Nei TaC Coated Susceptors Yakakosha Pakukura kweMoCVD ye LED yeUV yakadzika

Munguva yekugadzirwa kweMOCVD kwema LED eUV akadzika, kudzorwa kwakanyanya kwekukura kunodiwa uye susceptor ine simba guru kupfuura zvinotarisirwa. Pakupisa kwakanyanya uye kana magasi anochinja-chinja ashandiswa mukuita izvi, nzvimbo inobatwa mawafers inofanira kunge yakadzikama uye yakachena. MaSusceptors anoita basa racho nerubatsiro rwe Tac coating zvinodzivirira. Zvinobatsira kuchengetedza nharaunda yakaenzana zvinoita kuti pave nezvikamu zvakafanana zvekristaro uye zvikanganiso zvishoma. Munzvimbo chaidzo dzemufekitori, mainjiniya dzimwe nguva vanoona kufanana kwewafer kuchivandudzwa pavanochinja kuenda kunzvimbo dzakagadziriswa dzakagadziriswa, kunyanya kune maumbirwo eUV akadzika sezvo anonyanya kubatwa kupfuura zvikamu zve LED.

Hunhu hweMaitiro uye Matambudziko eZvinhu zveDeep UV LED Epitaxy

Deep UV LED epitaxy inzira yakaoma nekuti zvinhu zvese zvinoitika panguva imwe chete uye mumamiriro ezvinhu akaoma. Tembiricha yakakwira, gasi rinoita reactivities rakakwirira, kukura kwaro kwakamanikana. Kuumbwa kwe crystal layers kunonyanya kukanganiswa nekuchinja kwekupisa kwakaringana nemamiriro epamusoro, kunyangwe kana paine shanduko diki. Saka, mainjiniya vanopedza nguva yavo yakawanda vachigadzirisa maitiro acho, pane kuamhanyisa. Dambudziko guru rinounzwa nezvinhu zvakapfuma muaruminiyamu zvakaita seAlGaN. Aya ma layers anodiwa kuti UV ibudiswe zvakadzika asi zvakaoma kukura nenzira yakagadzikana. Pamusoro pacho pachava nezvikanganiso kana tembiricha isina kugoverwa zvakaenzana. Mune mamwe ma production lines, munhu anogona kuona kupenya kusina kuenzana uye/kana kuderera kwewafers, nekuda kwemhepo inopisa iri kunze kwepakati panguva yekukura. Kusvibiswa idambudzikowo. Zvinoita sekunge kunyangwe kuita kudiki kwemagasi ane zvikamu zvemukamuri kuchaumba zvikanganiso zvefirimu patembiricha idzi. Nekufamba kwenguva, kuunganidzwa uku kunoonekwa uye kunoonekwa sekusiyana kwe batch-to-batch. Mainjiniya mazhinji anotaura kuti kumhanya kushoma kwekutanga mushure mekugadzirisa kunoita sekunge kunoshanda zvakanaka, kwozobva kwaderera zvishoma nezvishoma sezvo kamuri rinopera. Basa repamusoro pe susceptor harina basa guru muchirongwa ichi chezviitiko asi rine rimwe. Haringogumiri pakuchengetedza wafer, rine mhedzisiro pakupararira kwekupisa uye kugadzikana kwenzvimbo ye reaction. Pakubata nenzvimbo dze graphite chaidzo uye kuyedza nekutarisa nzvimbo dzakaputirwa dzinopesana nenzvimbo dzisina graphite, munhu anogona kuwana musiyano mukufanana pakushanda pasi pema wavelengths e280nm. Imwe yenzira dzinoshanda kwazvo dzekuvandudza mashandiro ndeyekutarisa thermal mapping uye kusiyana kwe wafer-to-wafer. Shanduko diki mukumhanya kwekutenderera, kuenzana kwemhepo negesi uye kutarisa mamiriro epamusoro zvinogona kubatsira kuderedza zvikanganiso. Kune vazhinji vemainjiniya eprocess, kutenderera kwenguva refu kunotariswa pane kungomhanya kamwe chete sezvo matambudziko ekukura kweUV akadzika anogona kuoneka nekufamba kwenguva kwete panguva imwe chete.

