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Yakakwirira-Kuchena SiC Wafer Boat
Semugadziri weChinese anotungamira uye mutengesi weHigh-Purity SiC Wafer Boat, Semixlab's Silicon Carbide wafer bhoti inoshandiswa zvakanyanya mumakiyi maitiro ekubatanidza akadai seLPCVD, oxidation uye annealing nekuda kwekugadzikana kwayo kwekupisa, kusagadzikana kwecorrosion uye simba remuchina. Kana iwe uchitsvaga SiC Wafer Boat iyo inogona kuderedza kusvibiswa kwechidimbu, kuwedzera hupenyu hwesevhisi uye kuve nechokwadi chekuchengetedza wafer, chigadzirwa ichi chichava sarudzo yako yakanaka.
tsananguro
Mumunda wekugadzira semiconductor, yakakwirira-tembiricha maitiro anounza matambudziko akanyanya kune vatakuri vatakuri. Kana tembiricha yadarika 1600 ℃, yechinyakare quartz carrier (wafer inoshandiswa quartz boat) inotanga kupfava nekukanganisa uye kuburitsa zvinosvibisa, zvichikonzera mwero wezvimedu zvewafer kuti ukwire.
Yakakwira-Kuchena SiC Wafer Boat, ine mabhenefiti ezvakanakira esilicon carbide (SiC), inogadzirisa zvachose iyi indasitiri inorwadza nzvimbo uye inova chishandiso chakakosha chekugadzira semiconductor yekugadzira, kunyanya SiC magetsi ekugadzira mudziyo.
Magadzirirwo
Core zvemuviri zvivakwa uye tekinoroji ma parameter echigadzirwa:
| Maitiro ekuita | Yakakwirira-Kuchena SiC Wafer Boat | Traditional quartz mutakuri | Mabhenefiti akavandudzwa |
| Kunonyanyisa kushanda tembiricha | 1800°C (inoenderera) / 2000°C (pamusoro) | 1200 ° C | Kuramba tembiricha kwakavandudzwa ne50% |
| Kupisa kwemafuta | 4.9 W/cm·K (tembiricha yemumba) | 1.5 W/cm·K | Kushanda kwekupisa kupisa kwakawedzera ne226% |
| Coefficient yekuwedzera kwekushisa | 4-5 × 10⁻⁶/K | 0.55 × 10⁻⁶/K | Kugadzikana kwekushisa kwakavandudzwa ne7 nguva |
| neukukutu | Mohs 9.2 (yechipiri chete kudhaimondi) | Mohs 7 | Kuramba kupfeka kwakavandudzwa ne30 nguva |
| Wafer contact point stress | <5 MPa (anti-slip dhizaini) | > 20 MPa | Wafer slip rate yakaderedzwa ne80% |
| Particle release | 0 zvidimbu/cm² (Kirasi 100 kuchena) | > 50 zvimedu/cm² | Kusvibisa kunosvika zero |
Kuita kwakanakisa kwesilicon carbide wafer carrier (SiC Wafer Carrier) kunobva kune yakasarudzika zvinhu zvesainzi. Pazasi pane kuenzanisa kwakadzama kweakakosha emuviri paramita:
Aya ma paramita anoshandura zvakananga mugoho rakavandudzwa uye kuderedzwa kwemitengo mukugadzira semiconductor, sezvinoratidzwa mune zvinotevera:
Thermal performance advantage: SiC's wide bandgap (3.26 eV) inova nechokwadi chokuti inochengetedza chimiro chekristaro chakagadzikana pa 2000 ° C uye inodzivisa kupisa kwekushisa. High thermal conductivity (4.9 W/cm·K) inobvumira kuti wafer awedzere kupisa zvakaenzana uye anobvisa kukanganisa kwelattice kunokonzerwa nekupisa kwekupisa.
Mechanical simba: 9.2 Mohs kuomarara kunoramba kukanganiswa kwemuviri panguva yekuita, uye hupenyu hwesevhisi hunodarika ka10 kupfuura yevatakuri vequartz yechinyakare. Iyo yakasarudzika semicircular slot dhizaini inodzora wafer yekubata kushushikana pazasi 5MPa, ichibvisa iyo yakanyanya-tembiricha inotsvedza chiitiko.
Kemikari inertness: Kushivirira kune gasi rinoparadza zvakanyanya seHF neHCl rinopfuura maawa e10,000, uye zero kusvibiswa kunochengetwa muLPCVD, kupararira, oxidation uye mamwe maitiro.
Applications
Basa rakakosha rePamusoro Purity SiC Wafer Boat
Yedu Yepamusoro-Kuchena SiC Wafer Boat inoshandiswa zvakanyanya mune anotevera akakosha semiconductor ekugadzira maitiro:
High-Temperature Annealing: Mumutsara wekugadzira we sic wafer mugadziri, yakakwirira-tembiricha annealing inhanho yakakosha yekumisikidza dopants uye kugadzirisa retice kukanganisa. Kugadzikana kwepamusoro-tembiricha yeSiC wafer boat inovimbisa kufanana uye kushanda kweiyo annealing process.
Epitaxial Kukura: Ingave silicon-based epitaxy kana silicon carbide wafer epitaxy, iyo yakanyanya tembiricha kuramba uye kushorwa kweSiC wafer bhoti inoita kuti ive inotakura yakakodzera kuti ive yemhando yepamusoro epitaxial layer kukura.
Distribution: Muchoto chekupisa chepamusoro-soro, chikepe cheSiC wafer chiri muLPCVD wafer boat chinogona kumira kwenguva refu-yepamusoro-tembiricha kurapwa kuti ive nechokwadi chekupararira kwemaatomu edoping uye kugadzira chaiwo magetsi emagetsi.
Mutete Firimu Deposition: Kunyanya kune Lpcvd wafer chikepe maapplication, iyo yakanyanya kuderera kudurura chidimbu uye yakanakisa yekupisa conductivity yeSiC wafer mabhoti anobatsira kuwana emhando yepamusoro, epamusoro-akafanana mafirimu.
Inoenderana michina uye process inoenderana:
✔ Inoenderana neyakajairwa LPCVD mavira (akadai seTEL, Kokusai, ASM, SVG, Tystar, nezvimwewo)
✔ Customizable wafer yakatarwa senge 100mm/150mm/200mm
✔ Inotsigira yakachinjika uye yakatwasuka process midziyo yekuisa
Semixlab's SiC wafer bhoti isarudzo yakanaka yekuvandudza yako maitiro uye goho rechigadzirwa, uye ari mutungamiri mune yepamusoro Semiconductor wafer chikepe mhinduro.
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