Sei vePamusoro 5 chip vagadziri vepasi vachisarudza Solid SiC etching mhete? Kuzarura Chakavanzika che40% Kuwedzera muPlasma Unif

Semixlab yakagadzira tekinoroji nyowani iri kushandura magadzirirwo anoitwa machipisi. Mazuva ano mienzaniso yakanaka ndeye etching mhete (Solid SiC). Asi izvi zvinorevei CVD SiC coating? Ngatitarisei zvakanyanya kuti sei vakave nemukurumbira uye kuti vanovandudza sei chip kugadzira ne40%.

Basa Rakanaka SiC Etching Mhete Mukugadzira Chips

Mhete dzakasimba dzakasimba dzeSiC dzakakosha pakugadzira machipisi, sezvo dzakasimba uye dzinogona kumira kupisa. Solid SiC zvindori, zvinopesana nemhando yekare etching mhete pamarin'i ane zvinhu, senge quartz kana ceramics, inogona kutsungirira kupisa uye kukuvara. Izvi zvinovabvumira kushanda zvakaoma mumamiriro ezvinhu akaoma pasina kucheka kana kukuvadza machipisi.

Ivo Vanogona Sei Kuwedzera Plasma Uniformity ne40%?

Saka imwe yakakura mukana we CVD SiC yakavharwa graphite susceptor ndeyekuti ivo vanobatsira kusimudzira kufanana kweplasma panguva yekugadzira chip. Kufanana kwePlasma: Ichi chinhu chakakosha uye chinoreva kuti plasma inopararira sei pamusoro peiyo chip, izvo zvakakosha kuti uwane mibairo yakanaka. Nemhete dzeSolid SiC, kufanana kweplasma kwe40% kana kupfuura zvichienzaniswa neiyo yemazuva ese etching mhete inogona kuwanikwa nevagadziri vewafer. Mhedzisiro ndeyekugadzira chip iyo yakanyatsojeka uye yakavimbika, uye iyo inoburitsa zvirinani machipisi.

Ndeapi Solid SiC Etch Mhete Inogadzirwa Kubva?

Iyo yakasimba SiC etching inoumbwa nesilicon carbide. Nyaya iyi yakasarudzika nekuda kwehuremu hwayo, iyo yakasimba kwazvo uye yakanaka pakubata kupisa. Yakagadzirwa kubva kusilicon uye kabhoni, silicon carbide yakanakira kugadzira machipisi, nekuti haisi iyo chete zvinhu zvakanyanya kuoma, inoramba kupisa, makemikari uye magetsi. Izvi zvimiro zveSolid SiC mhete zvakanaka pakugadzira yakakwirira inoshanda machipisi.

Chii chinonzi Solid Silicon Carbide chinoreva kune iyo Chip Indasitiri?

Iyo chip indasitiri inofa nenzara tekinoroji nyowani inogona kufambirana nezvinodiwa zvekukurumidza uye nekugadziridzwa machipisi. Uye yakasimba SiC etching mhete dziri kusimudza mutambo nekupa vanogadzira chip nzira inokurumidza uye yakachipa yekuisa machipisi avo. Izvo zvinokatyamadza zvimiro uye kusimba kwechinyorwa chinoita kuti zvinyatsokodzera kugadzira emhando yepamusoro machipi anogutsa yemazuva ano chip based zvinodiwa.

Ko Solid SiC Etching Rings Inogona Sei Kushanda?

Chii chinoita kuti Solid SiC etching zvindori zvibudirire ndizvo zvavanounza patafura nezvinhu zvavo uye dhizaini yakangwara. Silicon carbide yakanaka kudzivirira ngura, kupisa kuvhunduka uye kupfeka. Izvi zvinovandudza kusimba uye hupenyu hweSolid SiC mhete. Uyezve dhizaini Solid SiC mhete inobatsira kukwirisa kufanana kweplasma, uye inoita kuti iwe ugadzire machipisi zvakanyanya uye nemazvo.

Saka iwe unayo, Yakanyanya kuchena CVD SiC mbishi zvinhu zveSiC crystal kukura vari kushandura indasitiri yechip nekuita kuti vagadziri vakwanise kuwana yakagadziridzwa plasma kufanana uye nani machipisi mukuita. Semixlab iri kumberi neiyo Solid SiC tekinoroji kugadzira machipisi akanaka uye akasimba. Iine Solid SiC etching mhete, vanogadzira chip vanogona kutarisira kushanda nekukurumidza, zvakanyanya-zvinodhura uye nemachipi emhando yepamusoro anodiwa nehunyanzvi hwanhasi.