Chifukidziro cheQuartz Chinodzika 150mm 0200-09734

KuSemixlab, tinopa zvikamu zvekamuri re semiconductor zvine hungwaru hwakanyanya zvinoenderana nemapuratifomu eOEM anotungamira. Quartz Cover Pedestal 150mm chinhu chakakosha chinoshandiswa mumakamuri ekugadzira e150mm wafer, chakagadzirirwa kuve nechokwadi chekugadzikana kwemaitiro, kudzora plasma, uye dziviriro yekusvibiswa mumasisitimu epamusoro e thin-film uye etch.

Chivharo cheQuartz Cover Pedestal 150mm chikamu chekamuri chequartz chakachena kwazvo chinoshandiswa mumidziyo yekugadzira yeApplied Materials 150mm. Chinoshanda sechivharo chekudzivirira kana chivharo chechimiro chakakomberedza nzvimbo yepedestal yewafer mukati mekamuri yekugadzira.

Chikamu ichi hachisi chikamu chemuchina wekubata wafer pachawo, asi chikamu chakakosha chemukati mekamuri chinobatsira kutsanangura mamiriro ekushanda panguva yekuisa kana kutema matanho. Chinoita basa rakakosha mukuchengetedza kusimba kwekamuri uye kudzokorora maitiro mumapuratifomu ekugadzira semiconductor akura.

Chinzvimbo uye Basa Rinoshanda Mumidziyo

Mukati memakamuri ekugadzirisa eAMAT 150mm, chifukidziro chequartz chinowanzoiswa chakakomberedza kana pamusoro penzvimbo yechigadziko chewafer, zvichiumba chikamu chejiyomethri yekamuri yemhinduro yemukati.

Mabasa ayo akakosha anosanganisira:

● Kudzivirirwa kwenzvimbo yepedestal kubva pakusangana zvakananga neplasma

● Kubvisa kusvibiswa, kudzivirira zvikamu zvesimbi kuti zvisasanganiswe nemamiriro eplasma anokonzera kupararira kweropa

● Kufamba kweplasma negasi kuchichinja, zvichibatsira pakupararira kwakafanana pamusoro pewafer

● Kugadzikana kwemupendero, kutsigira kuiswa kwemafirimu akafanana uye kugadzikana kwe etch

Mukushanda kwechokwadi, chikamu ichi chinoshanda sechimiro chisina kusimba asi chakakosha chinotsanangura jiometri icho chinokanganisa zvakananga kufanana kwemaitikiro uye kuchena kwekamuri.

Zvakanakira zvinhu zvikuru zvinosanganisira:

● Kugadzikana kwakanaka kwekupisa pasi pemamiriro ekupisa kwepamusoro

● Kugadzirwa kwezvikamu zvishoma, zvichitsigira nzvimbo dzekugadzira dzinopa goho guru

● Kuchena kwakanyanya kwemakemikari, zvichideredza njodzi yekusvibiswa kwesimbi

● Kuramba kwakanaka kunzvimbo dzeplasma, kunyanya mumakemikari akavakirwa pa oxide ne fluorine

● Kugadzikana kwehukuru, zvichiita kuti makamuri agare akafanana nekufamba kwenguva

Zvisinei, quartz chinhu chinodyiwawo munzvimbo dzeplasma, sezvo ichichinjwa zvishoma nezvishoma pamusoro pechinhu ichi uye ichichekwa pasi pekushandiswa kwenguva refu.

Common Kukundikana Modes

Kufanana nezvimwe zvinhu zvekamuri zvine quartz, chifukidziro che 0200-09734 chikamu chinodyiwa chine hupenyu hwakatarwa. Nzira dzakajairika dzekuora dzinosanganisira:

● Kukukurwa kwemvura kunokonzerwa neplasma, kunyanya mumakemikoro ane fluorine yakawanda

● Kucheneswa kwepamusoro kana kuumbwa kwemhute, zvichiratidza shanduko yezvinhu nekufamba kwenguva

● Kukura kwetsangara diki nekuda kwekushushikana kwekupisa

● Kugadzirwa kwezvikamu kunokonzerwa nekushanduka kwesimba remuviri kana kusasimba kwechimiro

● Kuunganidzwa kwenzvimbo dzakakanganiswa kunokonzera kusvibiswa uye kutenderera kwemaitiro

Maitiro aya ekukundikana anowanzo kukonzera kuwedzera kwemazinga ezvimedu, kudzikira kwekugadzikana kwemaitiro, uye pakupedzisira kudiwa kwekutsiva kwakarongwa kwekudzivirira.

Sei Uchifanira Kusarudza Semixlab?

Semixlab inotarisa pazvinhu zvinodyiwa zvemukamuri re semiconductor zvinoshanda zvakanyanya uye zvinhu zvakagadzirwa neceramic/quartz nemazvo zvemasystem epamusoro ekugadzirisa wafer. Zvikamu zvedu zvakagadzirwa kuti zvitsigire kuchena kwakanyanya, kugara kwenguva refu, uye kugadzikana kwemaitiro munzvimbo dzinoda kugadzirwa kwe semiconductor.

Tinosimbisa kururama kweinjiniya, kugara zvakanaka kwezvinhu, uye kuenderana neOEM-level, zvichibatsira vatengi kuchengetedza kushanda kwakasimba kwekugadzira mune ese ari maviri ekare uye epamusoro process nodes.

Kushandiswa Kwakajairika muAMAT 150mm Process Platforms

Chigadziko che quartz chinoshandiswa zvakanyanya mumapuratifomu emidziyo yekare uye yakakura ye 150mm, kunyanya mu:

● PECVD (Plasma Enhanced Chemical Vapor Deposition) makamuri

● Maitiro ekuisa oxide muzvikamu

● Kugadziriswa kwekamuri rakaoma re etch

● Centura neP5000 dzakatevedzana 150mm masisitimu

● Mhando dzepuratifomu dzeVagadziri vekare dzinotsigira mawafer e150mm

Mukati mehurongwa uhu, hunobatsira mukugadzirisa kugadzikana kwekamuri, kuisa firimu rakafanana, uye kudzora kuvharirwa kweplasma, izvo zvakakosha pakuchengetedza kuenderana kwegoho mumitsetse yekugadzira semiconductor yechizvarwa chekare.