SiC Coated Graphite Holder yeICP

Multi-wafer Si epitaxial processing platform

Semixlab SiC Coated Graphite Holder yeICP yakagadzirirwa chaizvo inductively yakabatanidzwa plasma etching uye deposition. Inoshandisa yakakwirira-kuchena graphite substrate yakasanganiswa nesilicon carbide coating process kuti ipe yakanakisa-yepamusoro-tembiricha kuramba, corrosion resistance, uye oxidation kuramba. Inokodzera nzvimbo dzakaomarara dzekuongorora, kuwedzera zvakanyanya hupenyu hwechikamu uye kuderedza mari yekugadzirisa. Panguva imwecheteyo, isu tinovimbisa kuomarara kwemhando yekudzora, yakagadziridzwa masevhisi, uye nekukurumidza kutumira.

Application:

SiC yakavharidzirwa graphite inobata chinhu chakakosha mu semiconductor inductively yakabatana plasma (ICP) etching uye deposition maitiro nekuda kwekuchena kwavo kwepamusoro, kupisa kwekushisa kwakanyanya uye yakanakisa plasma erosion kuramba.

Masevhisi anogona kupihwa:

Mutengi application mamiriro ekuongorora, kuenzanisa zvinhu, tekinoroji kugadzirisa dambudziko.

Chikamu chekambani:

Semixlab ine 2 marabhoritari, timu yenyanzvi ine makore makumi maviri eruzivo rwezvinhu, iine R&D uye kugadzira, kuyedza uye ongororo kugona.

Technical Parameters

Main application fields

Ecological chain verification endorsement

Semixlab SiC Coated Graphite Holder yeICP's ecological chain verification inovhara zvigadzirwa kusvika pakugadzirwa, yapasa certification yepasirese, uye ine akati wandei ematekinoroji epatent kuti ive nechokwadi chekuvimbika uye kusimba mune semiconductor uye simba idzva minda.

Kuti uwane ruzivo rwakadzama rwehunyanzvi hwekuita, mapepa machena, kana sampuli yekuyedza gadziriro, ndapota taura neTechnical Support Team kuti uongorore kuti Semixlab inogona sei kusimudzira maitiro ako.

Semixlab SiC Coated Graphite Holder yeICP yakakosha mabhenefiti

Super corrosion resistance

SiC-yakavharwa magraphite holders anoshandisa kemikari vapor deposition process kuti iite dense inodzivirira layer yesilicon carbide pamusoro pegraphite pamusoro, inobudirira kurwisa ngura kubva kune yakasimba acids, mabhesi, uye organic zvinonyungudutsa. Zvichienzaniswa neyechinyakare magirafu kana zvibatiso zvesimbi, zvibatiso izvi zvakatsiga pakubata masampuli anoora zvakanyanya, kudzivirira kusvibiswa nekuda kwekuparara kwezvinhu. Iwo akanyanya kukodzera ICP zvikumbiro zvinosanganisira kuratidzwa kwenguva refu kune corrosive media.

Yakakwirira tembiricha kugadzikana

Munzvimbo yepamusoro-yekushisa ICP plasma nharaunda, yakajairika graphite iri nyore oxidized uye ablated, asi iyo SiC coating inodzivirira zvakanyanya kuita pakati pegraphite substrate uye oksijeni. Kurwisana kwayo kwepamusoro-kupisa kunovimbisa kuti mubati anochengetedza chimiro chechimiro pasi pemamiriro ekushanda kwenguva refu, kudzivirira kuparara kwechiridzwa chekushanda nekuda kwekupisa kwekupisa kana kurasikirwa kwezvinhu. Iyo inonyanya kukodzera kune inoenderera mberi yekuyedza zvinodiwa zveakakwira-kuburikidza marabhoritari.

Yakakwira michina simba

SiC ine kuoma kuri pedyo neiyo yedhaimondi, uye kupfekedzwa kwayo kunonatsiridza zvakanyanya kupfeka kuramba kweiyo yakaoma nzvimbo. MuICP, SiC coatings inoderedza kupfeka kwepamusoro uye kuwedzera iko kurongeka kwechikamu chakakosha, nekudaro kuchengetedza yakagadzikana ion kutapurirana zvakanaka uye kuderedza kutsiva frequency.

Cost-inoshanda

Kuenzaniswa neSiC yakachena kana platinum, SiC-yakavharwa graphite inochengetedza kuita kwakanaka uku ichidzikisa mutengo ne30% -50%. Hupenyu hwayo ndeye 3-5 nguva yeakajairika magirafu vanobata, zvakanyanya kuderedza downtime uye consumables. Iyo imhinduro inodhura zvakanyanya, kunyanya kumarabhoritari ane mabhajeti mashoma anoda kushanda kwakagadzikana kwenguva refu.