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TaC yakavhara graphite hita
Tikugashirei kuSemixlab's TaC-yakavharwa graphite heaters akagadzirwa uye akagadzirwa kuti asangane nezvinodiwa zvemazuva ano semiconductor kugadzira, kunyanya silicon carbide (SiC) epitaxial kukura maitiro. Inotungamirwa nekutsvaga kwepamusoro pesimba rekuita, tembiricha yepamusoro yekushandisa uye madiki emudziyo saizi, maSiC semiconductors ave akakosha. Yepamusoro-mhando yeSiC epitaxial layer kukura inoda yakagadzikana, yakavimbika, uye pristine yakakwirira-tembiricha nharaunda, uye Semixlab's TaC-yakavharwa graphite heaters chinhu chakakosha chechikamu cheiyi hurongwa hwakakosha, kuendesa hukuru hwekuita uye kuvimbika kwenguva refu kune kugadzirwa kwako.
tsananguro
Sei uchisarudza Semixlab?
Semixlab inogona kupa TaC yakavharwa magirafu hita mumasikisi akajairwa uye zvirevo zvinoenderana nevatengi 'chaiyo michina modhi uye maitiro ezvinodiwa. Ndokumbira utibate kuti uwane yakadzama runyorwa rwetekinoroji paramita, kusanganisira asi isina kuganhurirwa ku:
- Dimensional tolerances
- Maximum kushanda tembiricha
- Yenyama midziyo data senge thermal conductivity
- Graphite mamakisi uye kuchena
-TaC yekuputira ukobvu huwandu uye maitiro akafanana
Zvinotonyanya kukosha ndezvokuti, Semixlab yekudziya zvinhu inogadzirwa neyepamusoro-kuchena graphite substrate yakavharwa neakakwira-density TaC (Tantalum Carbide) coating, iyo inopa musanganiswa weakanakisa ekupisa kwekushisa uye Izvi zvinosanganisa yakanakisa yekupisa conductivity nekudzika kwekushisa kwakanyanya. Isu tinoshandisa magirafu zvinhu kubva kune vatatu vanonyanya kuzivikanwa vatengesi pasi rose, uye vatinoshanda navo vakagadzikana kwenguva refu vanosanganisira SGL (Germany), Toyo Tanso (Japan), uye Mersen (France), kuti tive nechokwadi chekuti zvigadzirwa zvedu zvine vimbiso yemhando yepamusoro kubva kwazvino. Panguva imwecheteyo, Semixlab's TaC coating process iri padanho rinotungamira muindastiri, ine denseness, adhesion uye corrosion kuramba yakasimbiswa kuburikidza neakawanda marounds ekugadzirisa maitiro, uye yakashandiswa zvakanyanya mune yepamusoro-yekupedzisira SiC epitaxial midziyo, inovimbwa zvakanyanya nevatengi.
Magadzirirwo
| Zvenyama zvimiro zveTaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emssivity | 0.3 |
| Thermal kuwedzera kuwedzera | 6.3 10-6/K |
| Kuoma (HK) | 2000 HK |
| musimbwa | 1 × 10-5 Om*cm |
| Thermal kudzikama | <2500 ℃ |
| Graphite saizi inoshanduka | -10 ~ -20um |
| Bemhapemha ukobvu | ≥20um yakajairika kukosha (35um±10um) |
| Kupisa kwemafuta | 9-22(W/m·K) |
| Zvenyama zvimiro zve isostatic graphite | ||
| pfuma | chikwata | Kukosha kwechimiro |
| Kuwanda kwehuwandu | g / cm³ | 1.83 |
| neukukutu | H.S.D. | 58 |
| Kugadziriswa kweMagetsi | μΩ.m | 10 |
| Flexural Simba | MPa | 47 |
| Compressive Strength | MPa | 103 |
| Tensile Strength | MPa | 31 |
| Young's Modulus | GPa | 11.8 |
| Kuwedzera kweThermal (CTE) | 10-6K-1 | 4.6 |
| Thermal Kuitisa | W·m-1·K-1 | 130 |
| Avhareji yeKukura Kwezviyo | μm | 8-10 |
| Rupo | % | 10 |
| Ash Zvemukati | ppm | ≤5 (mushure mekucheneswa) |
Applications
Core Kushandisa: Yakakosha Heating Base muSiC Epitaxy Equipment
Semixlab's TaC-yakavharwa graphite hita inoita basa rakakosha muSiC epitaxy midziyo. Basa rayo guru nderekuita sechigadziko chekudziya system, kutakura uye zvakafanana kupisa iyo Wafer Susceptor yakaiswa pamusoro payo.
Mamiriro Emaitiro: Mune yakajairwa SiC epitaxial chamber, chimiro chinowanzoita seizvi:
1. TaC-yakavharidzirwa graphite heater (Semixlab Product): Iri panzvimbo yepasi, ndiyo inonyanya kupisa.
2. Wafer Susceptor: Yakaiswa pamusoro pechidzitiro, chifukidziro chinopisa chinowanzoitwa nepamusoro-soro graphite kana zvimwe zvinhu zvinodzivirira kupisa uye zvinogona kuputirwa. Yayo chaiyo yakagadzirwa grooves inoshandiswa kubata SiC wafers.
