanzvi rutsigiro. Kunyangwe iwe uri kugadzirisa nyaya yegoho kana kugadzira nzira itsva yekupisa kwepamusoro, tinogona kupa zano rehunyanzvi rekubatanidza maSiC edu kuti awane mhedzisiro.
●Rigorous Pre-Shipment Quality Assurance: Isu tinosimbisa huroyi hwese chubhu kurongeka, kupera kwepasi, uye kuchena tichishandisa advanced metrology uye elemental ongororo maitiro. Iyi yakaomesesa QA maitiro anovimbisa kuti yega Semixlab chigadzirwa chaunogamuchira chakagadzirira yakakwirira-vhoriyamu kugadzira kunze kwebhokisi.
Kukwidziridza yako semiconductor maitiro neSemixlab's high kuchena sintered SiC choto machubhu-akagadzirwa kuti abudise kugadzikana kwekupisa, kusagadzikana kwemakemikari, uye kusvibiswa-kusina kuita kwe epitaxy, oxidation, uye diffusion application. Kunyangwe iwe uchida zviyero zvakajairwa, yakakwirira-kuchena zvakatemwa, kana nyanzvi yekuita kubvunza, Semixlab inova nechokwadi chekuti wafers ako anowana goho rakakwana uye kuvimbika kwechishandiso. Bata yedu tekinoroji timu kuti isangane neyako semiconductor yekugadzira zvinodiwa.
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