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Semiconductor quartz wafer boat
Tsva Yekukurumidza:
1. Mamwe mazita: Semiconductor quartz tank, quartz bath ye semiconductor, quartz tank ye semiconductor.
2. Kushandisa: The Semiconductor Quartz wafer boat for high tembiricha maitiro akadai diffusion, oxidation, CVD, annealing, etc., mu semiconductor kugadzira.
3. Core parameters:
Ultra-yakakwirira kuchena quartz (> 99.99% SiO₂) : inodzivirira kusvibiswa nesimbi ions (Na +, K +, Fe³+, nezvimwewo) uye inosangana nezvinodiwa zvehutsanana zvemaitiro epamusoro (<5nm nodes).
High tembiricha kuramba: kuenderera kushanda tembiricha 1200 ℃, pakarepo tembiricha kuramba 1300 ℃.
Kemikari inert: Inodzivirira kugadzirisa magasi akadai seHCl, H₂, O₂, SiH₄ uye asidhi/alkaline nharaunda. Kwete-kuora kwekushandisa kwenguva refu.
tsananguro
Semixlab Semiconductor Quartz wafer mabhoti makiyi ekutakurisa maturusi akagadzirirwa yakakwira tembiricha maitiro senge diffusion, oxidation, CVD, annealing, nezvimwewo, mukugadzira semiconductor. Yakagadzirwa nekuchena kwepamusoro synthetic quartz ine yakanakisa tembiricha kuramba, kugadzikana kwekemikari uye yakaderera kupisa kwekuwedzera coefficient, inogona kutakura wafers munzvimbo dzakaomarara kuita kuti ive nechokwadi chekuenderana uye goho rechigadzirwa.
Midziyo inoshandiswa: Inopindirana nemhando dzose dzeHorizontal / Vertical Diffusion Furnace (Horizontal / Vertical Diffusion Furnace), LPCVD system uye kukurumidza kupisa kupisa (RTP) midziyo.
Quality assurance
Kudzora kwehutano hwakasimba: 100% helium mass spectrometry kuona leak (leakage rate <1×10⁻⁹ mbar·L/s). Material kuchena report (ICP-MS bvunzo) inopihwa yega yega batch.
Certification standards: Zvinoenderana neSEMI F47 zvakatemwa, kuburikidza ne ISO 9001:2015 quality management system certification.
Hupenyu hwesevhisi: avhareji yehupenyu pasi pezvakajairwa mamiriro anopfuura makore maviri (zvichienderana nemaitiro frequency uye tembiricha mamiriro).
Sei tichisarudza chikepe chedu chequartz?
Masevhisi akagadziridzwa: Saizi yakasarudzika uye kuvaka zvinoenderana nemhando yemidziyo (TEL, Kokusai, ASM, nezvimwewo) uye maitiro ekuita.
Kukurumidza kupindura: Yakajairwa nguva yekutumira mavhiki matatu, nekukurumidza maodha anogona kuderedzwa kusvika gumi mazuva ekushanda.
Global service network: Ipai zano rehunyanzvi, kutungamira kwekuisa uye mushure mekutengesa kuchengetedza rutsigiro.Material Specifications.
Magadzirirwo
Project specification
Material synthesis Fused Quartz
Kuchena ≥99.99% SiO₂
Wafer saizi inoenderana 8 ", 12" (inogona kugadzirwa 6" kana 18 ")
Kushanda tembiricha ≤1200°C (inoenderera) / 1300°C (peak)
Coefficient of thermal expansion (CTE) 0.55×10⁻⁶/°C (20-1000°C)
Kukasharara kwepamusoro (Ra) ≤0.2μm
Yakajairika huwandu 25/50/100 mapiritsi
Inoshanda maitiro magasi O₂, N₂, H₂, Ar, SiH₄, HCl, nezvimwe.
