Sei CVD SiC Coated Graphite Susceptor Ichinyanya Kusarudzwa Pane CVD TaC Coating Mune Zvimwe Zvikamu zveEpitaxial?

Zvese zviri zviviri CVD SiC coated graphite susceptors uye CVD TaC coatings zvine kukosha kukuru mukukura kwema semiconductors epitaxial; zvisinei, zvakakosha kunzwisisa kuti dzimwe nguva zvinhu zviviri izvi hazvigone kushandiswa zvakasiyana, sezvo sarudzo yakakodzera inosiyana zvichienderana nezvinhu zvakaita sekupisa kwekugadzirisa, rudzi rwe substrate, mari yekugadzira, uye hupenyu hwese hunotarisirwa. Mune zvimwe zviitiko zve epitaxial processes, Cvd ndizvo Graphite yakaputirwa chinhu chakakodzera kupfuura dzimwe sarudzo, tichifunga nezvezvinhu zvakaita sekushanda kwekupisa uye hupenyu hwema susceptors. Zvakakosha kuti vagadziri vemidziyo ye semiconductor vanzwisise zvikonzero zviri kukonzera kufarirwa kwakanyanya kwema susceptors eSiC, sezvo zvichizobatsira kusarudza michina zviri nyore.

Nei Mapuratifomu eAIXTRON neVeeco Achivimba neAdvanced Susceptor Technologies

Masisitimu emazuva ano epitaxial akagadzirwa kugadzira mawafer emhando yepamusoro ane maitiro akasimba ekudzora mashandiro. Makambani akadai seAIXTRON neVeeco anovaka michina inoshanda pakupisa kwakanyanya uku ichichengetedza tembiricha yakafanana pawafer yega yega. Kuti izvi zviitike, susceptor inova chimwe chezvinhu zvakakosha mukati me reactor.

Chishandiso chinobvisa jira chinobata wafer chete. Chinotora kupisa kubva mureactor, chinoendesa kupisa kwacho zvakaenzana ku wafer, uye chinoramba chakasimba kuburikidza nezviuru zvenguva dzekupisa nekutonhodza. Kunyangwe shanduko diki mukupisa inogona kukanganisa ukobvu, kunaka kwekristaro, kana mashandiro emagetsi e epitaxial layer. Ndosaka tekinoroji yepamusoro yekuputira ichikosha zvikuru.

Ma CVD SiC coated graphite susceptors anoshandiswa zvakanyanya nekuti anobatanidza thermal conductivity yakanaka ye graphite nekudzivirira kwakasimba kwe silicon carbide pamusoro. Graphite core inokurumidza kupisa uye inoparadzira kupisa zvakaenzana, nepo SiC coating ichidzivirira pamusoro kubva mukuora, kurwiswa nemakemikari, uye kugadzirwa kwezvikamu. Musanganiswa uyu unobatsira kuchengetedza nzvimbo yekukura yakachena uye yakagadzikana panguva yekugadzirwa kwenguva refu.

Semuenzaniso, mugadziri anogadzira zvishandiso zvemagetsi zvesilicon carbide zvemotokari dzemagetsi anogona kushandisa reactor anenge mazuva ese. Kana pamusoro pe susceptor pakatanga kupfeka kana kuburitsa zvidimbu, kunaka kwewafer kunogona kudzikira uye kugadzirwa kwayo kunogona kumira kugadziriswa. SiC coating yakasimba inobatsira kuderedza kukanganiswa uku, zvichiita kuti mawafer akawanda agadziriswe asati adiwa kutsiviwa.

Chimwe chikonzero chinoita kuti ma susceptor epamusoro ave akakosha inyaya yekuti maitiro acho akafanana. Mafekitori makuru e semiconductor anowanzo gadzira zviuru zvema wafer achishandisa nzira imwecheteyo. Batch yega yega inofanira kupa mhedzisiro yakafanana kuderedza marara uye kuwedzera goho. Susceptor yemhando yepamusoro inotsigira kugoverwa kwekupisa kwakasimba kubva pa wafer yekutanga kusvika kune yekupedzisira, zvichiita kuti kugadzirwa kuve nyore kufanotaura.

Sezvo saizi dzewafer dzichikura uye magadzirirwo emidziyo achiwedzera kuoma, mashandiro ereactor anonyanya kutsamira patekinoroji yesusceptor yakavimbika. Kusarudza coating chaiyo hakusi kungorarama tembiricha yakakwira chete. Zvakare ndezvekuchengetedza kugadzirwa kwakasimba, kuderedza mari yekugadzirisa, uye kubatsira vagadziri kuwana mhando yewafer yakagara iripo mukati menguva yese yemidziyo.

