Solid SiC kumucheto mhete

Key Performance Features

Semixlab Bulk SiC Edge Ring yakagadzirwa kuti isangane nezvinoda kuomarara zvechizvarwa chinotevera semiconductor kugadzirwa. Iwo anotevera maitiro ekuita anoita kuti ive sarudzo inosarudzika yeplasma etch chamber mumachira epamberi:

● Yakanakisa Plasma Bombardment Resistance

Yakagadzirwa kubva kune yakakwira-kuchena yakasimba silicon carbide, mhete yemupendero inoratidza kusimba kwakasarudzika kune yakakwira-density plasma, ichiva nechokwadi chekupfeka kushoma uye nekuwedzera chikamu chehupenyu pasi peiyo ion bombardment.

● Superior Gas Corrosion Resistance

SiC zvinhu zvinopa yakakwira makemikari inertness, zvinobudirira kushingirira kuodza etch magasi akadai seCl₂, CF₄, uye SF₆ pasina kushatisa kwepasi, kunyangwe munzvimbo dzakanyanya kupisa.

● Inoshamisa Thermal Shock uye Thermal Strain Resistance

Iine thermal conductivity ye 120-150 W / m · K uye yakaderera thermal yekuwedzera coefficient (~ 4.5 × 10⁻⁶ / K), iyo yakasimba SiC chimiro inochengetedza dimensional kugadzikana uye kutendeseka kwemagetsi panguva yekukurumidza kupisa bhasikoro.

● Smooth Surface, Particle-Free Operation

Maitiro epamberi ekupedzisa maitiro anovimbisa kudzika kwepasi roughness (Ra ≤ 0.2 µm), kuderedza kugadzirwa kwechikamu uye kurerutsa nzira yekuchenesa kamuri, izvo zvinoderedza nguva.

● Hapana Warping kana Deformation nekufamba kwenguva

Kusiyana neyakajairwa kumucheto mhete, yedu monolithic SiC dhizaini inoramba yakatsetseka uye yakagadzikana mushe mukati menguva yakawedzerwa maitiro kutenderera, ichiunza kuita kwakavimbika pamusoro pehupenyu hurefu hwesevhisi.

Sei uchisarudza Semixlab SiC Edge Rings?

PaSemixlab, tinoburitsa mhando yepamusoro inotsigirwa nehunyanzvi uye hunyanzvi. Heino chikonzero nei Semixlab SiC Edge Rings yakamira kunze:

● Custom-Tailored Solutions

Isu tinopa yakazara yakazara zvinoenderana nemaitiro ako ekuita, anosanganisira emukati / ekunze madhayamita, ukobvu, uye akakosha machira epamusoro kana maumbirwo, kuve nechokwadi chekukwana uye kuita kwakaringana mukamuri yako etch.

● Comprehensive Range of Types

Semixlab inotsigira akasiyana etch chishandiso mapuratifomu anosanganisira TEL, Lam, AMAT, uye tsika OEM masisitimu, ane ese akajairwa uye turusi-chaiwo kumucheto mhete dziripo kuti dzienderane nemhando dzakasiyana-siyana zvinodiwa.

● Hunhu Hwakagadzikana, Kukurumidza Kuendeswa

Iine ISO-yakasimbiswa yekugadzira, yakasimba yemhando yekudzora, uye yakakwenenzverwa yekugovera cheni, isu tinoona kunoenderana kuita kwechikamu, nguva pfupi yekutungamira, uye-nguva yekuendesa kuti kugadzirwa kwako kufambe pasina kunonoka.

Core Physical zvimiro zveSolid SiC

Kushandisa muSemiconductor Manufacturing

Iyo Solid SiC Edge Ring chinhu chakakosha musilicon wafer plasma etching process, iyo inoshanda seyekudzivirira uye yakarongeka interface pakati pewafer nechamber hardware. Yakamisikidzwa yakatenderedza kumucheto kwewafer, chikamu ichi chinovimbisa kugadzikana kwemaitiro, inodzivirira iyo electrostatic chuck (ESC), uye inoderedza njodzi yekusvibiswa nekudzivirira kuunganidzwa kwechikamu. Iyo inonyanya kukosha mune yakakwirira-chaiyo yakaoma etching uye RIE (Reactive Ion Etching) nharaunda uko maitiro ekudzokorora, kuchengetedzwa kwekamuri, uye kuvimbika kwenguva refu kwakakosha.