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UV LED Epi Susceptor
UV LED Epi Susceptor kubva kuSemixlab chinhu chakagadzirwa nemazvo chakagadzirwa kuti chishande mukukura kweUV LED epitaxial, kunyanya muAlN neAlGaN-based MOCVD applications. Yakagadzirwa kubva ku semiconductor-grade graphite uye yakachengetedzwa ne high-purity silicon carbide (SiC) coating, susceptor inopa thermal conductivity yakanaka, chemical stability, uye resistance kumamiriro ekupisa akakwirira. Nekuona kuti wafer tembiricha yakapararira zvakaenzana uye mamiriro ekushanda akagadzikana, UV LED Epi Susceptor inotsigira epitaxial layer quality inoenderana, kusvibiswa kwezvikamu, uye kuvandudzika kwewavelength. Tinogamuchira kubvunza kwenyu.
tsananguro
UV LED Epi Susceptor chinhu chakakosha mukukura kwe epitaxial kwema LED e ultraviolet. Mamiriro ekunze akanyanya kupisa, huwandu hwakawanda hwealuminium, uye mahwindo madiki e process zvinopa zvinodiwa zvakanyanya pakugadzirwa kwezvinhu uye chivakwa. Mumasystem esimbi organic chemical vapor deposition (MOCVD) ekugadzira ma LED eAlN neAlGaN-based UV, substrate inoshanda senzvimbo yekubatanidza pakati penzvimbo ye reactor ne epitaxial wafers, ichikanganisa zvakananga kufanana kwetembiricha, kugadzikana kwegasi, uye mhando ye epitaxial layer.
Iyo UV LED Epi Susceptor inoshandisa graphite yemhando yepamusoro sechikamu chayo, yakachengetedzwa nesilicon carbide (SiC) coating ine purity, yakagadzirirwa kushanda kwakavimbika pasi pemamiriro ezvinhu akajairika ekupisa kwakanyanya uye ngura ekukura kweUV LED epitaxial. Iyo graphite substrate inopa conductivity yakanaka yekupisa uye mhinduro yekukurumidza yekupisa, zvichiita kuti igone kudzora tembiricha yepamusoro yewafer panguva yekukura kweAlGaN ine aluminium yakawanda. Kushanda uku kwekupisa kwakakosha kuti pave nehukobvu hwakafanana, kuumbwa kwearuminiyamu kwakadzorwa, uye mawavelengths akagadzikana emhepo mukati mewafer.
Silicon Carbide Coating inoita basa guru mukuona kuti maitiro acho agadzikana kwenguva refu. Munzvimbo yeUV LED epitaxy inozivikanwa nemazinga emvura eNH₃ akakwira uye metalorganic precursors inoshanda zvakanyanya, graphite isina kudzivirirwa inogona kubatwa nengura, kugadzirwa kwezvikamu, uye kusvibiswa. Iyo dense SiC coating inonyatso bvisa graphite substrate kubva mukukurwa kwemakemikari zvakananga, ichideredza zvakanyanya kuumbwa kwezvikamu uye kubuda kwegasi uku ichivandudza kuramba kupisa uye ngura yemakemikari. Izvi zvinobatsira kune nzvimbo yakachena yereactor uye kuwedzera goho rewafer, kunyanya mukugadzirwa kwakawanda.
Mukugadzirwa kweUV LED, substrate haingoshandi semutakuri wewafer chete asiwo sechinhu chakakosha chinoratidza kufanana kwekupisa uye kuyerera kwemvura. Geometry yayo uye hunhu hwepamusoro zvinogadziriswa kuderedza mhedzisiro yemucheto uye gradient yekupisa, nokudaro zvichitsigira kukura kwakasimba kwe epitaxial pawafer imwe chete kana dzakawanda. Kushanda kwakasimba uye kunodzokororwa kwekupisa kunogonesa kudzora maitiro kwakasimba, izvo zvinonyanya kukosha kune mawavelengths e ultraviolet akadzika.
Iyo UV LED Epi Susceptor yakagadzirwa kuti igare kwenguva refu uye ishande zvakanaka, ichideredza nguva yekugadzirisa uye mutengo wekuva muridzi wayo. Kubatanidzwa kwegraphite core yepamusoro uye SiC coating yakasimba kunoita kuti pave nekugadzikana uye kusimba kwenzvimbo mukati menguva refu yekugadzira, zvichibatsira machira kuwana nzira dzakagadziriswa uye kuchengetedza goho rakakura kwenguva refu.
Sechikamu cheSemixlab's advanced epitaxial component portfolio, iyi UV LED Epi Susceptor inoratidza kunzwisisa kwakadzama kwekambani kwezvinodiwa zveUV LED process uye kuenderana kwemidziyo. Yakakodzera aluminium nitride (AlN) uye aluminium gallium nitride (AlGaN) epitaxial applications inoda kunyatso pisa, kugara kwenguva refu kwemakemikari, uye kudzokorora maitiro. Semugadziri wekuChina anotungamira weSiC-coated UV LED Epi Susceptors, Semixlab inoramba yakazvipira kupa matekinoroji epamusoro uye mhinduro dzezvigadzirwa zvakagadzirirwa ma semiconductor deep ultraviolet LED epitaxial processes. Tinotarisira nemoyo wese kuva mubatsiri wako wenguva refu muChina.
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