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SiC Yakavharwa graphite hita yeMOCVD
Iyo Semixlab SiC Yakavharwa Graphite MOCVD Heater ndeyepamusoro-inoshanda inopisa mutakuri wakagadzirirwa semiconductor kugadzira maitiro anoshandisa kemikari vapor deposition (CVD) kugadzira yunifomu, dense silicon carbide (SiC) coating pamusoro peiyo yekupedzisira-yakanyanya kuchena graphite substrate.
tsananguro
Products Products
Iyo SiC Coated Graphite MOCVD Heater inosanganisa yakanakisa kupisa kwegraphite nekupisa kwakanyanya uye kushorwa kweSiC coatings, uye inoshandiswa zvakanyanya musimbi-organic chemical vapor deposition (MOCVD) midziyo kuve nechokwadi kugadzikana uye kuchena kwepamusoro muwafer epitaxy kukura maitiro.
SiC Yakavharwa Graphite MOCVD Heater Chigadzirwa Zvimiro
1. Ultra-yakakwirira kuchena uye kugadzikana kwemakemikari
Kuchena ≥99.99995%: Yedu yeGraphite Heater yakagadzirirwa pasi pekushisa kwekushisa kweklorini kuburikidza neCVD maitiro, ayo anodzivirira nekudzivirira kusvibiswa kwesimbi uye inosangana nezvinodiwa zve-ultra-clean nharaunda mukugadzira semiconductor.
Anti-chemical corrosion: The dense uye yakakwirira kuoma kweSiC coating (Vickers kuomarara kwe2500-2800) inogona kuramba kukukurwa kweasidhi, alkalis, munyu uye organic zvinonyungudutsa, izvo zvinorebesa hupenyu hwesevhisi yemidziyo munzvimbo inoparadza gasi.
2. Excellent high temperature resistance
Kugadzikana kwekushisa kwepamusoro: inogona kumira kusvika ku3000 ° C mumhepo inert, kushanda kwakadzikama kusvika ku2200 ° C munzvimbo yevacuum, uye 1600-1700 ° C munzvimbo ye oxidizing, iyo inokodzera mamiriro akanyanya eMOCVD reaction chamber.
Yakaderera Coefficient yeThermal Expansion (4.5 x 10-⁶K-¹): Ichi chikamu cheMOCVD Graphite Heater zvinonyatso dzikisa kupeuka kana kupeuka nekuda kwekushanduka kwetembiricha, kuve nechokwadi chekuvimbika kwechimiro pasi penguva refu yekupisa bhasikoro.
3. Optimized thermal management performance
High Thermal Conductivity (200-300 W/mK): Thermal conductivity yepamusoro yeGraphite MOCVD Heater inotarisa kuti chigadzirwa chinogona kukurumidza uye zvakafanana kuendesa kupisa kuti zvibudirire kuwirirana kwekushisa kwekushisa kwepamusoro (± 1 ° C), zvichidaro zvichivandudza epitaxial layer kufanana.
Laminar Gasi Inoyerera Munda Dhizaini: Mushure mekuenderera mberi tekinoroji iteration uye kukwidziridzwa, yedu MOCVD Heater surface smoothness (Ra ≤ 0.8μm) uye geometry optimization inogonesa kugovera kwakafanana kwemagasi anoshanda uye inoderedza deposition isiri-yakaenzana inokonzerwa nemhirizhonga.
Magadzirirwo
Technical Parameters Kuenzanisa uye Zvakanakira
| unhu | Semixlab SiC yakavharwa hita | Zvakajairika graphite heaters |
| Kunyanya tembiricha yekushandisa (inert) | 3000 ° C | 2500 ° C |
| Kemikari Kuchena | ≥99.99995% | ≤99.99 |
| Kupisa kwemafuta | 300W/mK | 120-150 W/mK |
| Bemhapemha adhesion | 415 MPa (4-point kukotama) | 100-200 MPa |
| Hupenyu chaihwo (matenderera) | > Zviuru zana | 100-200 macircuit |
Kukwikwidza Kunobatsira
Sei Semixlab?
Kugadzirisa: Semixlab yakazvipira kupa zvigadzirwa zvakagadzirirwa uye masevhisi ehunyanzvi kune vatengi vedu. Isu tinotsigira kusarudzika kweasina-standard saizi (kusvika 360mm dhayamita) uye coatinges (20-500μm) kugarisa akasiyana siyana emidziyo zvinodiwa.
Global Certification: Yedu SiC Yakavharwa Graphite Heater inoenderana neSEMI, ISO 9001 certified, uye zvigadzirwa zvedu zvinonyanya kutumirwa kuEurope neUnited States, pamwe neJapan neSouth Korea, ine yakakosha mutengo / kuita kwakanakira.
Technical synergy: Semixlab yakagara yakaramba yakabatana nemasangano epamusoro ekutsvagisa muChina, ichishandisa tekinoroji yekubatisa (senge CGT Carbon's SiC³ process) kukwidziridza density yekupfeka uye kupisa kwekuvhunduka.