MaSusceptor Akafukidzwa neCVD SiC uye Kukanganisa Kwawo pakukura kweEpitaxial

Kufanana ndicho chimwe chezvinangwa zvikuru mukukura kwe epitaxial. Ingave kugadzira silicon carbide, gallium nitride, kana zvimwe zvinhu zve semiconductor, wafer yega yega inofanira kunge ine ukobvu hwakafanana, mhando yekristaro, uye hunhu hwemagetsi. Kunyangwe misiyano midiki pane wafer inogona kuderedza mashandiro emudziyo uye kuderedza goho rekugadzira. Ndokusaka mhando ye susceptor iine mhedzisiro yakananga pachigadzirwa chekupedzisira.

Chishandiso cheCVD SiC chakaputirwa negrafiti chinobatsira kugadzira nzvimbo inodziya yakadzikama mukati me reactor. Graphite base inoparadzira kupisa zvinobudirira, nepo dense silicon carbide coating ichiumba nzvimbo yakatsetseka, inogara kwenguva refu inodzivirira kupera kana kurwiswa nemakemikari. Pamwe chete, zvinhu izvi zvinobatsira kuchengetedza tembiricha yewafer ichienderana kubva pakati kusvika kumucheto panguva yese yekukura.

Kudzora tembiricha kwakagadzikana kunotsigirawo magasi anogadzikana mukati me reactor. Kana kupisa kwakapararira zvakaenzana, magasi anoora nguva dzose uye anoisa zvinhu pamwero wakafanana. Izvi zvinotungamira ku epitaxial layers dzine kusiyana kushoma kweukobvu uye kunaka kwemakristaro kuri nani, zvichideredza kudiwa kwekuongorora kana kugadzirisa patsva.

Mamiriro epamusoro ane basa rakakoshawo. SiC coating yakagadzirwa zvakanaka inogadzira zvidimbu zvishoma mushure mekudziya kakawanda. Nzvimbo yakachena yereactor inoderedza mukana wekusvibiswa kusvika pamusoro pewafer, zvichibatsira vagadziri kuwana goho rakawanda uye kushanda kwemidziyo kwakavimbika.

Semuenzaniso, fekitari inogadzira machipisi emagetsi esilicon carbide emotokari dzemagetsi inogona kugadzira mazana emawafer vhiki rega rega. Kana chikamu chimwe che susceptor chikapisa zvakasiyana zvishoma nechimwe, mamwe mawafer anogona kugadzira ma layers asina kuenzana epitaxial asingatariswe zvakanaka. Nekushandisa CVD SiC coated graphite susceptor yepamusoro-soro, fekitari inogona kuvandudza kugadzikana kwebatch-to-batch uye kuderedza marara ezvinhu.

Kuongorora nguva dzose uye kubata nemazvo kunobatsirawo kuchengetedza kufanana nekufamba kwenguva. Kuongorora kuti hapana mavanga, machipisi, kana zviratidzo zvekusakara usati waisa kunogona kudzivirira matambudziko asingatarisirwi ekushanda. Kutsiva chivharo chakasakara chisati chakanganisa kugadzirwa kazhinji kunodhura zvishoma pane kurasikirwa neboka rese remawafers anokosha.

Maitiro Ekusarudza Zvinhu zveSemiconductor Epitaxial Parts dzemazuva ano

Kusarudzwa kwezvinhu kwave chinhu chakakosha mukugadzirwa kwemasemiconductor sezvo magadzirirwo emachipisi ari kuramba achichinja. Vagadziri havasi kusarudza zvinhu zvichibva pakukwanisa kwavo kutsungirira tembiricha yakakwira chete. Vanotarisawo kugadzikana kwekupisa, kuramba makemikari, hupenyu hwebasa, kudzora zvidimbu, uye mutengo wekugadzirwa. Zvinhu zvinoshanda zvakanaka munzvimbo idzi dzese zvinogona kubatsira kuvandudza mhando yechigadzirwa uye kushanda zvakanaka kwekugadzira.

Imwe nzira iri pachena ndeyekushandiswa kuri kuwedzera kwezvikamu zvegrafiti zvakaputirwa. Graphite ichiri kufarirwa nekuti inopa kufambisa kwekupisa kwakanaka uye inokurumidza kupisa. Kana ikasanganiswa neCVD silicon carbide (SiC) coating yepamusoro-soro, inowana nzvimbo yakasimba, inodzivirira inogona kubata magasi akaomarara uku ichideredza kupera. Musanganiswa uyu wave sarudzo inofarirwa nevakawanda vanosundira, vanotakura wafer, nezvimwe zvikamu zvinoshandiswa mukati me epitaxial reactors.