Kusakwana kweZvinhu Zvinoshandiswa Pakusveta Matumbu muKukura kweAlGaN Yakawanda

Zvinhu zvechinyakare zve susceptor zvakaita se graphite isina chinhu kana kunyange graphite yakajairika yeSiC-coated inotanga kuratidza miganhu yakajeka mukukura kweAl-AlGaN nekukurumidza kana kukura kwakadzika kweUV kwawanikwa. Dambudziko guru rinobva pakugadzikana. Pamusoro pegraphite yakajairika panoita zvishoma nezvishoma magasi e process pakupisa kwakanyanya kunodiwa kune zvikamu zvine aluminium. Izvi zvinoshandura mamiriro epamusoro uye zvinokanganisa kutamiswa kwekupisa kuenda ku wafer nekufamba kwenguva. Kana kutamiswa kwekupisa kusina kugadzikana, tembiricha ye wafer inogona kuchinja panguva yekukura. Kuchinja kudiki kunogona kukonzera kuiswa kwealuminium kusina kufanana. Mukuita, izvi zvinozviratidza muchimiro chekukotama kwe wafer kana kuchinja kwe wavelength pachiso che wafer. Mainjiniya anogona kukwanisa kushandisa resipi imwechete, asi achiwana mhedzisiro yakasiyana batch kune batch, zvichikanganisa mukuita kwekukwidziridzwa. Chimwe njodzi yekusvibiswa. Carbon yakagadzirwa nezvigadzirwa kubva ku graphite inogona kupinda munzvimbo ye reaction munzvimbo ine MOCVD ine hutsinye. Zviratidzo zvacho zvidiki kwazvo uye zvikamu zveAl-rich AlGaN zvinonzwa zvakanyanya. Kusachena kwakaderera kunogona kutungamira kune huwandu hwakawanda hwekukanganisa kana kudzikira kwekushanda kwemukati kwe quantum. Kana zvasvika pakugadzikana kwepakutanga, vamwe vagadziri vanoti vanofanirwa kuchenesa makamuri kakawanda nepamusoro pema susceptor kuti varambe vakagadzikana kwepakutanga. Zvimwe zvezvipingamupinyi izvi zvinogona kukundwa uchishandisa ma coated versions akadai se standard SiC, asi kunewo miganhu ye coated SiC pasi pe UV yakadzika. Kana ikashandiswa kwenguva yakareba, kuora kwe coatings kunogona kutanga, kunyanya kumativi ose uko kune thermal stress yakakura. Kana coatings surface isina kuenzana, kufanana kwekupisa kunodzikira zvakare, uye process drift inodzoserwa. Mukuita, zvakaonekwa kuti zvakaoma kuwedzera Al content recipes uchishandisa standard susceptors. Inogona kushanda mu short production run asi haina kugadzikana mu regular production run. Ndosaka kusarudzwa kwezvinhu pa susceptor level ikozvino kuri chikamu chikuru che process detail.tor level yava chikamu chakakosha che process development, kwete kungotsigira process detail.tor level.

