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Quartz Ring 150mm
Mhete yeAMAT Quartz 150mm 0200-09087 chikamu che semiconductor chakagadzirwa nemazvo chakagadzirirwa kushandiswa mumasisitimu ekugadzirisa plasma e150 mm wafer, kusanganisira sputter etch nePVD chambers. Sechikamu chakakosha chekamuri, mhete yequartz inoita basa guru mukudzora plasma, kudzivirira kamuri, uye kufanana kwemaitiro. Mhete dzedu dze150mm quartz dzakagadzirirwa kusangana nezvinodiwa zvekugadzirwa kwewafer yemazuva ano, kuve nechokwadi chekuti mashandiro akasimba, kusvibiswa kwakaderera, uye mhedzisiro yemaitiro yakavimbika. Tinogamuchira mibvunzo yenyu.
tsananguro
Sechikamu chinoratidzwa neplasma, mhete ye quartz yakagadzirirwa kushanda munzvimbo dzine simba rakawanda uku ichichengetedza kugadzikana kwechimiro uye kuenderana kwemaitiro.
Key Product Information
| chinhu | tsananguro |
| Product Name | Mhete yeAMAT Quartz 150mm 0200-09087 |
| Wafer Size | 150 mm (6 padiki) |
| zvinhu | Quartz Yakasanganiswa Yakachena Kwazvo |
| Chikamu Chemhando | Chinodzorwa neChamber Ring/Plasma |
| kunyoresa | Kugadzira Maputter Etch / PVD / Plasma |
| Equipment Compatibility | Masisitimu Ekugadzirisa Semiconductor |
| Supplier | Semixlab |
Zvinhu uye Zvakanakira
Mhete yeAMAT Quartz 150mm inogadzirwa kubva ku semiconductor-grade fused quartz (SiO₂), chinhu chinozivikanwa zvikuru nekushanda kwayo kwakanaka munzvimbo dzekugadzirisa plasma.
Mabhenefiti Akakosha eFused Quartz:
Kusvibiswa Kwakaderera Zvikuru
Quartz ine kuchena kwakanyanya ine huwandu hwakaderera hwetsvina yesimbi, ichideredza njodzi yekusvibiswa kwewafer uye inotsigira mwero wepamusoro wekugadzira semiconductor.
Kuramba Kwakanaka Kweplasma
Quartz inodzivirira zvakasimba ion bombardment uye plasma erosion, zvichiita kuti ive yakakodzera kushandiswa kwenguva refu mu sputter etch uye plasma chambers.
High Thermal Kugadzikana
Chinhu ichi chinochengetedza chimiro chayo chakasimba pasi pekupisa kwakanyanya uye kupisa kwakawanda, zvichiita kuti chishande zvakanaka panguva yekugadzirisa.
Kuisa Magetsi
Sechinhu chisingafambise magetsi, quartz inobatsira kudzikamisa magetsi ari mukamuri, zvichibatsira mukupararira kweplasma kwakafanana.
Kemikari Inertness
Quartz inodzivirira magasi anoshandiswa mukuita kwe semiconductor, zvichideredza kuora kwechinhu uye kuwedzera hupenyu hwechikamu.
Zvinhu izvi zvinoita kuti fused quartz ive chinhu chakanakira zvikamu zvemukamuri zvakasangana neplasma nemamiriro ekunze anodziya zvakanyanya.
Applications
Midziyo yeSemiconductor yeMukati
Mhete yeAMAT Quartz 150mm inoita mabasa akakosha mukati memakamuri ekugadzirisa plasma, ichikanganisa zvakananga kugadzikana kwemaitiro uye kunaka kwewafer.
1. Kuvharirwa uye Kudzora Plasma
Mhete yequartz inobatsira kutsanangura nharaunda yemuganhu weplasma, kudzora kupararira kwemaion uye kudzikamisa maitiro eplasma mukati mekamuri. Izvi zvinobatsira kuti maitiro ekudzokorora uye agare akafanana.
2. Kugadzirisa Kuenzana kweEdge
Iri pedyo nemucheto wewafer, rin'i iyi inoita basa rakakosha mu:
● Kudzora huwandu hweplasma pamucheto wewafer
● Kuderedza migumisiro yemupendero
● Kuvandudza kufanana kwemavara kana maburi
Izvi zvakakosha pakuchengetedza kudzorwa kweCD (critical dimension) uye kugona kwewafer yese.
3. Dziviriro yeChamber
Sechikamu chechibayiro, mhete ye quartz inonwisa:
● Zvinhu zvakapwanyika
● Zvigadzirwa zvakachekwa
● Kusangana neplasma
Izvi zvinobatsira kudzivirira zvinhu zvakakosha zvemukamuri zvakaita semadziro esimbi, machira esimbi, uye machuck emagetsi kubva mukukuvadzwa nekusvibiswa.
4. Kuvandudza Kugadzikana Kwemaitiro
Nekuchengetedza geometry uye hunhu hwezvinhu zvinoenderana, mhete ye quartz inotsigira:
● Magadzirirwo emhepo yakagadzikana
● Kudyidzana kweplasma kunodzorwa
● Kugadzirwa kwezvikamu zvishoma kushoma
Izvi zvinozopedzisira zvaita kuti maitiro adzokororwe zviri nani uye nguva yekusashanda ideredzwe.
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