3. SiC Wafers (Wafer): Yakaiswa pane dhisiki yekutakura, ndiyo substrate yekukura kwekupedzisira kwe epitaxial layer.
Maitiro ekupisa uye Zvinetso:
1. High Temperature Zvinodiwa: Kukura kweSiC epitaxial kunoda tembiricha yakanyanyisa (kazhinji inodarika 1500∘C kana kupfuura) kuve nechokwadi chekuora kwekutanga gasi uye kuumbwa kwemhando yepamusoro, imwe-crystalline SiC layers pamusoro pemawafers. Semixlab's heaters yakavakirwa pane substrate ye-high-purity, high-thermal-conductivity graphite kuti ive nechokwadi chokuti kutonhora kwakanyanya kunodiwa kunosvika uye kunotsigirwa nenzira inokurumidza, yakafanana. Iyo Semixlab heater inoshandisa yakakwirira kuchena graphite ine yakakwirira yekupisa conductivity seyo substrate kuti ive nechokwadi chekuti inodiwa tembiricha yepamusoro inosvika uye inochengetwa nekukurumidza uye yakafanana.
2. Kufanana kwakakosha: Kufanana kwekushisa kwenzvimbo yekupisa kunokanganisa zvakananga kugoverwa kwekushisa kwemutakuri disk, iyo inogadzirisa kuwirirana kwekukura kwekukura, epitaxial layer thickness, uye doping concentration pane imwe neimwe pane wafer. Chero tembiricha gradient inogona kukonzera kukanganisa kwakawedzera mu epitaxial layer uye musiyano mukuru mukuita kwechishandiso, uye Semixlab inokwidziridza iyo inopisa munda kugovera hita kuti ideredze kusiyana kwekushisa kuburikidza neyakaomesesa dhizaini uye maitiro ekugadzira.
3. Kemikari Kugadzikana Matambudziko: Magasi anoparadza zvakanyanya (semuenzaniso, silane, propane, hydrogen, uye magasi edopant) anopfuudzwa kuburikidza neiyo epitaxial process. Pakupisa kwakanyanya, magasi aya ane hukasha kune yakajairika graphite, achikonzera kukuvadzwa kusati kwasvika kune zvikamu zvegraphite uye kuburitsa kabhoni zvidimbu zvinosvibisa kamuri yekupindura uye mawafer, zvichikanganisa zvakanyanya kunaka kweiyo epitaxial layer uye goho remudziyo.
Kukwikwidza Kunobatsira
Semixlab TaC Coating Solution uye Benefits:
Zviri mukupindura matambudziko aya kuti Semixlab inoshandisa advanced Tantalum Carbide (TaC) coating tekinoroji. TaC Coating inopa ma graphite heaters kushanda kwepamusoro:
1. Yakaderedzwa Particle Generation uye Kuvandudzwa Goho: Nekudzivirira nemazvo kukukurwa uye kuchokoka kwegirafu substrate, TaC Coating inoderedza kwakabva zvinhu zvemukati kubva mukamuri rekuita panobva. Nekunyatso kudzivirira kukoromoka uye pulverization ye graphite substrate, iyo TaC coating inoderedza kunobva zvinhu zvemukati mukamuri yekugadzira kubva kutsime, iyo yakakosha pakugadzirwa kwemhando yepamusoro yeSiC epitaxial wafers ine yakaderera density, uye yakananga inobatsira kune goho rekupedzisira mudziyo.
2. Yakanakisa makemikari inertness uye corrosion resistance: Iyo TaC coating yakanyanya kugadzikana yekemikari uye yakaderera mhute pressure inodzivirira iyo graphite substrate kubva pakuita nemagasi ekuita patembiricha yakakwira uye mumhepo inoodza. Izvi zvinoderedza zvakanyanya kusvibiswa kwechikamu nekuda kwekutsvaira kweheta, inovimbisa kuchena kwenzvimbo yekukura epitaxial, uye inovandudza kunaka kweiyo epitaxial layer uye kuvimbika kwechishandiso.
3. Maitiro Kugadzikana uye Kudzokorora: Iyo yakagadzikana, yehupenyu hurefu huya ndiyo hwaro hwe-inter-batch (batch-to-batch) uye intra-batch (mukati-batch) process kugadzikana uye kudzokorora, iyo Semixlab's TaC-yakavharwa graphite heaters inopa, ichiita yako SiC epitaxial process ive yakavimbika uye inodzoreka.
4. Hupenyu hwakawedzerwa uye kuderedza mari yekushandisa: Iyo denseness uye kunamatira kwakasimba kweTaC coating kunowedzera kusimba kweiyo graphite heater, ichiwedzera hupenyu hwayo hwesevhisi pasi pemamiriro ekushanda anodiwa. Izvi zvinoreva kuderera kwekugadzirisa uye kushomeka kudzokororwa kwezvikamu zvakasara, izvo zvinonyatso dzikisa mutengo wemutengi wemuridzi.
5. Kuchengeta Yakanakisa Thermal Conductivity: Iyo yakakwenenzverwa yakakwenenzverwa yeTaC yekupfekedza maitiro inopa yakanakisa dziviriro ichichengeta zvakanyanya sezvinobvira yeyakanyanya kuchena graphite substrate yakanakisa yekupisa yekupisa, kuve nechokwadi chekuti kupisa kunofambiswa zvakanaka uye zvakafanana kunofambiswa kune wafer inotakura tireyi uye wafers pamusoro kuitira kunyatso kudzora tembiricha.
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