Mabhenefiti eTaC Coatings muAmmonia-Rich uye High-Temperature Mamiriro

Mukukura kweMOCVD ine ammonia yakawanda, nzvimbo yemukamuri inova nehasha zvikuru, kunyanya kana ichishanda pakupisa kwakanyanya kweAl-rich AlGaN layers. Ammonia inova nehasha zvikuru kana yapiswa, zvichigadzira mhando dzeN neH dzinoita reactive. Izvi zvinogona kupedzisira zvarwisa nzvimbo dzayo dzinoshandiswa neamonia uye zvichichinja maitiro ayo zvishoma nezvishoma. CVD TaC Ma susceptor akaputirwa anonyatso shivirira mamiriro ezvinhu aya, sezvo pamusoro pacho panoramba pakasimba mumamiriro ezvinhu akaoma. Kubatsira kukuru ndiko kuramba kwemakemikari. TaC haigadzirisike nyore neammonia kana zvimwe zvinogadzirwa panguva yekukura kweUV yakadzika. Izvi zvinobatsira mukugadzirwa chaiko kuderedza kupfeka kwepadenga uye kuvandudza kufanana kwemamiriro e susceptor munguva refu. Mainjiniya vanogona kuona kuti kamuri rinoramba rakachena kwenguva yakareba pasina kugadziriswa. Chimwe chinhu chakakosha kugadzikana kwekupisa. Kukura kwekupisa kwakanyanya, kazhinji > 400C, kunowanzo shandiswa pakukura kwe LED yeUV yakadzika nekuda kwekudiwa kwezvikamu zvakawanda zvealuminium. Muzviitiko izvi, zvimwe zvinhu zvekuputira zvinotanga kupfava kana kutanga kuora zvishoma nezvishoma. TaC ine simba rekuchengetedza chimiro chayo uye inochengetedza kupararira kwekupisa kwakafanana mukati me wafer yese. Wafer yakafanana ichaumbwa kana munda wekupisa ukaramba wakafanana, sezvo pachava nemisiyano mishoma pakati pemucheto nepakati. Inobatsirawo pakuderedza kusvibiswa. Paunoshandisa zvigadziriso zvekare, zvinosara zvine chekuita nekabhoni kana reaction zvinogona kuungana zvishoma nezvishoma uye kukanganisa kunaka kwekristaro. Kuunganidzwa kunoderedzwa zvakanyanya mu TaC yakavhara graphite hita Muenzaniso wenyaya yekugadzira yakapihwa nemumwe mainjiniya wekugadzira zvinhu wakaratidza kuti kushandiswa kwe susceptor yakapfava yakapfava kwakaderedza huwandu hwematanho ekuchenesa makamuri uye kwakavandudza kugadzikana kwekumhanya-mhanya kunyanya kune ma wavelength ari pasi pe270 nm. Kudzokororwa kwenguva refu chimwe chinhu chichatariswa nemainjiniya. Shanduko diki mumamiriro e susceptor mukugadzirwa kwehuwandu hwakawanda kunogona kukonzera kudonha kwesimba rekuburitsa kana shanduko muhurefu hwewavelength. Nzvimbo dzakaputirwa neTaC dzinoratidza kushanda kwenguva refu, zvichibatsira kuderedza kusiyana kwebatch kusvika batch. Kazhinji, TaC coating mumamiriro eMOCVD ane ammonia yakawanda uye tembiricha yepamusoro inogona kushanda sechipingamupinyi chakasimba chekuona kuchengetedzwa kwenzvimbo yekushanda uye kugadzikana kwekukura, nokudaro zvichiita kuti kutonga kweUV LED structures kuve nyore.

Simba paEpitaxial Uniformity, Yield, uye Device Performance

Sezvo deep UV LED epitaxy ichikwira kusvika pahukuru hwekugadzirwa, kusiyana kudiki munzvimbo yekukura kunova pachena mumhando yemawafer. Susceptor surface inobatanidzwa zvakananga mukufanana, goho uye kushanda kwekupedzisira kwemuchina nenzira iyi. Chinhu chekutanga chinotarisirwa nemainjiniya i epitaxial uniformity. Kana kupisa kusina kugoverwa zvakaenzana pamusoro pewafer, AlGaN layers ichakura zvishoma nezvishoma kubva pakati pewafer kusvika kumucheto. Izvi zvinoguma nekusiyana kweukobvu uye kuenderana. Izvi zvinogona kuratidza sekuchinja kwe peak wavelength pa wafer map mu real fab run. TaC coated susceptors inochengetedza nzvimbo yakagadzikana yekupisa zvichikonzera kukura kwakaringana. Mhedzisiro yacho kupararira kudiki kwema wavelengths uye wafer yakagadziridzwa kusvika kune wafer uniformity. Imwe nzvimbo inobatsira i goho. Maitiro ekugadzira ne deep UV anonyanya kunzwisisika kune chero kukanganisa, kunyangwe kudiki, kunogona kukonzera kukundikana kwe die. Mamiriro ekukura asina kugadzikana ndiwo anokonzera zvinhu zvakaita sekusiyana, point defects, kana rough interfaces. Kana pamusoro pe susceptor pakagadzikana mu ammonia, munzvimbo inodziya zvakanyanya, kuchinja kunodzikira nekufamba kwenguva. Mushure mekushandura kune masisitimu akasimba akaputirwa, mainjiniya anoona nyore nyore huwandu hwakaderera hwe wafers dzakarambwa, kunyanya mushure menguva refu yekugadzira. Kuenzana uye kudzora kukanganisa zvakabatana zvakanyanya nekushanda kwemidziyo. Epitaxial layer yakakura zvakafanana ichaita kuti quantum ishande zvakanaka mukati uye kuenzana kuri nani kwechiedza chinobuda mu wafer yese. Mukuita, zvinoreva ma LEDs asingangoshande zvirinani chete, asi anonyatso fungidzika. Mukuita, zvinoreva ma LEDs anoshanda zvirinani uye anonyatso fungidzika. Mamwe mapoka ekugadzira anotaura kuti upamhi hwekupararira kwemabhanga hunova hudiki zvinoita kuti zvive nyore kuronga pasi uye kuderedza marara. Panogonawo kuva nemhedzisiro yenguva refu isingaonekwe pakutanga. Nenzvimbo dzakajairwa, kuyerera kudiki nemavhiki nemwedzi sezvo kamuri richikura. Kugadzikana kwakasimba kunowedzera kuyerera kushoma, uye kushanda kwekutanga kuchava pedyo nechinangwa chepakutanga cheresipi. Mukupfupisa, nzvimbo yakagadzikana ye susceptor haisi chete hwaro hwekukura. Inokanganisa zvinyararire kuenderana, kushanda zvakanaka uye kuvimbika kwemwenje weUV LEDs wekupedzisira mukugadzirwa kwemagetsi akawanda.

