SiC Yakavharwa Pancake Susceptor yeLPE PE3061S

SiC Coated Pancake Susceptor yeLPE PE3061S chikamu chechimiro chekupisa chakagadzirirwa zvakananga LPE PE3061S liquid phase epitaxy system. Mukugadzira macompound semiconductor, mhando ye epitaxial layer inosarudza zvakananga mashandiro emudziyo uye goho, zvichiita kuti kugadzikana kwemunda wekupisa uye kuchena kwemakemikari kwezvikamu zvereactor kuve kwakakosha. Iyi SiC Coated Pancake Susceptor inopa rutsigiro rwakavimbika rwewafer, inogadzirisa kugoverwa kwekupisa, uye inoratidza kuramba kwenguva refu kune corrosive liquid phase environments panguva yekukura kwe epitaxial tembiricha yakakwira.

Semixlab's SiC Coated Pancake Susceptor inoshandisa high-density isostatic graphite se substrate yayo, pamwe chete nemaitiro epamusoro ekuisa Silicon Carbide Coating yakakora, yakafanana. Dhizaini iyi yekuvaka inoratidza kugadzikana kwakanaka mumamiriro ezvinhu akajairika ekupisa kubva pa700°C kusvika pamusoro pe1100°C. Kusimba kwemuchina we graphite substrate kunovimbisa kusimba kwechimiro, nepo SiC coating ichipa kuomarara kwepamusoro uye kuramba kuchinjika, zvichidzivirira kutenderera kunogona kutungamira mukunyunguduka kana kukura kwe epitaxial kusina kuenzana.

Kuchena kwemakemikari uye kudzora kusvibiswa kwakakosha mukugadzirwa kweLPE. SiC coating inoshanda sechidziviriro chisina makemikari, ichiparadzanisa graphite substrate kubva mukunyunguduka uye ichidzivirira kusangana zvakananga, nokudaro ichideredza zvakanyanya njodzi yekupararira kwekabhoni kana kusvibiswa kwesimbi. Kugadzikana uku kwakanyanya kwemakemikari kunoita kuti kugoverwa kwedopant kugare kwakasimba, huwandu hushoma hwedenda, uye kuwedzera kugona kudzokororwa kwewafer-to-wafer.

Kutarisira kupisa kwakakoshawo kuti pave ne epitaxial layers inoshanda zvakanaka. Kurongeka kwenzvimbo iyi kunoita kuti kupisa kugovaniswe zvakaenzana, nepo SiC's inherent thermal conductivity inowedzera kushanda zvakanaka kwekupisa uye inoderedza kupisa kwenzvimbo. Iyi substrate inobatsira kuumbwa kwenzvimbo inodziya, inodzorwa mukati mePE3061S reactor, ichitsigira kudzora kwe epitaxial layer thickness uye smooth interface formation. Kunyangwe shanduko diki dzekupisa panguva ye liquid phase epitaxy (LPE) dzinochinja kukura kwemafuta uye dopant incorporation. Nekuda kweizvozvo, kufanana kwekupisa padanho re substrate kunoreva zvakananga kudzokorora kwakanyanya kwemaitiro uye goho rekugadzira.

Kugara kwenguva refu uye kushanda kwenguva refu kwechinhu chimwe chete zvinhu zvakakoshawo pakugadzira zvinhu zve semiconductor zvine simba guru. Kuvhara kweSiC kwakasimba kunoratidza kusimba kwakanyanya pakukukurwa, ngura, uye kupisa, zvichiwedzera hupenyu hwechinhu chichienzaniswa ne substrates dzisina kuputirwa negrafiti. Kugara kwenguva refu uku kunoderedza nguva yekugadzirisa, kunowedzera kushanda kwemidziyo, uye kunogadzirisa mari yese yekuva muridzi. Kune zvivakwa zvekugadzira zvinotarisa pakushanda kwenguva refu kweLPE PE3061S systems, substrate yakasimba uye yakagadzikana nemakemikari chinhu chakakosha pakuona kuti sisitimu yakavimbika.

Semugadziri mukuru wekuChina wezvikamu zveSiC-coated graphite susceptor, Semixlab inoshandisa SiC-coated pancake susceptor yega yega yeLPE PE3061S kudzora mhando zvakasimba kuti ive nechokwadi chekuti coating yakafanana, inonamira, kuvimbika kwepamusoro, uye kurongeka kwemativi. Chikamu ichi chakagadzirwa zvine hungwaru kuti chienderane zvizere nePE3061S system architecture, zvichiita kuti zvive nyore kubatanidzwa muma process configurations aripo pasina shanduko. Semixlab's SiC-coated pancake LPE substrate PE3061S inosanganisa kugadzikana kwemuchina wekupisa kwakanyanya, kuramba makemikari kwakanaka, uye kugoverwa kwekupisa kwakagadziriswa kuti ipe mhinduro yakavimbika kune advanced liquid phase epitaxy (LPE) applications. Tinotarisira mibvunzo yenyu inotevera.