| Mechanical property | Density (g/cm3) | 2.2 |
| Mohs kuomarara | 6-7 | |
| Compressive simba (MPa) | 1100 | |
| Kusimba kwesimba (N/mm2) | 50 | |
| Flexural simba (N/mm2) | 65 | |
| Torsional simba (N/mm2) | 30 | |
| Young's modulus (MPa) | 7.2x104 | |
| Chiyero chaPoisson | 0.16 | |
| Anopisa zvivakwa | Coefficient yekuwedzera kwekupisa (20 ~ 320 ℃,k-1) | 5.5x10-7 |
| Thermal conductivity (20 ℃,W·m-1k-1) | 1.4 | |
| Kupisa chaiko (20 ℃, J·kg-1k-1) | 670 | |
| Kupfava nzvimbo (℃) | 1700 | |
| Nzvimbo yekupinda (℃) | 1180 | |
| Strain point (℃) | 1080 | |
| Zvinhu zvemagetsi | Kuramba kwemagetsi (Ω·m) | 1x1016(20 ℃) |
| Dielectric nguva dzose (10GHz) | 3.74 | |
| Dielectric kurasikirwa (10GHz) | 0.0002 | |
| Dielectric simba (V·m-1) | 3.7x107 |
Applications
Kuwedzera tembiricha oxidation / kupararira: silicon doping (phosphorus, boron diffusion), gedhi oxide kukura.
Nhete yefirimu deposition: LPCVD polycrystalline silicon, Silicon nitride (Si₃N₄) deposition.
Anealing process: annealing mushure mekuisirwa ion (RTA), simbi alloying.
Chizvarwa chechitatu semiconductor: silicon carbide (SiC), gallium nitride (GaN) epitaxy process.
Kukwikwidza Kunobatsira
1. Hunhu hwezvinhu
Ultra-yakakwirira kuchena quartz (> 99.99% SiO₂) : inodzivirira kusvibiswa nesimbi ions (Na +, K +, Fe³ +, nezvimwewo) uye inosangana nezvinodiwa zvehutsanana kune maitiro epamusoro (<5nm nodes).
Kupisa kwekushisa kwepamusoro: kuenderera mberi kwekushanda kwekushisa kwe1200 ° C, pakarepo kupisa kwekushisa kwe1300 ° C, hapana deformation kana crystallization ngozi.
Kemikari inertness: Kumirisana nemaitiro magasi akadai seHCl, H₂, O₂, SiH₄ uye acid/alkaline nharaunda. Isingaori mukushandiswa kwenguva refu.
2. Kururamisa dhizaini
Optimize chimiro:
Iyo slot spacing kurongeka ndeye ± 0.05mm, kuve nechokwadi chekuti wafer positioning (8/12 inch) uye kudzivirira kukwenya kana kutamiswa.
Thermal shock resistant design, shandura kukurumidza kusimuka uye kudonha (kupisa ≤20 ° C / min).
Yakaderera particle maumbirwo: Iyo yepamusoro ndeye Ultra-chaiyo yakakwenenzverwa (Ra ≤0.2μm) kudzikisa chidimbu chekubatanidza uye kudonha.
3. Diversified configuration
Capacity Optional: Tsigira zvidimbu makumi maviri neshanu, zvimedu makumi mashanu, zvidimbu zana uye zvimwe zvakajairwa zvakatemwa, zvinogona zvakare kugadzirwa zvisiri-standard slot nhamba.
Type adaptation: Vhura Boat, Yakavharwa Ikepe kana yakakosha mhando yechikepe (senge chikepe pazasi diversion chiteshi dhizaini).
FAQ
Q1: Unogona here kupa isiri-yakajairwa saizi kana yakakosha dhizaini?
A1: Semixlab inotsigira masevhisi etsika, kusanganisira kugadzirisa saizi, tembiricha yepamusoro muganho (kukwidziridzwa kwezvinhu kunodiwa) kana chimiro chemhando. Ndokumbira ubate timu yeTekinoroji yeSemixlab kuti uwane zvinodiwa.
Q2: Inguva yakareba sei yekutungamira?
A2: Nguva yekutumira yezvigadzirwa zvakajairwa ndeye 4-6 mavhiki, uye dhizaini uye nguva yekusimbisa yezvigadzirwa zvetsika ndeye 2-3 mavhiki.
Q3: Iwe unopa mushure mekutengesa tekinoroji rutsigiro?
A3: Hongu, isu tinopa kweupenyu hwese tekinoroji kubvunza uye masevhisi emhinduro yekukurumidzira. Muchiitiko chekuisa kana kushandisa matambudziko, timu yekutsigira inogona kubatwa chero nguva neemail kana foni.
Q4: Chigadzirwa chacho chinosangana semiconductor indasitiri zviyero here?
A4: Hongu, maitiro ekugadzira anowirirana neSEMI zviyero uye anosimbiswa ne ISO 9001 quality management system. Batch imwe neimwe inoedzwa kusimba kwemhepo, kuramba tembiricha uye kuchena isati yabuda mufekitori.