Maitiro Ekusarudza Akakosha eDeep UV LED Susceptor Solutions

Kusarudza susceptor yekukura kwe LED ye UV yakadzika haisi nyaya iri nyore yekusarudza chikamu chine hupenyu hurefu. Chine simba rakananga pakugadzikana kwenguva refu kweMOCVD yako. Kukura kweAl-rich AlGaN kunonyanya kugadzikana pahwindo rekushanda, uye chero kushaya simba kwe susceptor kunogona kukurumidza kukonzera goho kana kushanda. Kugadzikana kwekupisa ndechimwe chezvinhu zvekutanga zvinoongororwa nemainjiniya. Zvakakosha kuparadzira kupisa zvakaenzana pamusoro pe wafer, kunyangwe pakupisa kwakanyanya, uye iri ndiro basa re susceptor. Kana imwe nzvimbo ikanyanya kupisa kupfuura imwe, zvidimbu zvekristaro hazvina kuumbwa zvakaenzana. Izvi zvinoreva kuchinja kwewavelength pamusoro pehukuru hwe wafer panguva yekugadzira chaiyo, zvichiita kuti kugadziriswa mushure mekugadzirwa kuve kwakaoma. Susceptor yakanaka inochengetedza tembiricha yemunda kubva kumhanya kusvika kumhanya. Chimwe chinhu chakakosha kufunga nezvacho kuramba makemikari. Kukura kweUV yakadzika kunoshandisa nzvimbo dzakapfuma muammonia, dzinogona kurwisa zvinhu zvisina simba zvishoma nezvishoma. Izvi zvinoguma nekuchinja kwenzvimbo nekufamba kwenguva izvo zvinokanganisa kugadzikana kwemaitiro. Kugona kuramba maitiro aya uye kuchengetedza mamiriro epamusoro mushure mekutenderera kwakawanda kunopihwa nependi yakasimba. Kuchena kwepamusoro kwakakoshawo kupfuura zvinotendwa nevakawanda. Kana mawavelength eUV ari muUV yakadzika, huwandu hushoma hwekusvibiswa hunogona kuita mutsauko mukushanda zvakanaka kwemuchina. Kana tsvina shoma ikaburitswa panguva yakareba, mamwe machira anoziva nezvehuwandu hwakanyanya hwekukanganisika. Pendi yakagadzikana inogona kubatsira kuderedza njodzi iyi uye kuchengetedza nzvimbo yakachena yekukura. Kushandiswa kwenguva refu kwakakoshawo. Pendi inogona kushandiswa kakawanda pakugadzira yakawanda. Kuora kwekutanga kwependi kunogona kutungamira mukuderera kwemaitiro, izvo zvinogona kuoma kutarisa. Mumashandisirwo akakosha, akadai seindasitiri yendege, mainjiniya vanoda zvinhu zvinoshanda zvishoma nezvishoma kunyangwe mushure mekusangana kwenguva refu nemagasi anopisa nemamwe magasi anochinja. Chekupedzisira asi chisiri chidiki, pane kuenderana pakati pemabatch. Mhinduro yakakodzera yependi inofanira kuva nehunhu hwakafanana pakushandiswa kwega kwega. Kuchinja kwekushanda nekukurumidza nekushandiswa kunoita kuti zviome kuchengetedza resipi yekugadzira yakagadzikana. Kazhinji zviri nani kusarudza iyo ichaderedza kushamisika munzvimbo chaiyo yekugadzira. Chinosimudzira chiedza chakagadzikana hachisi kungotsigira kukura chete, asiwo chinoita kuti pave nemaitiro anofungidzirwa, chinhu chikuru mukugadzirwa kwemwenje weUV wakadzama.