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CVD SiC Yakaputirwa Graphite Showerhead
Semixlab's CVD SiC Coated Graphite Showerhead yakagadzirwa kuti ikwanise kuisa semiconductor deposition munzvimbo dzinopisa uye epitaxy uko kufanana kwemaitiro, kudzora zvidimbu, uye kugadzikana kwenguva refu kwezvikamu zvakakosha pakushanda kwekugadzira. Kubatanidza graphite substrate yakachena kwazvo ne dense chemical vapor deposited (CVD) silicon carbide (SiC) coating, chikamu ichi chepamusoro chinopa kugadzikana kwakanaka kwekupisa, kuramba ngura kwakanyanya, uye kugara kwenguva refu mumamiriro ekupisa kwakanyanya uye akasimba emakemikari. Tinotarisira kubvunza kwako kwakawanda.
tsananguro
Musoro weshawa weCVD SiC une graphite coated graphite chikamu chekugovera gasi chinoshandiswa mukugadzira ma semiconductor epitaxy uye kugadzira wafer yepamusoro. Unotanga ne graphite core yakachena kwazvo, wobva wawana CVD silicon carbide coating yakakora. Basa remumusoro weshawa riri nyore asi rakakosha: kupa gasi zvakaenzana pamusoro pewafer, uku uchimira pasi pekupisa kwakanyanya uye makemikari akasimba.
Mukati mekamuri rekuita, inoshanda semuchina wekuparadzanisa gasi wakanyatsogadzirwa. Magasi ekugadzira anoyerera nemunzira dzemukati uye patani yemaburi madiki ekubuditsa, saka gasi rinopararira zvakaenzana pamusoro pewafer. Kufanana ikoko kunokanganisa zvakananga kusimba kwefirimu, kunaka kwekristaro, uye kuti maitiro ako anodzokororwa sei.
Semixlab inogadzira mashawa eCVD SiC akagadzirwa nemapuranga akagadzirirwa mabasa akasiyana-siyana - SiC epitaxy, GaN epitaxy, MOCVD systems, CVD reactors, nedzimwe nzira dzekuisa mvura mukupisa kwakanyanya.
Key Features
● Kufamba zvakanaka kwegasi - Mapatani emaburi nemakwara emukati zvakagadzirwa nemachina nemazvo, saka kupararira kwegasi kunoramba kwakasimba uye kunyangwe munzvimbo yese yekushanda. Izvi zvinobatsira kuvandudza kugadzikana kwefirimu uye kugona kwayo kugadzira wafer.
● Kuputira kweCVD SiC kwakachena kwazvo - SiC layer yakakora inodzivirira magasi anoparadza zvakanaka, zvichireva kuti zvidimbu zvishoma uye njodzi yekusvibiswa yakaderera panguva yekugadzira.
● Kugadzikana kwekupisa kwakasimba - Graphite inopa kufambiswa kwakanaka kwekupisa, uye SiC coating inowedzera dziviriro. Pamwe chete zvinobatsira shawa kuti igare yakagadzikana mumamiriro ekunze anodziya zvakanyanya.
● Nguva yakareba yekushanda - Kana tichienzanisa nezvikamu zvegrafiti zvisina kurongeka, CVD SiC coated version inodzivirira kupera simba uye inogara kwenguva refu. Unowana mari shoma yekugadzirisa uye mari shoma yekuitsiva.
● Uinjiniya hwekugadzira zvinhu - Tinogona kushandura saizi, mapatani emaburi egasi, nzira dzemukati, zvivakwa zvekuisa - zvinongogadzirisa musoro weshawa kuti ukwane magadzirirwo akasiyana ereactor.
Kugadzira kugona
Semixlab inoita zvinhu zvakawanda mukati:
● Kugadzira graphite nemazvo
● Kuisa chifukidziro cheCVD SiC
● Kugadzira gasi rakawanda
● Kudzora kushivirira kwakasimba
● Kupedzisa uye kuongorora pamusoro
● Kugadzirisa magadzirirwo akagadzirwa nemaoko ako
Chikwata chedu chemainjiniya chinoshanda pamwe chete nevatengi kugadzira mashawa - kungave ekugadzira michina mitsva kana kuti sezvikamu zvekutsiva.
Sei uchisarudza Semixlab?
● Ruzivo rurefu ne semiconductor graphite uye SiC coated components
● Zvinhu zvakagadzirwa zvakachena kwazvo
● Tekinoroji yekuputira yeCVD SiC yemukati meimba
● Kugadzira zvinhu zvinochinjika
● Kudzora kwakasimba kwemhando
● Mhinduro inokurumidza yezvigadzirwa zvemhando yepamusoro uye maodha ekugadzira
Chinangwa chedu ndechekupa zvikamu zve CVD SiC zvakaputirwa ne graphite zvinobatsira vagadziri ve semiconductor kuvandudza mashandiro ekugadzira, kuderedza njodzi dzekusvibiswa, uye kushanda zvakanaka kwenguva refu.
Applications
SiC epitaxy - Inoshandiswa muSiC epitaxial reactors kuparadzira magasi epamberi zvakaenzana pamusoro pewafer, izvo zvinobatsira kuvandudza kufanana kwelayer uye kuderedza zvikanganiso.
GaN epitaxy - Inoshanda nemidziyo yeMOCVD ye LEDs, magetsi emagetsi, uye RF devices.
Maitiro eCVD eSemiconductor - Akajairika mumasisitimu ekuisa gasi uko kutumirwa kwegasi nemazvo uye kudzora kusvibiswa kwacho kunokosha.
Kugadzira makemikari emhando yepamusoro - Inokodzera maitiro akasiyana-siyana ekukura kwekristaro pakupisa kwakanyanya uye maitiro ekuisa firimu rakatetepa.
Kukwikwidza Kunobatsira
Zvakanakira zvehunyanzvi zveCVD SiC coating
Kuputira kweCVD SiC kunoita kuti graphite ive nerukoko rwakachena uye rwakakora pamusoro payo. Unowana simba rekugadzira uye kupisa kwegraphite, pamwe neresistance yemakemikari yesilicon carbide.
Zvipo zvinokosha:
● Kugadzirwa kwezvikamu zvishoma
● High corrosion resistance
● Kudzivirira kupisa kwakanaka
● Kusvibiswa kushoma kwesimbi
● Maitiro akagadzikana zvakanyanya
● Nguva yakareba yehupenyu hwechikamu
Mabhenefiti aya anoita kuti CVD SiC coated shower heads ive sarudzo yakanaka yekugadzira semiconductor yepamusoro, uko kurongeka kwemaitiro uye kuchena kwakakosha.
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