EN 
EN
DA
NL
FI
FR
DE
IT
JA
KO
NO
PL
PT
RO
RU
ES
SV
TL
ID
SK
UK
VI
TH
TR
FA
BE
LA
UZ
SiC Edge Ring yeWafer Processing
Yedu SiC (Silicon Carbide) Edge Ring chinhu chakakosha chekuona mhando mune yako semiconductor wafer maitiro. Yakagadzirwa kubva pa99.999%+ yakakwirira-kuchena SiC uye inogadzirwa uchishandisa yepamusoro isostatic yekutsikirira uye yakakwirira-tembiricha sintering process (2100 ° C - 2400 ° C) kuti uwane density inopfuura 3.10 g/cm³. Iyo yepamusoro inopedzwa zvine hungwaru nekukuya kwedhaimondi uye kukwenenzverwa kusvika kune yakaderera-yakaderera roughness yeRa <0.1 µm, zvinodzivirira kudzivirira kugadzirwa kwechikamu.
tsananguro
Yemazuvano SiC Edge Ring Kugadzira Maitiro
Kugadzirwa kweSiC kumucheto zvindori inzira yakaoma uye yakanyatsojeka. Kutanga, SiC raw material poda inonatswa zvakasimba kuti iwane kuchena kwepamusoro (> 99.999%). Upfu uhu hunozogadzirwa uchishandisa isostatic kana dry pressing. Tevere, inosiiwa patembiricha iri pakati pe2100 ° C uye 2400 ° C kuti iite dense ceramic body. Mushure mezvo, inopedzwa nemazvo kushandisa madhaimani ekukuya uye nzira dzekupukuta kuti iwane yakaderera pasi roughness (Ra <0.1 µm). Chekupedzisira, inoitwa kucheneswa kwakasimba uye kuongororwa kwechikamu kuti ive nechokwadi chekuti inosangana nehutsanana zviyero zvekugadzira semiconductor.
Applications
Core Kushandiswa kweSiC Edge Ring
Iyo SiC Edge Ring inoita basa rakakosha mumatanho akakosha ekugadzira wafer senge etching uye deposition. Basa rayo rekutanga ndere kuchengetedza mupendero wewafer, kuve nechokwadi chekufanana kwemaitiro mukati mese wafer pamusoro, uye kuwedzera hupenyu hwemukati mekamuri yemukati.
Heano maapplication akakosha:
Wafer Edge Dziviriro: Munguva yePlasma etching, mipendero isina kudzivirirwa inogona kuwana etch rate yakasiyana pane yepakati nzvimbo. Izvi zvinotungamira kune kunze-kwe-spec maparamendi emachipisi pawafer mupendero (mupendero kufa), zvichidzikisa zvakanyanya goho rose. Iyo SiC Edge Ring inoshanda sechivharo chemuviri, ichinyatso kudzvanya mupendero weplasma mhedzisiro yekuona yunifomu yekugadzirisa kubva pakati kusvika kumucheto kwechifukidziro.
Plasma Distribution Control: Mune plasma-yakavakirwa maitiro, kuwanda uye kugoverwa kweplasma kunobata zvakananga mhedzisiro yekupedzisira. Kuvapo kweSiC Edge Ring kunogadzirisa mamiriro emuganho eplasma mukati mekamuri yekupindura, zvichitungamira kune yakawedzera yunifomu yeplasma kugovera pamhepo. Izvi zvakakosha kumatanho anoda kuenzana kwakanyanya, senge yakadzika trench etching kana akawanda-layer dielectric etching.
Kudzivirira Kusvibiswa & Chikamu Hurefu Hweupenyu: Byproducts uye madhipoziti anogona kuumba pamucheto wewafer panguva yemamwe maitiro. Kana zvikasara zvisingadzoreki, zvinhu izvi zvinogona kusvibisa madziro ekamuri, iyo electrostatic chuck, uye zvimwe zvinodhura zvinoriumba. Iyo SiC Edge Ring inobata uye inodzivirira izvi zvinosvibisa kubva pakupararira, kuchengetedza zvakakosha zvikamu zvekamuri uye kuderedza kuwanda kwekucheneswa kwekamuri. Izvi, zvakare, zvinowedzera nguva yemidziyo.
Seyakanakira kushandiswa kweplasma etching uye yakatetepa-firimu deposition mudziyo, yedu SiC Edge Ring inobatsira kubvisa wafer mupendero mhedzisiro, kuve nechokwadi etching yunifomu uye deposition kubva pakati kusvika kumucheto. Uye Dzivirira zvinodhura zvemukati zvekamuri zvikamu, kuderedza deposition kuvaka uye kuwedzera michina nguva. Zvichakadaro, Zvinonyatso bvisa kupisa, kuchengetedza wafer tembiricha kuenderana panguva yepamusoro-simba maitiro.
Kusarudza Semixlab SiC Edge Ring zvinoreva kusarudza yakakwira chip goho, yakagadzikana maitiro ekugadzira, uye yakaderera mitengo yekuchengetedza michina. Isu tinotarisira nemoyo wese kukupa iwe zvigadzirwa zvakagadzirirwa uye rutsigiro rwehunyanzvi. Tinotambira mimwe kubvunza kwenyu.
Our Services
Semixlab Chigadzirwa Shop