Imwe nzira ndeyekusarudza zvinhu zvichienderana ne semiconductor chaiyo iri kugadzirwa. Zvishandiso zvemagetsi zvesilicon carbide, gallium nitride components, uye compound semiconductors zvese zvine mamiriro akasiyana ekushanda. Panzvimbo pekushandisa chinhu chimwe chete pakushandisa kwega kwega, vagadziri vanosarudza machira anoenderana netembiricha yekushanda, nharaunda yemakemikari, uye zvinodiwa pakushanda kwechinhu chimwe nechimwe.

Nguva refu yekushanda kwemidziyo iri kuwedzerawo kukosha. Kutsiva zvikamu zvereactor kakawanda kunowedzera mari yekugadzirisa uye kunoderedza nguva yekugadzira. Zvinhu zvinogara kwenguva refu uye zvinodzivirira ngura zvakanyanya zvinobatsira kuwedzera nguva dzekutsiva, zvichiita kuti mitsetse yekugadzira ishande zvakanaka.

Semuenzaniso, fekitari inogadzira michina yemagetsi ye semiconductor yemasisitimu esimba rinogona kushandisa epitaxial reactors yayo nguva dzese. Nekusarudza zvinhu zvinogara zvakaputirwa zvinochengetedza mashandiro akagadzikana mukati menguva dzakawanda dzekugadzira, fekitari inogona kuderedza nguva isingatarisirwi yekushanda uye kuchengetedza mhando yewafer ichienderana.

Tichitarisa mberi, kudiwa kwemotokari dzemagetsi, njere dzekugadzira, uye kutaurirana nekukurumidza zvicharamba zvichisimudzira kugadzirwa kwema semiconductor kusvika padanho repamusoro. Izvi zvinoreva kuti kusarudzwa kwezvinhu hakuzongotaridzi chete pakushanda asiwo pakuvimbika, kuchena, uye kukosha kwenguva refu. Vagadziri vanosarudza zvinhu zvakakodzera zvezvikamu zvavo zve epitaxial vachave vakagadzirira zviri nani kusangana nezvinodiwa zvekugadzira zviri kukura uku vachiramba vaine mhedzisiro yakafanana.

Kuenzanisa CVD SiC neCVD TaC Coating Performance muSusceptor Design

Zvese zviri zviviri CVD silicon carbide (SiC) uye CVD tantalum carbide (TaC) coatings zvinoshandiswa kuchengetedza graphite susceptors mumidziyo ye semiconductor. Coat yega yega ine simba rayo, uye sarudzo iri nani inoenderana nemaitiro, mamiriro ekushanda, uye zvinangwa zvekugadzira. Kutarisa mashandiro avo padivi nepadivi kunobatsira vagadziri kusarudza chinhu chakakodzera pane kufunga kuti coat imwe chete inokodzera kushandiswa kwese.

Graphite yakaputirwa neCVD SiC inoshandiswa zvakanyanya nekuti inopa mwero wakanaka wekufambiswa kwemafuta, kuramba makemikari, uye kugara kwenguva refu. Kuputira uku kunoita jira rakakora rinodzivirira girafu kubva kumagasi anoparadza uku richibvumira kupisa kupararira zvakaenzana pamusoro pechivharo. Izvi zvinotsigira tembiricha dzakagadzikana dzewafer, izvo zvakakosha pakugadzira zvidimbu zvakafanana zve epitaxial.

Kuputira kweCVD TaC kunowanzo sarudzwa pamabasa anoda kugona kupisa kwakanyanya kana kuti panodiwa kuramba zvakanyanya kune mamwe makemikari. Nzvimbo yayo yekunyunguduka zvakanyanya uye kuoma kwayo kwakasimba kunoita kuti ive yakakodzera kushandiswa kwakaoma. Panguva imwe chete, kuputira kweTaC kunogona kudhura zvakanyanya kugadzira, saka kunowanzo sarudzwa kana zvakanakira mashandiro azvo zvichienderana nezvinodiwa pakuita.

Chimwe chinhu chekufunga nezvacho inyaya yemutengo wekushanda kwenguva refu. Kupfeka kunotora nguva yakareba uku uchichengetedza kushanda kwakasimba kunogona kuderedza kuwanda kwekugadzirisa uye kuderedza kukanganiswa kwekugadzirwa. Kune akawanda maitiro e silicon carbide epitaxial, CVD SiC coated graphite inopa chiyero chinoshanda pakati pekushanda nemutengo, zvichiita kuti ive sarudzo yakajairika munzvimbo dzekugadzira.

