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SiC ceramic membrane
Iyo SiC Ceramic Membrane yakagadziridzwa neSemixlab Semiconductor ndeyechokwadi-engineered porous silicon carbide chikamu chakagadzirirwa yekupedzisira-yakachena uye yakakwirira-tembiricha nharaunda muCVD, MOCVD, uye PECVD maitiro. Nekusagadzikana kwemakemikari kugadzikana, simba remuchina, uye kupisa kwemafuta, inopa yakavimbika gasi kuyerera kwekutonga, particle filtration, uye kudzivirira kusvibiswa mukati me semiconductor kugadzira reactor.
tsananguro
Mukugadzira semiconductor yepamusoro, iyo SiC Ceramic Membrane inoshanda sechinhu chinoshanda sechinhu chinokanganisa zvakananga kugadzikana kwemaitiro, wafer kufanana, uye kuita kwegoho rose. Mukati meCVD, MOCVD, uye PECVD masisitimu, inoshanda seyakakosha interface pakati pemaitiro magasi uye maitiro ekuita nharaunda, ichiva nechokwadi chekutonga kwakaringana kwekuyerera kwemasimba, chiyero chekupisa, uye kudzvinyirira kudzvinyirira.
Kuburikidza neyakafanana yunifomu porous dhizaini, iyo SiC membrane inosimudzira laminar uye yakaenzana yakagovaniswa gasi kuburitsa pane yawafer pamusoro. Iyi yunifomu inoyerera munda inoderedza misiyano yemuno mu precursor concentration, nekudaro ichiwedzera firimu ukobvu kufanana uye kuumbwa kunoenderana panguva epitaxial kana dielectric deposition. Panguva imwecheteyo, iyo membrane yakanaka pore dhizaini inoshanda seyakakwira-tembiricha particle sefa, inobata macondensates, carbon residues, uye submicron particulates vasati vasvika inoshanda wafer zone-chinhu chakakosha mukudzikisa hurema uye kuchengetedza yakakwirira mudziyo kuvimbika.
Kupfuura kuyerera uye kusefa, iyo SiC ceramic matrix inopa yakasimba yekupisa uye kemikari chipingamupinyi mukati mekamuri yekuita. Inoparadzanisa zvinhu zvinonzwisisika kubva kumhando dzinoshanda, inoderedza kusvibiswa kwemashure, uye inochengetedza hutsanana hwekamuri panguva yekutenderera kwekugadzira. Munzvimbo dzekupopota, tekinoroji imwechete yemembrane inogona kushandiswa kudzikamisa kudzvanywa uye kuteya zvakasara ne-zvigadzirwa, zvichibatsira kukuchenesa mitsara yekupopota uye nguva refu yekugadzirisa.
Nekubatanidza mabasa aya muchikamu chinogara kwenguva refu, SiC Ceramic Membrane haingonatsiridzi kushanda kweCVD neMOCVD reactors asiwo inogonesa kugadzikana uye kudzokororwa kwemaitiro enzvimbo-iyo inosangana nekuchena kwakaomarara uye kuita zvinodiwa zvechizvarwa chinotevera semiconductor kugadzira.
Iyo SiC ceramic membrane inogadzirwa sei
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