Mhete dzeSiC dzekuvhara

KuSemixlab, SSiC Sealing Rings yedu inomiririra dombo guru retekinoroji yekusimbisa mashandiro epamusoro yakagadzirwa zvinoenderana nezvinodiwa zvakanyanya zvekugadzirwa kwema semiconductor emazuva ano. Zvakagadzirwa kubva kusilicon carbide yakakora uye yakachena, zvikamu izvi zvekusimbisa zvinopa kugadzikana kwemakemikari, kutsungirira kwekupisa, uye simba remuchina munzvimbo dzinonyanya kuomera vacuum, tembiricha yepamusoro, uye gasi rinoparadza. Tine ruzivo rwakakura mukugadzira wafer, tinogadzira mhinduro dzekusimbisa dzeSSiC dzinowedzera kugadzikana kwemaitiro, dzinowedzera hupenyu hwemidziyo, uye dzinodzivirira kugona kwemidziyo muma semiconductor nodes epamusoro.

Mukati memaitiro e epitaxy (Epi), uko ma wafers anoonekwa mumhepo ine hydrogen yakawanda, makemikari ane chlorine akasimba, uye tembiricha dzinopfuura 1200°C, SSiC Sealing Rings inoita basa rakakosha mukuchengetedza kuparadzaniswa kwemhepo pakati penzvimbo ye reactive chamber uye ma mechanical assembly akakomberedza. Ma porosity avo akaderera zvakanyanya uye kusawirirana ne corrosion kunovimbisa kusimba kwegasi kwenguva refu mukati me reactor, kudzivirira kubuda kwemvura, kusvibiswa, uye zvipembenene zvinogona kukanganisa kufanana kwefirimu kana dopant. Muma rotating susceptor systems, kusakara kwepamusoro uye kugadzikana kweSSiC kunogonesa kushanda zvakanaka, kusina particles kuburikidza ne thermal cycling inoramba ichienderera mberi, ichitsigira kugadzirwa kwe Si, SiGe, SiC, uye GaN epitaxial layers dzemhando yepamusoro.

Mumapuratifomu eALD, CVD, PECVD, uye LPCVD, SSiC Sealing Rings dzinoshanda semaseal ekutanga emakamuri, ma solation rings, uye zvikamu zve plasma-exposed structure zvinofanira kutsungirira halogen-based precursors, plasma erosion, uye repeated pump-down cycles. Kugona kwavo kuramba vasina makemikari kana paine TEOS, TMA, chlorosilanes, fluorine species, uye deposition by-products kunoita kuti ive imwe nzira inosarudzwa pane coated metals kana polymer composite seals. Dense crystalline structure yeSemixlab's SSiC inobvisa outgassing uye particle generation, ichitsigira repeating yakakwira uye low-defect environments inodiwa kuti advanced thin-film deposition ienderere mberi. Nekuchengetedza seal chaiyo uye mechanical integrity, ma rings aya anodzikamisa chamber pressure, tembiricha distribution, uye precursor flow profiles - zvinhu zvakakosha kuti dielectric, barrier, uye epitaxial film performance ienderane.

Munzvimbo dzinopisa, dzinopisa zvakanyanya, uye dzinokurumidza kushandiswa kwekupisa, SSiC Sealing Rings dzinopa seal yakavimbika pakati penzvimbo dzinopisa uye nzvimbo dzinosangana nemagetsi dzemaotomu efurnace. Kuwanda kwavo kwekupisa kwakaderera zvakanyanya, pamwe chete nekusimba kwakanyanya kwekupwanyika uye kuramba kwakanyanya kweoxidation, zvinovabvumira kuchengetedza gasi rakasimba uye kugadzikana kwemuchina kunyangwe pamusoro pe1400°C. Izvi zvinovimbisa kushanda kwakafanana kwedopant, mamiriro efurnace akagadzikana, uye kugadzikana kwewafer-to-wafer, zvichideredza kusvibiswa uye kuderedza kudonha mumatanho ekushanda. Kune machubhu efurnace nemakamuri eRTP/RTA zvakafanana, kusimba kweSSiC pasi pematanho ekupisa anokurumidza kunovimbisa hupenyu hurefu hwekushanda, kukanganiswa kushoma kwekuchengetedza, uye kuchena kwemaitiro akachengetedzwa.

Kuburikidza nekuongorora kwezvimiro zve micro-resolution yepamusoro, kuongorora plasma-etch resistance, kudzorwa kwezvikamu zvakarurama, uye kuongorora kusvibiswa, sealing ring yega yega inosimbiswa zvichienderana nemitemo yakasimba yepasi rose yeindasitiri. Zvikamu zvinobuda zvinoratidza kusvibiswa kwakaderera kweionic, kupindira kwe zero, uye kugadzikana kwenguva refu, zvichibvumira vagadziri vemachira nemidziyo kuwana nguva yakakwira yekushanda, PM cycles yakawedzerwa, uye kufanana kwepamusoro kwemaitiro mumitsetse yekugadzira. Semixlab inogara iri shamwari yako yenguva refu yaunovimba nayo mumunda we semiconductor sintered silicon carbide (SSiC).