Semuenzaniso, mugadziri we semiconductor anogadzira michina yemagetsi yemidziyo yeindasitiri anogona kuenzanisa machira ese ari maviri asati awedzera mutsetse wake wekugadzira. Kana maitiro aripo atove nemhando yepamusoro yewafer neCVD SiC coated susceptors, kushandura kuenda kuTaC kungasapa rubatsiro rwakakwana kuti zvibatsire mari yakawanda. Kune rumwe rutivi, maitiro akasarudzika ane mamiriro akaomarara anogona kuwana kukosha kubva kuhunhu hwakasiyana hweTaC.

Pakusarudza pendi, vagadziri vanofanira kutarisa zvinopfuura zvinodiwa nezvinhu chete. Dhizaini yereactor, tembiricha yekushandisa, magasi ekugadzirisa, hurongwa hwekugadzirisa, uye zvinangwa zvekugadzira zvese zvinopesvedzera sarudzo yekupedzisira. Kuenzanisa pendi nekushandiswa chaiko kunobatsira kuvandudza kuvimbika kwemidziyo, kuchengetedza mhando yewafer yakafanana, uye kudzora mitengo yekugadzira kwenguva refu.

Matambudziko Ekuvimbika kweSusceptor muKugadzirwa kweSemiconductor Inodziya Nekupisa Kwakanyanya

MaSusceptor anoshanda munzvimbo dzakaoma zvikuru mukati me semiconductor reactor. Anosangana nekupisa kwakanyanya, magasi anochinja-chinja, uye kudzokororwa kwekupisa nekutonhodza kunogona kuramba kuripo kwemwedzi kana kunyange makore. Mamiriro aya akaoma anoisa kushushikana nguva dzose pachinhu chacho nependi, zvichiita kuti kuvimbika kwenguva refu kuve chinhu chikuru kune vagadziri ve semiconductor.

Dambudziko rinowanzoitika nderekupfeka machira nekufamba kwenguva. Kunyangwe machira emhando yepamusoro anosangana nekuchinja kwenzvimbo mushure mekugadzirwa kwakawanda. Kana jira rekudzivirira rikakuvara, girafiti iri pasi payo inogona kubatwa nemagasi ekugadzira, zvichiita kuti ikurumidze kupera uye hupenyu hupfupi hwebasa. Kuongorora nguva dzose kunobatsira kuona matambudziko madiki asati akura kuita matambudziko makuru anokanganisa kugadzirwa.

Kushushikana kwekupisa chimwe chinhu chinogona kuderedza kuvimbika. Nguva imwe neimwe reactor painopisa uye painotonhora, susceptor inokura uye inokotama. Mushure mezviuru zvemadenderedzwa, kufamba uku kunodzokororwa kunogona kuisa kushushikana pa coating. CVD TaC coated graphite susceptor yakagadzirwa zvakanaka yakagadzirirwa kubata shanduko idzi dzekupisa uku ichichengetedza kugadzikana kwakanaka pamusoro, zvichibatsira kuderedza njodzi yekutsemuka kana kutadza kwe coating.

Kugadzirwa kwezvimedu kunewo dambudziko. Sezvo chifukidziro chinokura kana kukuvara, zvimedu zvidiki zvinogona kuparadzaniswa nepamusoro zvopinda mukamuri reactor. Kunyangwe zvimedu zvidiki zvinogona kusvibisa mawafer, kuderedza goho rezvigadzirwa, uye kuwedzera nguva yekuongorora kana yekuchenesa. Kuchengeta susceptor iri mumamiriro akanaka kunobatsira kuchengetedza nzvimbo yakachena yekushanda.

Semuenzaniso, fekitari ye semiconductor inogadzira silicon carbide power devices inogona kushandisa ma reactor akawanda zuva rega rega nemahwindo mapfupi ekugadzirisa. Kana susceptor yakasakara ikasatsiviwa nenguva, kukundikana kamwe chete kusingatarisirwi kunogona kumisa kugadzirwa uye kukanganisa ma wafer batches akawanda. Kuongorora nguva dzose uye kuronga nguva yekutsiva zvinowanzova nemutengo wakaderera pane kugadzirisa nguva isina kurongwa.

Kubata zvakanaka kunoitawo basa rakakosha pakuvimbika. Masusceptor anofanira kuchengetwa nokungwarira, kucheneswa zvichienderana nezvinodiwa nemugadziri wemidziyo, uye kudzivirirwa kubva pakukwenya panguva yekuisa. Kunyangwe kukuvara kudiki pamusoro pechinhu kunogona kupfupisa hupenyu hwechipfeko.

Nekubatanidza zvinhu zvemhando yepamusoro nekugadzirisa nguva dzose uye kushanda nokungwarira, vagadziri vanogona kuwedzera hupenyu hwemuchina wekusunga, kuderedza kukanganiswa kwekugadzirwa, uye kuchengetedza hunhu hwakagadzikana hwewafer panguva yakareba yekugadzira.