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Graphite ine maburi akachena zvakanyanya
Graphite ine maburi akawanda yakachena yeSemixlab imhando yepamusoro-soro yakagadzirwa kuti ishandiswe kugadzira ma semiconductor anosanganisira epitaxy, diffusion uye oxidation, uye CVD. Iine mwero wekusachena wakaderera uye microstructure ine maburi inodzorwa zvakanaka, inopa hunhu hwakanaka hwekupisa, kugadzikana kwemakemikari, uye kudzora kusvibiswa mumamiriro ekunze akanyanya kupisa. Inoshandiswa zvakanyanya mu susceptors, wafer carriers, heaters, uye chamber components, Semixlab's porous graphite inotsigira magariro akagadzikana, kugona kwayo kuri nani, uye hupenyu hwemidziyo hwakareba mu silicon, SiC, uye GaN semiconductor technologies. Tinogamuchira kubvunza kwenyu.
tsananguro
Graphite ine maburi akawanda yakachena chinhu chakakosha pakugadzirwa kwema semiconductor epamusoro, uko kugadzikana kwayo kwakanyanya pakupisa, huwandu hwayo hwakaderera hwekusvibiswa, uye kuenderana kwemaitiro zvakakosha. Mhinduro dzeSemixlab dzine maburi akawanda dzakagadzirwa zvakanangana nemaitiro ema semiconductor anodziya zvakanyanya uye anonzwa kusvibiswa.
Mumaitiro e epitaxy, graphite ine maburi akawanda inoshandiswa zvakanyanya muzvikamu zvakakosha zvakaita sezvibati zve substrate, zvitakuri zve wafer, magasi ekugovera, uye zvinhu zve thermal field. Munguva yekukura kwe epitaxial ye Si, SiC, uye GaN, kufanana kwakanyatsojeka kwekushisa uye kuyerera kwegasi kwakasimba zvinhu zvakakosha pakudzora ukobvu hwefirimu, kufanana kwe doping, uye kudziviswa kwe defect. Semixlab graphite ine maburi akawanda inoita kuti kupararira kwekupisa kwakafanana uye kudzorwa kwegasi pamusoro pe wafer, nokudaro ichideredza kusagadzikana kwe boundary layer uye mhedzisiro ye edge.
Munguva yekupararira uye oxidation inoda kushanda kwenguva refu pamusoro pe1000 °C, graphite ine maburi akawanda inoshanda sechinhu chakavimbika chekuvaka uye chinotsigira mawafer boats, liners, uye thermal insulation components. Kana ichienzaniswa ne dense graphite, chimiro chayo chine maburi chinoderedza kushushikana kwekupisa uye deformation panguva yekupisa kunodzokororwa, zvichiwedzera kugadzikana kwezvikamu uye kuwedzera hupenyu hwezvikamu. Kusashanda kwayo kwemakemikari uye kusvibiswa kwakaderera zvinobatsira kuchengetedza nzvimbo yakachena yekushanda, zvichitsigira kudzora kwakanyanya pamusoro pemapurofayiri ekupararira kwedopant uye mhando yefirimu re oxide ukuwo zvichideredza njodzi dzekuumbwa kwezvikamu uye kusvibiswa kwe cross-contamination.
Kune maitiro eCVD, LPCVD, uye PECVD, graphite ine maburi akawanda inotamba basa rakakosha muzvidziyo zvinopisa, zvinotakura mawafer, uye zvikamu zvemukati zvekamuri zvinosangana nemagasi anochinja uye tembiricha yakakwira. Kufambiswa kwekupisa kwakanaka kwechinhu ichi kunoita kuti kupisa kupfuure nekukurumidza, nepo chimiro chayo chine maburi chichibvumira kubatwa kwezvigadzirwa zvakaiswa, zvichideredza kupwanyika uye kuburitswa kwezvikamu panguva yekushanda kwenguva refu kwemuchina. Izvi zvinobatsira zvakananga mukugadzikana kwemaitiro, nguva refu yekuchengetedza, uye nguva yakawedzerwa yekushanda kwemuchina.
Graphite yeSemixlab ine maburi akawanda inogadzirwa pasi pehurongwa hwakasimba hwekudzora mhando, nekutarisira kwakanyatsonaka kusarudzwa kwezvinhu zvisina kugadzirwa, kucheneswa, uye microstructure engineering. Kana nguva yakareba yebasa kana kushanda munzvimbo dzinoda makemikari akawanda, chigadzirwa ichi chinoenderana nependi dzekudzivirira dzepamusoro dzakadai seSiC kana TaC. Tichishandisa dhizaini yakasarudzika, kugona kugadzira, uye tekinoroji yepamusoro yependi dze semiconductor, mhinduro dzedu dzinogona kugadziriswa zvakanyatsoenderana nezvinodiwa zvepuratifomu yako yemidziyo ye semiconductor uye process node. Tinotarisira nemwoyo wese kuva mubatsiri wako wenguva refu muChina.
Magadzirirwo
| Mamiriro chaiwo emuviri weporous graphite | |
| ltem | Parameter |
| Hukuru density | 0.89 g / cm2 |
| Simba rinodzvinyirira | 8.27 MPa |
| Kukotama simba | 8.27 MPa |
| Simba simba | 1.72 MPa |
| Kuramba chaiko | 130Ω-inX10-5 |
| Rupo | 50% |
| Avhareji pore size | 70um |
| Kuchengetedza Kwemhepo | 12W/M*K |
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